[Scan]
initial_time=2016-02-17T20:05:25
final_time=2016-02-17T20:05:44
ip_count=19
run=1032
dataset=6
scan=177
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.88175E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.3457E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.32333E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.48158E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.55237E-8
mult1=-9.07378E-9
mult2=-2.63311E-9
rf_tmon=-5.29994E-3
rf_agc=3.2908E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.60403E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.04036E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.17092E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02062E0
lens1_imon=1.33986E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.56497E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.0E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.71092E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.20914E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2751E0
cs_ionrep_imon=1.23757E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.25876E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=4.22672E-8
tplens_vset=1.4E-1
tplens_vmon=1.58362E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26189E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26331E1
iondef2_imon=1.61487E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.9865E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.48341E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=2.00563E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81191E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61094E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.52221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.06899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09572E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83071E-1
olens1_imon=9.76828E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.68689E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.17634E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.56757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50166E3
multb_neg_imon=6.64189E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.56968E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=1.0053E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63093E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66918E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72407E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61924E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.01628E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22709E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31972E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3362E4	1.6E1	1.47E2	4.1E1	-7.38649E-2	-8.80025E1	-6.19888E-4	-8.80005E1	-2.38419E-4	5.57899E-3	9.35316E-2	2.7346E1	-3.26753E1	-3.26314E1	2.68041E1	1.6565E-7	2.51007E-3	2.51007E-3	6.29098E-3	1.98764E-1
2.0E0	5.79E3	3.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80023E1	-5.48363E-4	-8.80006E1	2.6226E-4	5.57899E-3	9.36985E-2	2.73195E1	-3.27029E1	-3.26536E1	2.6777E1	1.6565E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80024E1	-3.8147E-4	-8.79999E1	1.66893E-4	5.72205E-3	9.35555E-2	2.72874E1	-3.26703E1	-3.26124E1	2.67839E1	1.6565E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80022E1	-3.57628E-4	-8.80001E1	1.43051E-4	5.72205E-3	9.37939E-2	2.73175E1	-3.2685E1	-3.26378E1	2.68065E1	1.6565E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80024E1	-3.8147E-4	-8.80004E1	-9.53674E-5	5.67436E-3	9.34362E-2	2.73181E1	-3.26779E1	-3.26608E1	2.68082E1	1.65858E-7	2.51287E-3	2.51287E-3	6.32328E-3	1.99729E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80023E1	-1.90735E-4	-8.80003E1	-2.14577E-4	5.96046E-3	9.38416E-2	2.72903E1	-3.26773E1	-3.26349E1	2.68157E1	1.6565E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80023E1	-2.14577E-4	-8.80002E1	-4.76837E-5	5.34058E-3	9.34124E-2	2.73346E1	-3.26366E1	-3.26012E1	2.67938E1	1.65722E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80022E1	-1.19209E-4	-8.80002E1	0.0E0	5.6982E-3	9.35078E-2	2.7292E1	-3.2663E1	-3.26385E1	2.67833E1	1.65789E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.00399E-1
1.2E1	3.31E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80022E1	-1.66893E-4	-8.80002E1	-1.43051E-4	5.53131E-3	9.34124E-2	2.73237E1	-3.26338E1	-3.26194E1	2.68169E1	1.65789E-7	2.51287E-3	2.51287E-3	6.33388E-3	2.00231E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80024E1	-7.15256E-5	-8.80003E1	-1.90735E-4	5.79357E-3	9.34362E-2	2.73134E1	-3.26455E1	-3.26042E1	2.67758E1	1.6565E-7	2.51863E-3	2.51863E-3	6.32371E-3	2.0043E-1
1.4E1	7.06E2	2.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80023E1	-4.76837E-4	-8.80006E1	2.38419E-4	5.72205E-3	9.35316E-2	2.72833E1	-3.26944E1	-3.26272E1	2.68117E1					
1.5E1	1.18E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80024E1	-5.24521E-4	-8.80001E1	9.53674E-5	5.67436E-3	9.31501E-2	2.72756E1	-3.2655E1	-3.26689E1	2.67746E1	1.65719E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.01072E-1
1.6E1	3.122E3	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80023E1	-8.34465E-4	-8.80003E1	1.90735E-4	5.65052E-3	9.32455E-2	2.73231E1	-3.26693E1	-3.2632E1	2.67711E1	1.65721E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.9951E-1
1.7E1	3.9586E4	1.5E1	6.87E2	4.7E2	-7.25507E-2	-8.80022E1	-8.58307E-4	-8.80001E1	3.09944E-4	5.48363E-3	9.31501E-2	2.72831E1	-3.26996E1	-3.26376E1	2.67884E1	1.6565E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9883E-1
1.8E1	1.73891E5	8.6E1	7.27E2	5.0E2	-7.201E-2	-8.80021E1	-8.34465E-4	-8.8E1	5.48363E-4	5.84126E-3	9.30309E-2	2.73237E1	-3.26573E1	-3.26122E1	2.68041E1	1.65791E-7	2.5131E-3	2.5131E-3	6.29128E-3	1.9934E-1
1.9E1	3.854E3	4.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80024E1	-8.10623E-4	-8.8E1	9.53674E-5	5.62668E-3	9.36985E-2	2.73246E1	-3.26655E1	-3.26419E1	2.6795E1	1.6565E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99283E-1
2.0E1	3.2E2	1.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80022E1	-1.00136E-3	-8.80003E1	-2.38419E-5	5.76973E-3	9.32932E-2	2.7262E1	-3.26909E1	-3.26366E1	2.68146E1	1.6565E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9968E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80023E1	-5.72205E-4	-8.8E1	-5.24521E-4	5.53131E-3	9.32217E-2	2.72848E1	-3.26417E1	-3.26961E1	2.67806E1	1.6565E-7	2.51709E-3	2.51709E-3	6.32858E-3	1.99896E-1
2.2E1	3.2E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80022E1	-5.96046E-4	-8.80004E1	-2.86102E-4	5.10216E-3	9.32932E-2	2.72998E1	-3.26791E1	-3.26142E1	2.68331E1	1.65791E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00192E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80023E1	-6.4373E-4	-8.79998E1	-1.43051E-4	5.31673E-3	9.31978E-2	2.73033E1	-3.26331E1	-3.26189E1	2.6801E1	1.6565E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00705E-1