[Scan]
initial_time=2016-02-17T20:05:52
final_time=2016-02-17T20:06:11
ip_count=19
run=1032
dataset=6
scan=178
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.85327E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.38325E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.27171E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.51747E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.55596E-8
mult1=-1.05712E-8
mult2=-2.73857E-9
rf_tmon=-4.37423E-3
rf_agc=3.35018E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=5.60439E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62492E0
bslens_imon=2.6636E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.99147E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.03222E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.01965E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.20348E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02062E0
lens1_imon=1.4602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.99225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.56037E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.98947E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.70891E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.18684E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.07114E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.27474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=3.25533E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=4.22697E-8
tplens_vset=1.4E-1
tplens_vmon=1.61371E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.61594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.42559E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=2.00987E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34141E1
lens5b_imon=2.21197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74884E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86383E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70702E1
cs_ef2a_imon=3.16949E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11538E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.95117E-1
os_ef2bup_imon=-5.4938E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10533E1
os_restr2_imon=3.53752E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0163E1
cs_anode2_imon=2.27044E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10035E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=9.7605E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-2.00117E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56643E1
einzel_imon=7.8755E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-1.20186E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86454E1
mask2_imon=-8.09154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.6065E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.08432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.69789E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.5847E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07028E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64331E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=1.00419E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67342E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95967E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.53938E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=1.99896E-1
chamber_ion_pmon=1.65719E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23498E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3278E4	2.1E1	1.47E2	4.1E1	-7.37874E-2	-8.80022E1	-4.76837E-4	-8.8E1	-1.43051E-4	5.88894E-3	9.33886E-2	2.73257E1	-3.26596E1	-3.26301E1	2.68076E1	1.65721E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9934E-1
2.0E0	5.98E3	5.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80019E1	-4.05312E-4	-8.79998E1	-1.43051E-4	5.38826E-3	9.32455E-2	2.72874E1	-3.26903E1	-3.26655E1	2.68182E1	1.65756E-7	2.51471E-3	2.51471E-3	6.31817E-3	1.99425E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80021E1	-3.8147E-4	-8.80004E1	9.53674E-5	5.53131E-3	9.33886E-2	2.72895E1	-3.26782E1	-3.26567E1	2.68082E1					
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80021E1	-4.76837E-4	-8.80002E1	2.38419E-5	5.55515E-3	9.37939E-2	2.72781E1	-3.26446E1	-3.26561E1	2.67854E1	1.65786E-7	2.51058E-3	2.51058E-3	6.34385E-3	1.98465E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80027E1	-4.52995E-4	-8.79999E1	-3.09944E-4	5.60284E-3	9.36747E-2	2.72837E1	-3.26793E1	-3.2644E1	2.67966E1	1.6565E-7	2.50789E-3	2.50789E-3	6.31288E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80022E1	-5.72205E-4	-8.80001E1	-2.14577E-4	5.72205E-3	9.34124E-2	2.72997E1	-3.2653E1	-3.26236E1	2.67878E1	1.65721E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.01219E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80023E1	-2.86102E-4	-8.80002E1	1.90735E-4	5.34058E-3	9.35078E-2	2.73111E1	-3.26579E1	-3.26356E1	2.68004E1	1.6565E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9934E-1
8.0E0	3.0E0	0.0E0	1.332E3	8.73E2	-7.46377E-2	-8.80024E1	-4.05312E-4	-8.80001E1	-1.19209E-4	5.22137E-3	9.34839E-2	2.72763E1	-3.26915E1	-3.26212E1	2.6828E1	1.65723E-7	2.51359E-3	2.51359E-3	6.32978E-3	1.99048E-1
1.2E1	3.22E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80022E1	-6.91414E-4	-8.80003E1	-3.09944E-4	5.50747E-3	9.34124E-2	2.72903E1	-3.26944E1	-3.26172E1	2.68041E1	1.65794E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80024E1	-5.24521E-4	-8.80004E1	0.0E0	5.62668E-3	9.35078E-2	2.73387E1	-3.26797E1	-3.26296E1	2.68058E1	1.6565E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00705E-1
1.4E1	7.46E2	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8002E1	-4.05312E-4	-8.80003E1	1.43051E-4	6.03199E-3	9.377E-2	2.73281E1	-3.26614E1	-3.26478E1	2.68112E1	1.6565E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.00021E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80022E1	7.15256E-5	-8.80002E1	1.90735E-4	5.72205E-3	9.3317E-2	2.73345E1	-3.26663E1	-3.26585E1	2.67833E1	1.65721E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.99E-1
1.6E1	3.099E3	0.0E0	6.47E2	4.41E2	-7.44059E-2	-8.80021E1	-5.24521E-4	-8.79997E1	1.19209E-4	6.27041E-3	9.35316E-2	2.73252E1	-3.26726E1	-3.26054E1	2.67932E1	1.6565E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9985E-1
1.7E1	3.9434E4	2.4E1	6.87E2	4.7E2	-7.36328E-2	-8.8002E1	-4.29153E-4	-8.80002E1	1.90735E-4	5.93662E-3	9.35555E-2	2.73103E1	-3.27036E1	-3.26034E1	2.67827E1	1.65721E-7	2.51686E-3	2.51686E-3	6.31278E-3	1.9917E-1
1.8E1	1.73508E5	8.9E1	7.27E2	5.0E2	-7.34782E-2	-8.80024E1	-3.33786E-4	-8.79999E1	4.76837E-5	5.91278E-3	9.36985E-2	2.73237E1	-3.26446E1	-3.26344E1	2.67938E1					
1.9E1	3.918E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80021E1	-3.09944E-4	-8.8E1	-9.53674E-5	5.57899E-3	9.34124E-2	2.73275E1	-3.26809E1	-3.26331E1	2.67677E1	1.65721E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00192E-1
2.0E1	3.71E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80023E1	-4.05312E-4	-8.80003E1	-4.76837E-5	5.74589E-3	9.37223E-2	2.73613E1	-3.26834E1	-3.26573E1	2.67839E1	1.65721E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00021E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80022E1	-6.91414E-4	-8.8E1	-4.52995E-4	5.62668E-3	9.34601E-2	2.73131E1	-3.26756E1	-3.26223E1	2.67764E1	1.65721E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9934E-1
2.2E1	3.4E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80021E1	-4.05312E-4	-8.80003E1	-7.15256E-5	5.88894E-3	9.31978E-2	2.72993E1	-3.27262E1	-3.2626E1	2.6792E1	1.65723E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.98872E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80022E1	-5.48363E-4	-8.80002E1	7.15256E-5	5.76973E-3	9.33409E-2	2.73015E1	-3.26669E1	-3.26296E1	2.6807E1	1.65719E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.99896E-1