[Scan]
initial_time=2016-02-17T20:03:38
final_time=2016-02-17T20:03:58
ip_count=19
run=1032
dataset=6
scan=173
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.80665E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.36835E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.3155E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.58688E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.55154E-8
mult1=-8.60857E-9
mult2=-2.67669E-9
rf_tmon=-5.22741E-3
rf_agc=3.37782E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=5.73528E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=3.17327E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21553E1
lens5a_imon=2.01447E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1241E2
lens4a_imon=2.043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.04361E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04525E2
lens23_imon=1.02401E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06421E1
cs_ea1_imon=2.27037E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99408E0
lens1_imon=6.81529E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02475E1
cs_ea2_imon=1.53134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.99964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.71098E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.25202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16184E1
os_ea1_imon=2.28488E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.37008E0
cs_ionrep_imon=1.25881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91765E2
cs_nozzle_imon=1.92698E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02091E1
cs_anode1_imon=3.25228E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=4.22654E-8
tplens_vset=1.4E-1
tplens_vmon=1.52345E0
tplens_imon=1.68315E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.54125E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.52462E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02816E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=8.87108E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.37244E0
ionrepsh_imon=2.09907E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34023E1
lens5b_imon=2.15039E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.67152E0
os_ea2_imon=-1.03508E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06198E2
lens4b_imon=2.01384E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.7551E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.51429E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23189E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.00999E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09815E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=9.76193E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-2.01764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92581E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50167E3
multb_neg_imon=8.09659E-5
defgridb_vset=0.0E0
defgridb_vmon=-8.03168E-1
defgridb_imon=5.19781E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.57563E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64503E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=1.00479E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62174E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66839E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78376E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.79211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22568E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=2.00108E-1
chamber_ion_pmon=1.65723E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7582E-1
res40_imon=-2.81412E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3312E4	1.3E1	1.47E2	4.1E1	-7.3401E-2	-8.80017E1	-5.96046E-4	-8.80001E1	-1.43051E-4	5.74589E-3	9.32455E-2	2.74175E1	-3.27564E1	-3.25872E1	2.68036E1	1.6565E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.00705E-1
2.0E0	5.675E3	3.0E0	3.16E2	1.6E2	-7.30918E-2	-8.8002E1	-5.72205E-4	-8.80002E1	-2.14577E-4	5.74589E-3	9.3317E-2	2.72837E1	-3.26707E1	-3.26652E1	2.6783E1	1.65789E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.00231E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80015E1	-8.10623E-4	-8.80003E1	-1.90735E-4	5.76973E-3	9.31263E-2	2.72957E1	-3.26785E1	-3.26266E1	2.68064E1	1.6565E-7	2.51248E-3	2.51248E-3	6.31858E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80019E1	-6.67572E-4	-8.80002E1	7.15256E-5	5.57899E-3	9.34839E-2	2.72968E1	-3.26868E1	-3.25947E1	2.67908E1	1.65791E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80022E1	-1.09673E-3	-8.80002E1	-4.76837E-5	5.36442E-3	9.33647E-2	2.73057E1	-3.2662E1	-3.26437E1	2.68004E1	1.6565E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.98322E-1
6.0E0	3.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80022E1	-6.91414E-4	-8.80003E1	-7.15256E-5	5.53131E-3	9.3317E-2	2.73508E1	-3.26597E1	-3.26543E1	2.6807E1	1.6565E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.01047E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80017E1	-5.00679E-4	-8.80004E1	-1.19209E-4	5.14984E-3	9.3174E-2	2.72815E1	-3.26832E1	-3.26331E1	2.67962E1	1.6565E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80022E1	-6.19888E-4	-8.80002E1	9.53674E-5	5.07832E-3	9.31501E-2	2.7269E1	-3.26603E1	-3.262E1	2.67944E1	1.65721E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.01047E-1
1.2E1	2.99E2	1.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80023E1	-7.15256E-4	-8.80003E1	7.15256E-5	5.10216E-3	9.3317E-2	2.72921E1	-3.26762E1	-3.26207E1	2.67873E1	1.6565E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98764E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80026E1	-7.86781E-4	-8.80001E1	2.38419E-5	5.34058E-3	9.33886E-2	2.73345E1	-3.26488E1	-3.26056E1	2.68004E1	1.65721E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
1.4E1	6.98E2	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.8002E1	-7.62939E-4	-8.79997E1	2.38419E-5	5.36442E-3	9.31978E-2	2.73588E1	-3.26714E1	-3.26644E1	2.68209E1	1.6565E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80019E1	-5.48363E-4	-8.79997E1	-9.53674E-5	5.31673E-3	9.32932E-2	2.72835E1	-3.26867E1	-3.26585E1	2.68076E1	1.65721E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00192E-1
1.6E1	3.224E3	3.0E0	6.47E2	4.41E2	-7.36328E-2	-8.8002E1	-7.39098E-4	-8.79997E1	-9.53674E-5	5.60284E-3	9.32217E-2	2.72738E1	-3.26366E1	-3.26638E1	2.67806E1	1.6565E-7	2.50898E-3	2.50898E-3	6.33486E-3	1.99977E-1
1.7E1	3.9583E4	2.2E1	6.87E2	4.7E2	-7.37874E-2	-8.80019E1	-9.29832E-4	-8.8E1	4.76837E-5	5.45979E-3	9.3317E-2	2.73321E1	-3.26434E1	-3.26164E1	2.67662E1	1.65721E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9985E-1
1.8E1	1.73529E5	1.11E2	7.27E2	5.0E2	-7.40192E-2	-8.8002E1	-1.00136E-3	-8.80001E1	2.86102E-4	5.43594E-3	9.35555E-2	2.73183E1	-3.26729E1	-3.26398E1	2.67926E1	1.65722E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98592E-1
1.9E1	3.829E3	1.0E0	7.68E2	5.29E2	-7.40192E-2	-8.8002E1	-7.15256E-4	-8.79997E1	1.19209E-4	5.74589E-3	9.32217E-2	2.72859E1	-3.26621E1	-3.26326E1	2.6798E1	1.6565E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.97903E-1
2.0E1	3.19E2	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80025E1	-8.82149E-4	-8.80001E1	1.66893E-4	5.48363E-3	9.3317E-2	2.73255E1	-3.26789E1	-3.26458E1	2.6819E1	1.6565E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80025E1	-7.86781E-4	-8.80003E1	3.09944E-4	5.91278E-3	9.34124E-2	2.73114E1	-3.26681E1	-3.26146E1	2.67847E1	1.6565E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98592E-1
2.2E1	3.9E1	1.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80028E1	-4.52995E-4	-8.80001E1	0.0E0	5.72205E-3	9.35078E-2	2.73149E1	-3.26634E1	-3.26536E1	2.6797E1	1.6565E-7	2.51679E-3	2.51679E-3	6.33341E-3	1.98792E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80023E1	-4.76837E-4	-8.79999E1	-1.66893E-4	5.72205E-3	9.31263E-2	2.73117E1	-3.26554E1	-3.26494E1	2.68076E1	1.65723E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.00108E-1