[Scan]
initial_time=2016-02-17T20:07:38
final_time=2016-02-17T20:07:58
ip_count=19
run=1032
dataset=6
scan=182
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.80559E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.38456E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.33808E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.52398E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=1.54988E-8
mult1=-9.39121E-9
mult2=-2.7226E-9
rf_tmon=-5.15531E-3
rf_agc=3.2883E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=5.94294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68296E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.03784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.2055E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04797E0
lens1_imon=1.57523E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.57932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.01478E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.71292E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15558E1
os_ea1_imon=2.19612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93117E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=3.25192E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=4.22517E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.59049E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.73113E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=2.01011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85112E0
os_ea2_imon=-3.57025E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00172E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11162E0
os_ef2alow_imon=-2.72762E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73107E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=3.5287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.27416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.08328E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10059E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.75162E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-2.01764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.1523E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86218E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.39002E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.60092E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6445E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=1.00774E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61747E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66982E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.63519E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.58401E-1
res40_imon=-2.80691E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3213E4	1.7E1	1.47E2	4.1E1	-7.25507E-2	-8.80019E1	-9.53674E-4	-8.8E1	2.38419E-5	5.4121E-3	9.30786E-2	2.73075E1	-3.26579E1	-3.26183E1	2.67812E1	1.65791E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9968E-1
2.0E0	5.801E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.8002E1	-7.39098E-4	-8.80004E1	-1.90735E-4	5.36442E-3	9.31501E-2	2.73075E1	-3.26344E1	-3.26723E1	2.67974E1	1.65721E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00192E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.10051E-2	-8.8002E1	-9.05991E-4	-8.80007E1	-2.38419E-4	5.57899E-3	9.30071E-2	2.72811E1	-3.27107E1	-3.26056E1	2.68196E1	1.6565E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99977E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.07733E-2	-8.8002E1	-6.19888E-4	-8.80004E1	-2.14577E-4	5.4121E-3	9.32455E-2	2.7344E1	-3.26437E1	-3.26508E1	2.68094E1	1.65794E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.00847E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.10051E-2	-8.8002E1	-3.8147E-4	-8.80004E1	-1.43051E-4	5.67436E-3	9.30786E-2	2.73149E1	-3.26417E1	-3.26399E1	2.6825E1	1.6565E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80019E1	-4.29153E-4	-8.80001E1	-2.38419E-4	5.79357E-3	9.30071E-2	2.73375E1	-3.26756E1	-3.26376E1	2.67988E1	1.65721E-7	2.51755E-3	2.51755E-3	6.3074E-3	1.98969E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80021E1	-8.34465E-4	-8.79999E1	-1.90735E-4	5.45979E-3	9.29832E-2	2.73069E1	-3.26476E1	-3.2632E1	2.6783E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80023E1	-9.29832E-4	-8.80003E1	-2.38419E-5	5.79357E-3	9.33647E-2	2.73141E1	-3.26759E1	-3.2638E1	2.6804E1	1.6587E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99224E-1
1.2E1	3.29E2	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80022E1	-7.62939E-4	-8.80003E1	-2.6226E-4	5.81741E-3	9.33886E-2	2.73141E1	-3.26326E1	-3.26639E1	2.68148E1	1.6565E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9911E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80021E1	-1.04904E-3	-8.80002E1	-2.38419E-4	5.88894E-3	9.34124E-2	2.73225E1	-3.26891E1	-3.26422E1	2.68112E1	1.65721E-7	2.51525E-3	2.51525E-3	6.34518E-3	2.00021E-1
1.4E1	6.7E2	1.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80019E1	-6.19888E-4	-8.80001E1	-1.66893E-4	5.72205E-3	9.3627E-2	2.73015E1	-3.26567E1	-3.25948E1	2.67938E1	1.65794E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80021E1	-6.91414E-4	-8.79998E1	-4.05312E-4	5.72205E-3	9.34601E-2	2.73225E1	-3.26452E1	-3.26903E1	2.67908E1	1.6565E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
1.6E1	3.188E3	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.8002E1	-1.00136E-3	-8.80001E1	-1.90735E-4	5.60284E-3	9.36985E-2	2.73021E1	-3.26338E1	-3.26573E1	2.67944E1	1.6565E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.7E1	3.9005E4	3.1E1	6.87E2	4.7E2	-7.18554E-2	-8.80019E1	-6.67572E-4	-8.80002E1	-1.43051E-4	5.43594E-3	9.36031E-2	2.72919E1	-3.26651E1	-3.26362E1	2.67926E1	1.6565E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.99803E-1
1.8E1	1.71349E5	1.09E2	7.27E2	5.0E2	-7.14689E-2	-8.80022E1	-8.34465E-4	-8.80001E1	-3.09944E-4	5.50747E-3	9.34601E-2	2.73192E1	-3.2667E1	-3.2634E1	2.68046E1	1.6565E-7	2.5147E-3	2.5147E-3	6.34661E-3	1.98344E-1
1.9E1	3.863E3	2.0E0	7.68E2	5.29E2	-7.26282E-2	-8.8002E1	-8.82149E-4	-8.80002E1	-3.57628E-4	5.29289E-3	9.35078E-2	2.7278E1	-3.26744E1	-3.26331E1	2.6807E1	1.6565E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9911E-1
2.0E1	3.39E2	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.8002E1	-8.34465E-4	-8.80001E1	-2.38419E-5	5.43594E-3	9.35078E-2	2.73303E1	-3.26711E1	-3.26224E1	2.68112E1	1.6565E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.8002E1	-5.48363E-4	-8.80001E1	-2.86102E-4	5.48363E-3	9.34601E-2	2.73151E1	-3.2672E1	-3.26236E1	2.67868E1	1.6565E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.00192E-1
2.2E1	2.7E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80021E1	-7.15256E-4	-8.79998E1	-5.72205E-4	5.29289E-3	9.3317E-2	2.73346E1	-3.26844E1	-3.26325E1	2.6837E1	1.65791E-7	2.51578E-3	2.51578E-3	6.32626E-3	2.00021E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80021E1	-4.76837E-4	-8.8E1	-2.6226E-4	6.03199E-3	9.35316E-2	2.73291E1	-3.26603E1	-3.26116E1	2.6801E1