[Scan]
initial_time=2016-02-17T20:04:05
final_time=2016-02-17T20:04:24
ip_count=19
run=1032
dataset=6
scan=174
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.82619E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.94378E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.32399E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.52199E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.55056E-8
mult1=-9.29839E-9
mult2=-2.6919E-9
rf_tmon=-5.35303E-3
rf_agc=3.26012E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.59211E-10
bslens_vset=-6.2E0
bslens_vmon=-6.55679E0
bslens_imon=2.41647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20402E1
lens5a_imon=2.02633E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12562E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.04721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.01836E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05104E1
cs_ea1_imon=2.23629E-5
lens1_vset=-2.7E0
lens1_vmon=-3.1026E0
lens1_imon=1.62737E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03348E1
cs_ea2_imon=1.51637E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.70922E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14836E1
os_ea1_imon=2.2064E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30482E0
cs_ionrep_imon=1.27651E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.92975E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.25011E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.22402E-8
tplens_vset=1.4E-1
tplens_vmon=1.53425E0
tplens_imon=-5.5916E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26437E1
iondef3_imon=1.55218E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02875E2
lens6_imon=2.98075E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.52084E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26311E0
ionrepsh_imon=2.02842E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34382E1
lens5b_imon=2.23734E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.78106E0
os_ea2_imon=-9.38066E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00682E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10501E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.89325E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.52762E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23118E2
cs_ionfoca_imon=6.34691E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72868E1
iondef1_imon=1.06412E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09524E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.77517E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.95719E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=6.80692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=6.99811E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.3944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58921E0
defgridb_imon=5.79187E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.58085E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=1.00488E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66975E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76002E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22575E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.09457E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3431E4	1.5E1	1.47E2	4.1E1	-7.39421E-2	-8.80021E1	-5.72205E-4	-8.80002E1	0.0E0	5.17368E-3	9.3174E-2	2.7263E1	-3.25749E1	-3.26663E1	2.67972E1	1.6565E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.00192E-1
2.0E0	5.715E3	3.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80022E1	-8.10623E-4	-8.80001E1	1.19209E-4	5.19753E-3	9.32693E-2	2.72702E1	-3.26609E1	-3.26512E1	2.6792E1	1.6565E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80022E1	-7.86781E-4	-8.8E1	-1.43051E-4	5.43594E-3	9.32217E-2	2.72799E1	-3.26795E1	-3.26356E1	2.6796E1	1.6565E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80024E1	-3.57628E-4	-8.8E1	-2.14577E-4	5.45979E-3	9.34601E-2	2.73293E1	-3.26891E1	-3.26248E1	2.67872E1	1.6565E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80021E1	-1.66893E-4	-8.79998E1	-1.43051E-4	5.126E-3	9.32693E-2	2.73057E1	-3.26655E1	-3.26402E1	2.68124E1	1.65721E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80021E1	-3.33786E-4	-8.80002E1	-3.57628E-4	5.57899E-3	9.33647E-2	2.73189E1	-3.26627E1	-3.25918E1	2.6804E1	1.65721E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00705E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80018E1	-5.24521E-4	-8.80002E1	-2.38419E-5	5.60284E-3	9.35078E-2	2.72861E1	-3.2667E1	-3.26658E1	2.68148E1	1.6565E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.8002E1	-5.24521E-4	-8.80002E1	-1.43051E-4	5.57899E-3	9.3317E-2	2.72546E1	-3.26549E1	-3.25743E1	2.67818E1	1.6565E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98764E-1
1.2E1	3.05E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80023E1	-2.14577E-4	-8.80004E1	-3.8147E-4	5.74589E-3	9.35793E-2	2.73104E1	-3.26449E1	-3.26555E1	2.6818E1	1.6565E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.9911E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80021E1	-5.48363E-4	-8.80003E1	2.38419E-5	5.72205E-3	9.36031E-2	2.73322E1	-3.26632E1	-3.25989E1	2.681E1	1.6565E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.4E1	7.24E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.8002E1	-6.91414E-4	-8.8E1	2.38419E-5	5.79357E-3	9.31263E-2	2.73135E1	-3.26891E1	-3.26374E1	2.68082E1	1.65721E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.00021E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80022E1	-8.34465E-4	-8.79999E1	4.76837E-5	5.57899E-3	9.31978E-2	2.73285E1	-3.26609E1	-3.26627E1	2.6798E1	1.6565E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00673E-1
1.6E1	3.195E3	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80022E1	-7.39098E-4	-8.79999E1	-7.15256E-5	5.53131E-3	9.30071E-2	2.73159E1	-3.26482E1	-3.25888E1	2.67968E1	1.6565E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9963E-1
1.7E1	3.9453E4	1.5E1	6.87E2	4.7E2	-7.32464E-2	-8.80022E1	-8.34465E-4	-8.79999E1	1.19209E-4	5.72205E-3	9.30786E-2	2.73033E1	-3.26717E1	-3.26098E1	2.68004E1	1.6565E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9963E-1
1.8E1	1.72645E5	1.15E2	7.27E2	5.0E2	-7.38649E-2	-8.80021E1	-8.58307E-4	-8.80001E1	1.43051E-4	5.57899E-3	9.30786E-2	2.73147E1	-3.26416E1	-3.26314E1	2.68004E1	1.65794E-7	2.52647E-3	2.52647E-3	6.29098E-3	1.98592E-1
1.9E1	3.841E3	1.0E0	7.68E2	5.29E2	-7.42513E-2	-8.8002E1	-9.05991E-4	-8.80002E1	1.66893E-4	5.62668E-3	9.31978E-2	2.73045E1	-3.26567E1	-3.2626E1	2.6796E1	1.65721E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9934E-1
2.0E1	3.49E2	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.80023E1	-9.05991E-4	-8.80001E1	-9.53674E-5	5.81741E-3	9.32217E-2	2.72817E1	-3.26693E1	-3.2617E1	2.68034E1	1.6565E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80022E1	-6.67572E-4	-8.80001E1	1.66893E-4	5.24521E-3	9.33409E-2	2.73329E1	-3.2633E1	-3.26243E1	2.67944E1	1.6565E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80021E1	-1.07288E-3	-8.80001E1	-2.14577E-4	6.00815E-3	9.32693E-2	2.73279E1	-3.26488E1	-3.25966E1	2.67943E1	1.6565E-7	2.51498E-3	2.51498E-3	6.33388E-3	2.00231E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80024E1	-6.67572E-4	-8.8E1	4.76837E-5	5.67436E-3	9.36508E-2	2.72868E1	-3.26573E1	-3.26437E1	2.68094E1	1.6565E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00363E-1