[Scan]
initial_time=2016-02-17T19:59:12
final_time=2016-02-17T19:59:31
ip_count=19
run=1032
dataset=6
scan=163
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.79365E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.27811E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.29944E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.52532E-9
ql4_vset=
ql4_vmon=-2.14577E-4
ql4_imon=1.5475E-8
mult1=-8.88551E-9
mult2=-2.79047E-9
rf_tmon=-4.74074E-3
rf_agc=3.25946E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=5.47886E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70338E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.03222E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02429E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05189E1
cs_ea1_imon=2.1787E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02534E0
lens1_imon=1.29031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.5901E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84133E1
cs_ef1a_imon=2.98739E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.70555E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27219E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15589E1
os_ea1_imon=2.20171E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63328E1
os_ef1bup_imon=3.0694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.26447E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02307E1
cs_anode1_imon=3.26541E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.22227E-8
tplens_vset=1.4E-1
tplens_vmon=1.6727E0
tplens_imon=-6.52862E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.48462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.59682E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98615E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.48138E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=1.98687E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3338E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7449E1
cs_ef2b_imon=3.11562E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85557E0
os_ea2_imon=-4.15688E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06168E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71484E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0424E0
os_ef2alow_imon=-2.80047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58048E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11025E1
os_restr2_imon=3.51632E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.28191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.07704E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.0957E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=9.74759E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-1.90733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.59401E-6
window_vset=0.0E0
window_vmon=1.88725E-1
window_imon=-1.29569E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.85939E1
mask2_imon=-8.33481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.11617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.58667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08789E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=1.00664E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66439E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73673E-2
os_fil2_imon=-2.55334E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7344E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.37958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.17997E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22592E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20023E-1
res40_imon=-2.60933E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3003E4	9.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80023E1	-1.66893E-4	-8.80005E1	0.0E0	5.05447E-3	9.33647E-2	2.73281E1	-3.27812E1	-3.26596E1	2.68106E1	1.6565E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99729E-1
2.0E0	5.55E3	1.0E1	3.16E2	1.6E2	-7.22418E-2	-8.80022E1	-4.29153E-4	-8.80003E1	7.15256E-5	5.07832E-3	9.34362E-2	2.73219E1	-3.26302E1	-3.26482E1	2.68244E1	1.6565E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.00192E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80024E1	-5.72205E-4	-8.80001E1	-4.76837E-5	5.34058E-3	9.3174E-2	2.73003E1	-3.27059E1	-3.26404E1	2.68274E1	1.6565E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00996E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80021E1	-3.09944E-4	-8.80003E1	-7.15256E-5	5.55515E-3	9.34362E-2	2.73234E1	-3.26697E1	-3.26207E1	2.67782E1	1.6565E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.97903E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80018E1	-5.00679E-4	-8.80003E1	-9.53674E-5	5.22137E-3	9.3317E-2	2.72943E1	-3.26645E1	-3.26404E1	2.68172E1	1.6565E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.98153E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80022E1	-6.67572E-4	-8.80002E1	-1.19209E-4	5.17368E-3	9.34362E-2	2.73236E1	-3.26585E1	-3.26031E1	2.67998E1	1.6565E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.97903E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.8002E1	-5.48363E-4	-8.80002E1	-2.14577E-4	5.38826E-3	9.32217E-2	2.73216E1	-3.2661E1	-3.26279E1	2.68101E1	1.6565E-7	2.52262E-3	2.52262E-3	6.31761E-3	1.99176E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.8002E1	-2.38419E-4	-8.80007E1	1.43051E-4	5.45979E-3	9.33409E-2	2.72883E1	-3.26625E1	-3.26289E1	2.67931E1	1.65725E-7	2.51271E-3	2.51271E-3	6.33592E-3	1.98625E-1
1.2E1	3.14E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80022E1	-3.33786E-4	-8.80003E1	-4.76837E-5	5.19753E-3	9.33647E-2	2.73281E1	-3.26508E1	-3.2662E1	2.68088E1	1.65721E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.00534E-1
1.3E1	2.9E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80024E1	-4.05312E-4	-8.80004E1	-9.53674E-5	5.29289E-3	9.3317E-2	2.72598E1	-3.26866E1	-3.26419E1	2.67698E1	1.6565E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9917E-1
1.4E1	7.06E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80025E1	-2.86102E-4	-8.79998E1	-9.53674E-5	5.74589E-3	9.32932E-2	2.7352E1	-3.26801E1	-3.26332E1	2.67962E1	1.6565E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98419E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80021E1	-3.09944E-4	-8.80001E1	-2.6226E-4	5.45979E-3	9.3317E-2	2.72768E1	-3.26148E1	-3.26561E1	2.67862E1	1.65722E-7	2.51607E-3	2.51607E-3	6.31837E-3	1.98075E-1
1.6E1	3.23E3	2.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80021E1	-5.00679E-4	-8.80002E1	-9.53674E-5	5.67436E-3	9.33409E-2	2.73129E1	-3.26374E1	-3.26074E1	2.68063E1					
1.7E1	3.9302E4	2.9E1	6.87E2	4.7E2	-7.37874E-2	-8.80025E1	-6.19888E-4	-8.80002E1	-7.15256E-5	5.45979E-3	9.30309E-2	2.7324E1	-3.26119E1	-3.27086E1	2.67984E1	1.65722E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99283E-1
1.8E1	1.72747E5	1.28E2	7.27E2	5.0E2	-7.43285E-2	-8.80024E1	-5.96046E-4	-8.80003E1	-4.76837E-5	5.126E-3	9.29117E-2	2.73219E1	-3.26218E1	-3.26554E1	2.67956E1	1.65721E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
1.9E1	3.772E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80021E1	-4.52995E-4	-8.8E1	2.38419E-5	5.29289E-3	9.29117E-2	2.73508E1	-3.26404E1	-3.26651E1	2.68118E1	1.65722E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
2.0E1	3.4E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80021E1	-4.05312E-4	-8.80003E1	-2.38419E-5	5.72205E-3	9.31501E-2	2.73039E1	-3.26667E1	-3.26213E1	2.68058E1	1.6565E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.01372E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80023E1	-4.05312E-4	-8.80001E1	-1.43051E-4	5.76973E-3	9.33886E-2	2.73147E1	-3.26488E1	-3.26693E1	2.67717E1	1.6565E-7	2.51954E-3	2.51954E-3	6.36687E-3	2.01907E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80023E1	-5.00679E-4	-8.80002E1	-3.33786E-4	5.74589E-3	9.29832E-2	2.73464E1	-3.2685E1	-3.26408E1	2.67794E1	1.65721E-7	2.51364E-3	2.51364E-3	6.32087E-3	1.99595E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80022E1	-5.96046E-4	-8.80004E1	-2.14577E-4	5.84126E-3	9.3317E-2	2.72919E1	-3.26879E1	-3.26386E1	2.67908E1