[Scan]
initial_time=2016-02-17T20:08:31
final_time=2016-02-17T20:08:51
ip_count=19
run=1032
dataset=6
scan=184
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.71934E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-4.93586E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.32272E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.63161E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.5528E-8
mult1=-8.89755E-9
mult2=-2.68867E-9
rf_tmon=-5.30551E-3
rf_agc=3.26306E-2
counter1=9
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.77331E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61784E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.9582E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.03352E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=2.20631E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02711E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.55293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=1.71189E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.18437E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28454E0
cs_ionrep_imon=1.27474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=3.2584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.21991E-8
tplens_vset=1.4E-1
tplens_vmon=1.58716E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27089E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98579E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.44872E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=2.00563E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34047E1
lens5b_imon=2.19817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84613E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12424E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62896E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10667E1
os_restr2_imon=3.53735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.32477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67746E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09726E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=9.77212E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-2.10414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=1.61481E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.40829E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.88611E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57387E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.60146E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07948E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=1.00526E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61717E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66752E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70656E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.79811E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3095E4	2.1E1	1.47E2	4.1E1	-7.11597E-2	-8.80021E1	-1.00136E-3	-8.80002E1	4.29153E-4	5.14984E-3	9.31501E-2	2.73405E1	-3.26632E1	-3.26278E1	2.68012E1	1.6565E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.98661E-1
2.0E0	5.726E3	1.1E1	3.16E2	1.6E2	-7.19325E-2	-8.80022E1	-1.07288E-3	-8.80001E1	4.76837E-5	5.55515E-3	9.34362E-2	2.72782E1	-3.26774E1	-3.2607E1	2.68182E1	1.65721E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00192E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.8002E1	-3.57628E-4	-8.79997E1	4.76837E-5	5.62668E-3	9.34601E-2	2.7311E1	-3.27133E1	-3.26042E1	2.6822E1	1.65725E-7	2.51158E-3	2.51158E-3	6.3531E-3	2.00606E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80023E1	-5.96046E-4	-8.79995E1	-4.76837E-5	5.84126E-3	9.3317E-2	2.72949E1	-3.26771E1	-3.26302E1	2.67974E1	1.6565E-7	2.51593E-3	2.51593E-3	6.32099E-3	2.00775E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.8002E1	-5.00679E-4	-8.80001E1	-7.15256E-5	5.60284E-3	9.34362E-2	2.73003E1	-3.26801E1	-3.26206E1	2.68007E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.8002E1	-4.76837E-4	-8.79999E1	7.15256E-5	5.45979E-3	9.30786E-2	2.73116E1	-3.26685E1	-3.26254E1	2.6804E1	1.6565E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.00534E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80022E1	-7.62939E-4	-8.79998E1	7.15256E-5	5.57899E-3	9.32217E-2	2.72727E1	-3.2664E1	-3.26272E1	2.67962E1	1.6565E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80019E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.38826E-3	9.3174E-2	2.72997E1	-3.26717E1	-3.2653E1	2.68076E1	1.65722E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99283E-1
1.2E1	3.63E2	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80019E1	-8.82149E-4	-8.80001E1	-1.90735E-4	5.79357E-3	9.31025E-2	2.72913E1	-3.26609E1	-3.26104E1	2.68118E1	1.65722E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98937E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80021E1	-7.39098E-4	-8.80003E1	2.14577E-4	5.91278E-3	9.35316E-2	2.73231E1	-3.26687E1	-3.26062E1	2.68004E1	1.65722E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99977E-1
1.4E1	6.89E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80021E1	-3.8147E-4	-8.80002E1	9.53674E-5	5.43594E-3	9.34839E-2	2.73429E1	-3.2641E1	-3.26338E1	2.6813E1	1.65722E-7	2.50789E-3	2.50789E-3	6.32386E-3	1.98592E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80021E1	-2.86102E-4	-8.80003E1	-4.76837E-5	5.45979E-3	9.32455E-2	2.73103E1	-3.26532E1	-3.26463E1	2.67944E1	1.6565E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.99283E-1
1.6E1	3.105E3	1.0E0	6.47E2	4.41E2	-7.25507E-2	-8.8002E1	-3.57628E-4	-8.79999E1	-4.29153E-4	5.55515E-3	9.34124E-2	2.73111E1	-3.26807E1	-3.26176E1	2.6818E1	1.65789E-7	2.51603E-3	2.51603E-3	6.33919E-3	2.00064E-1
1.7E1	3.9484E4	2.7E1	6.87E2	4.7E2	-7.16233E-2	-8.80017E1	-9.53674E-4	-8.80001E1	-2.86102E-4	5.53131E-3	9.35316E-2	2.7334E1	-3.26496E1	-3.26343E1	2.6792E1	1.6565E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99977E-1
1.8E1	1.72978E5	9.7E1	7.27E2	5.0E2	-7.16233E-2	-8.80018E1	-8.10623E-4	-8.80001E1	0.0E0	5.60284E-3	9.36508E-2	2.73269E1	-3.2672E1	-3.26679E1	2.67845E1	1.6565E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00534E-1
1.9E1	3.718E3	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80023E1	-5.24521E-4	-8.80003E1	1.19209E-4	5.38826E-3	9.32217E-2	2.73277E1	-3.26886E1	-3.26347E1	2.68192E1	1.65791E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.00534E-1
2.0E1	3.57E2	1.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80019E1	-6.91414E-4	-8.80001E1	-3.33786E-4	5.4121E-3	9.36985E-2	2.73302E1	-3.27864E1	-3.26793E1	2.67783E1	1.6565E-7	2.51498E-3	2.51498E-3	6.27577E-3	2.00064E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.06958E-2	-8.80022E1	-6.4373E-4	-8.80001E1	-1.66893E-4	5.6982E-3	9.37462E-2	2.73109E1	-3.26724E1	-3.26306E1	2.68227E1	1.65723E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.98872E-1
2.2E1	3.3E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.8002E1	-7.62939E-4	-8.80003E1	-1.19209E-4	5.79357E-3	9.37223E-2	2.73234E1	-3.26467E1	-3.26201E1	2.68094E1	1.65719E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.99394E-1
2.3E1	9.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80019E1	-8.58307E-4	-8.80002E1	1.43051E-4	5.60284E-3	9.34601E-2	2.73159E1	-3.27089E1	-3.25912E1	2.67746E1	1.6565E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9963E-1