[Scan]
initial_time=2016-02-17T20:01:25
final_time=2016-02-17T20:01:45
ip_count=19
run=1032
dataset=6
scan=168
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.81022E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.87702E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.29278E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.55324E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.55433E-8
mult1=-1.17873E-8
mult2=-2.81842E-9
rf_tmon=-2.97431E-3
rf_agc=3.40786E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=5.60975E-10
bslens_vset=-6.2E0
bslens_vmon=-6.74304E0
bslens_imon=2.23854E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18126E1
lens5a_imon=1.90484E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.06182E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.03604E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0478E2
lens23_imon=1.02633E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03913E1
cs_ea1_imon=2.05625E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95964E0
lens1_imon=1.7735E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64404E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05853E1
cs_ea2_imon=1.67052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.01081E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.70907E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.28481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.10852E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1091E0
cs_ionrep_imon=1.19647E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91973E2
cs_nozzle_imon=1.94408E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.24435E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=4.22477E-8
tplens_vset=1.4E-1
tplens_vmon=1.7652E0
tplens_imon=-1.15493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27011E1
iondef2_imon=1.63555E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03104E2
lens6_imon=2.98897E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.29625E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22867E0
ionrepsh_imon=1.91746E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32546E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.95807E0
os_ea2_imon=2.12557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06209E2
lens4b_imon=2.00183E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10081E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70104E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.53231E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22877E2
cs_ionfoca_imon=6.26179E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.28029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73502E1
iondef1_imon=1.19611E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09935E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.76306E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92711E3
multa_neg_imon=8.39941E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93662E3
defgrida_imon=6.08863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.80241E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.85871E0
defgridb_imon=7.02231E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.59653E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06554E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64436E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=1.00534E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62156E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66725E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68678E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66309E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22693E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.65791E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.6621E-1
res40_imon=-2.79249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3083E4	1.6E1	1.47E2	4.1E1	-7.26282E-2	-8.80019E1	-5.96046E-4	-8.8E1	0.0E0	5.67436E-3	9.32455E-2	2.73978E1	-3.27228E1	-3.24835E1	2.67891E1	1.6565E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.9963E-1
2.0E0	5.635E3	6.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80022E1	-9.05991E-4	-8.80002E1	1.90735E-4	5.31673E-3	9.32693E-2	2.72923E1	-3.26877E1	-3.26251E1	2.68077E1	1.6565E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.99227E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80022E1	-5.00679E-4	-8.80001E1	3.09944E-4	5.17368E-3	9.32455E-2	2.73163E1	-3.26779E1	-3.26319E1	2.68099E1	1.65706E-7	2.51624E-3	2.51624E-3	6.32434E-3	1.99061E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80022E1	-1.43051E-4	-8.8E1	4.29153E-4	5.45979E-3	9.32217E-2	2.73222E1	-3.26596E1	-3.26331E1	2.68124E1	1.6565E-7	2.51814E-3	2.51814E-3	6.31269E-3	1.99227E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80021E1	-6.4373E-4	-8.8E1	4.76837E-5	5.07832E-3	9.31978E-2	2.73092E1	-3.2685E1	-3.26384E1	2.67931E1	1.6565E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80022E1	-4.05312E-4	-8.80002E1	0.0E0	5.48363E-3	9.31025E-2	2.73128E1	-3.26644E1	-3.26366E1	2.6777E1	1.65719E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.00735E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80021E1	-5.00679E-4	-8.80002E1	9.53674E-5	5.48363E-3	9.31263E-2	2.73177E1	-3.26554E1	-3.26188E1	2.68065E1	1.6565E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80021E1	-6.4373E-4	-8.8E1	1.43051E-4	5.72205E-3	9.32217E-2	2.73045E1	-3.26673E1	-3.26596E1	2.67884E1	1.6565E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99977E-1
1.2E1	2.99E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80025E1	-8.10623E-4	-8.80002E1	9.53674E-5	5.60284E-3	9.3317E-2	2.73404E1	-3.26532E1	-3.26138E1	2.67984E1	1.65722E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.97731E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80025E1	-6.91414E-4	-8.80003E1	4.76837E-5	5.53131E-3	9.35316E-2	2.72879E1	-3.27183E1	-3.26877E1	2.67848E1	1.65789E-7	2.51603E-3	2.51603E-3	6.33388E-3	1.98063E-1
1.4E1	6.83E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80024E1	-5.48363E-4	-8.80002E1	-1.19209E-4	5.55515E-3	9.35078E-2	2.72913E1	-3.26651E1	-3.26597E1	2.67994E1	1.65802E-7	2.51642E-3	2.51642E-3	6.29581E-3	1.991E-1
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80023E1	-7.15256E-4	-8.80002E1	4.76837E-5	5.6982E-3	9.32455E-2	2.73099E1	-3.26597E1	-3.2644E1	2.67996E1	1.6565E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.01022E-1
1.6E1	3.082E3	1.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80025E1	-4.76837E-4	-8.80001E1	7.15256E-5	5.48363E-3	9.32217E-2	2.73315E1	-3.26705E1	-3.26128E1	2.68196E1	1.65866E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99977E-1
1.7E1	3.952E4	2.4E1	6.87E2	4.7E2	-7.36328E-2	-8.80023E1	-6.19888E-4	-8.79999E1	-1.43051E-4	5.57899E-3	9.32932E-2	2.73093E1	-3.2632E1	-3.26543E1	2.6813E1	1.65722E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99803E-1
1.8E1	1.7323E5	9.3E1	7.27E2	5.0E2	-7.39421E-2	-8.80023E1	-6.67572E-4	-8.8E1	1.66893E-4	5.93662E-3	9.35078E-2	2.73093E1	-3.27047E1	-3.26428E1	2.67885E1	1.65722E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.00499E-1
1.9E1	3.908E3	2.0E0	7.68E2	5.29E2	-7.45602E-2	-8.80021E1	-7.86781E-4	-8.80001E1	3.09944E-4	6.03199E-3	9.34601E-2	2.73273E1	-3.26639E1	-3.26296E1	2.67788E1	1.6565E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00192E-1
2.0E1	3.51E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80018E1	-8.10623E-4	-8.8E1	2.38419E-4	5.60284E-3	9.31263E-2	2.72974E1	-3.26549E1	-3.26549E1	2.67944E1	1.6565E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
2.1E1	0.0E0	2.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80019E1	-7.62939E-4	-8.79999E1	1.43051E-4	5.67436E-3	9.35316E-2	2.72594E1	-3.26807E1	-3.26266E1	2.67818E1	1.6565E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00534E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80022E1	-5.48363E-4	-8.79999E1	-2.38419E-5	5.65052E-3	9.34839E-2	2.7301E1	-3.26921E1	-3.26614E1	2.67729E1	1.6565E-7	2.5188E-3	2.5188E-3	6.28006E-3	1.99977E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.8002E1	-7.62939E-4	-8.8E1	-2.38419E-5	6.05583E-3	9.35316E-2	2.73502E1	-3.27011E1	-3.26116E1	2.68076E1	1.65791E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.00363E-1