[Scan]
initial_time=2016-02-17T20:06:45
final_time=2016-02-17T20:07:04
ip_count=19
run=1032
dataset=6
scan=180
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.78178E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.54323E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.32778E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.56457E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.55609E-8
mult1=-9.95712E-9
mult2=-2.76452E-9
rf_tmon=-5.38362E-3
rf_agc=3.31233E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=5.68056E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.98596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=3.04217E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.17341E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04196E0
lens1_imon=1.53197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.5786E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.99892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.70864E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=2.2109E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=1.26316E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02175E1
cs_anode1_imon=3.24002E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=4.228E-8
tplens_vset=1.4E-1
tplens_vmon=1.61199E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.48198E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=8.02088E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27613E0
ionrepsh_imon=1.99893E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8367E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11823E0
os_ef2alow_imon=-2.71321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55688E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.53591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.10995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09652E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=9.7703E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-2.05008E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=1.80102E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.54864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53089E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.57911E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07611E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6449E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=1.00554E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62456E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6685E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73837E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22567E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.00064E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.50867E-3
foreline_cvt_pmon=2.50867E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.96533E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3247E4	1.4E1	1.47E2	4.1E1	-7.22418E-2	-8.80024E1	-7.39098E-4	-8.80002E1	-4.76837E-5	5.72205E-3	9.32217E-2	2.7286E1	-3.26978E1	-3.26214E1	2.68105E1	1.6565E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9911E-1
2.0E0	5.855E3	3.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80025E1	-7.15256E-4	-8.80004E1	-2.38419E-5	5.67436E-3	9.3627E-2	2.73201E1	-3.26338E1	-3.2632E1	2.67986E1	1.6565E-7	2.51287E-3	2.51287E-3	6.32858E-3	1.98727E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80023E1	-6.67572E-4	-8.80001E1	-1.43051E-4	5.38826E-3	9.32217E-2	2.73111E1	-3.26813E1	-3.26326E1	2.67812E1	1.6565E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.97045E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80024E1	-5.96046E-4	-8.80003E1	7.15256E-5	5.43594E-3	9.33886E-2	2.7334E1	-3.26425E1	-3.2662E1	2.6819E1	1.65722E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.98764E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80024E1	-7.15256E-4	-8.80002E1	-2.6226E-4	5.93662E-3	9.33409E-2	2.73123E1	-3.26488E1	-3.26585E1	2.68034E1	1.65791E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80023E1	-5.24521E-4	-8.80001E1	2.38419E-5	5.81741E-3	9.28879E-2	2.73075E1	-3.27039E1	-3.25865E1	2.67937E1	1.65722E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80026E1	-7.39098E-4	-8.80001E1	-9.53674E-5	5.57899E-3	9.29594E-2	2.73267E1	-3.26398E1	-3.26849E1	2.68028E1	1.65722E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80024E1	-5.72205E-4	-8.80004E1	2.86102E-4	5.48363E-3	9.31025E-2	2.7329E1	-3.26725E1	-3.26217E1	2.68088E1	1.6565E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00151E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80023E1	-7.86781E-4	-8.80002E1	3.09944E-4	5.6982E-3	9.29117E-2	2.72744E1	-3.26744E1	-3.26461E1	2.6801E1	1.65866E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9963E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80023E1	-6.19888E-4	-8.79999E1	2.14577E-4	5.79357E-3	9.32455E-2	2.73652E1	-3.26524E1	-3.2638E1	2.67902E1	1.65866E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98075E-1
1.4E1	6.82E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80022E1	-6.91414E-4	-8.79999E1	1.19209E-4	5.53131E-3	9.30309E-2	2.73297E1	-3.26633E1	-3.26104E1	2.68018E1	1.65722E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98419E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80023E1	-8.10623E-4	-8.8E1	9.53674E-5	5.36442E-3	9.31025E-2	2.72907E1	-3.26615E1	-3.26188E1	2.68082E1	1.6565E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.98153E-1
1.6E1	3.219E3	2.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80023E1	-8.82149E-4	-8.80002E1	-2.14577E-4	5.84126E-3	9.30786E-2	2.73216E1	-3.26761E1	-3.26493E1	2.68175E1	1.6565E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.00325E-1
1.7E1	3.947E4	1.6E1	6.87E2	4.7E2	-7.24736E-2	-8.80021E1	-9.29832E-4	-8.8E1	4.76837E-5	5.31673E-3	9.32932E-2	2.72829E1	-3.26699E1	-3.26038E1	2.67896E1	1.6565E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.00064E-1
1.8E1	1.722E5	9.0E1	7.27E2	5.0E2	-7.22418E-2	-8.80022E1	-5.48363E-4	-8.79998E1	-4.76837E-5	5.72205E-3	9.33886E-2	2.72651E1	-3.26451E1	-3.26515E1	2.67821E1	1.6565E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.01047E-1
1.9E1	3.76E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.8002E1	-4.29153E-4	-8.79998E1	-1.90735E-4	5.65052E-3	9.31263E-2	2.73177E1	-3.26807E1	-3.2608E1	2.6792E1	1.65721E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
2.0E1	3.59E2	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80021E1	-7.86781E-4	-8.79997E1	-1.43051E-4	5.88894E-3	9.30548E-2	2.73033E1	-3.26396E1	-3.26579E1	2.6803E1	1.65721E-7	2.52169E-3	2.52169E-3	6.34518E-3	1.9917E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80023E1	-8.58307E-4	-8.79998E1	4.76837E-5	5.76973E-3	9.32455E-2	2.73316E1	-3.26579E1	-3.2639E1	2.68052E1	1.65791E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9934E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80022E1	-3.09944E-4	-8.8E1	0.0E0	5.84126E-3	9.32217E-2	2.72877E1	-3.26666E1	-3.26353E1	2.67943E1	1.6565E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.00192E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80019E1	-5.96046E-4	-8.80001E1	1.66893E-4	5.91278E-3	9.30548E-2	2.73009E1	-3.26609E1	-3.26386E1	2.681E1	1.6565E-7	2.50867E-3	2.50867E-3	6.31798E-3	2.00064E-1