[Scan]
initial_time=2016-02-17T20:00:58
final_time=2016-02-17T20:01:18
ip_count=19
run=1032
dataset=6
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44831E-2
qbias_imon=-3.8512E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.02396E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.27342E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.52007E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.55278E-8
mult1=-9.84875E-9
mult2=-2.82241E-9
rf_tmon=-3.45497E-3
rf_agc=3.44631E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.54228E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69394E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20096E1
lens5a_imon=1.97023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=3.02214E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02546E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.22436E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04481E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64585E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04469E1
cs_ea2_imon=1.54125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84122E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.70917E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.2628E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=2.19498E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.09547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28159E0
cs_ionrep_imon=1.23616E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01769E1
cs_anode1_imon=3.23482E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=4.21983E-8
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=6.92114E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.58621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.73196E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=1.9858E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33374E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74368E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.79835E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71009E1
cs_ef2a_imon=3.17609E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0951E0
os_ef2alow_imon=-2.78657E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.79478E-1
os_ef2bup_imon=-5.51117E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10544E1
os_restr2_imon=3.52813E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.26419E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.09847E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68001E1
iondef4_imon=1.08051E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10201E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=9.77166E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14173E0
cs_ionaccel_imon=-2.11932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56538E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=1.63819E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86118E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.36582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.49843E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=5.78182E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.57225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.10225E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.645E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=1.00369E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61127E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-2.46646E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71795E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.0181E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22556E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.69632E-1
res40_imon=-2.57111E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3169E4	1.4E1	1.47E2	4.1E1	-7.27053E-2	-8.8002E1	-5.24521E-4	-8.8E1	4.76837E-5	5.84126E-3	9.30548E-2	2.73381E1	-3.26455E1	-3.25977E1	2.68304E1	1.65721E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.98153E-1
2.0E0	5.7E3	6.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80023E1	-4.76837E-4	-8.79998E1	1.66893E-4	5.93662E-3	9.31025E-2	2.7299E1	-3.26805E1	-3.26272E1	2.67746E1	1.6565E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98247E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.8002E1	-8.82149E-4	-8.79997E1	-2.38419E-5	6.00815E-3	9.34601E-2	2.73271E1	-3.26561E1	-3.26214E1	2.6813E1	1.6565E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80022E1	-4.29153E-4	-8.79996E1	1.90735E-4	5.55515E-3	9.30071E-2	2.72684E1	-3.26579E1	-3.26188E1	2.68395E1	1.6565E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98322E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80023E1	-4.29153E-4	-8.8E1	0.0E0	5.6982E-3	9.34124E-2	2.73075E1	-3.26337E1	-3.26502E1	2.67914E1	1.6565E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.98661E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80022E1	-7.39098E-4	-8.8E1	0.0E0	5.55515E-3	9.2864E-2	2.73804E1	-3.26634E1	-3.26229E1	2.68046E1	1.65794E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8002E1	-3.09944E-4	-8.79999E1	2.14577E-4	5.55515E-3	9.31025E-2	2.7288E1	-3.26585E1	-3.26307E1	2.67998E1	1.65722E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80021E1	-4.05312E-4	-8.80001E1	2.86102E-4	5.38826E-3	9.30786E-2	2.72714E1	-3.2648E1	-3.25899E1	2.68052E1	1.6565E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9911E-1
1.2E1	3.02E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.8002E1	-4.76837E-5	-8.79998E1	1.90735E-4	5.45979E-3	9.32693E-2	2.73123E1	-3.26741E1	-3.26068E1	2.68106E1	1.6565E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.9963E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80022E1	-5.00679E-4	-8.80001E1	3.33786E-4	5.07832E-3	9.30309E-2	2.72945E1	-3.26372E1	-3.26107E1	2.68142E1	1.65794E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98075E-1
1.4E1	6.7E2	1.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80022E1	-6.19888E-4	-8.8E1	1.19209E-4	5.07832E-3	9.34124E-2	2.72965E1	-3.2675E1	-3.26536E1	2.67926E1	1.65794E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98247E-1
1.5E1	1.2E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80018E1	-2.86102E-4	-8.80001E1	2.38419E-5	5.24521E-3	9.33647E-2	2.73057E1	-3.26386E1	-3.26212E1	2.6798E1	1.65866E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99456E-1
1.6E1	3.234E3	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80023E1	-4.05312E-4	-8.80003E1	-1.90735E-4	5.57899E-3	9.31501E-2	2.73255E1	-3.26675E1	-3.26464E1	2.67944E1	1.6565E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1
1.7E1	3.9525E4	3.2E1	6.87E2	4.7E2	-7.27828E-2	-8.80023E1	-7.39098E-4	-8.80001E1	1.43051E-4	5.67436E-3	9.3174E-2	2.72962E1	-3.27192E1	-3.26508E1	2.68076E1	1.6565E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00151E-1
1.8E1	1.72745E5	9.0E1	7.27E2	5.0E2	-7.30918E-2	-8.80021E1	-2.6226E-4	-8.80001E1	2.86102E-4	5.45979E-3	9.32455E-2	2.73105E1	-3.26651E1	-3.2632E1	2.67824E1	1.65721E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00705E-1
1.9E1	3.639E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80024E1	-4.05312E-4	-8.8E1	1.90735E-4	5.74589E-3	9.32693E-2	2.72962E1	-3.26791E1	-3.26083E1	2.67926E1	1.6565E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00499E-1
2.0E1	3.64E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80025E1	-5.96046E-4	-8.8E1	-2.38419E-5	5.50747E-3	9.32455E-2	2.73105E1	-3.26657E1	-3.26506E1	2.67978E1	1.6565E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00499E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80022E1	-5.96046E-4	-8.79999E1	-1.66893E-4	5.57899E-3	9.3317E-2	2.7301E1	-3.27039E1	-3.26343E1	2.68148E1	1.65721E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.98661E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.8002E1	-6.67572E-4	-8.80001E1	1.19209E-4	5.60284E-3	9.34839E-2	2.73027E1	-3.27133E1	-3.26478E1	2.68034E1	1.6565E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.98764E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.44831E-2	-8.80022E1	-1.12057E-3	-8.80001E1	0.0E0	5.31673E-3	9.33886E-2	2.73369E1	-3.26951E1	-3.26591E1	2.68001E1	1.6565E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9917E-1