[Scan]
initial_time=2016-02-17T20:11:11
final_time=2016-02-17T20:11:31
ip_count=19
run=1032
dataset=6
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.69874E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.65183E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.30234E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.55357E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.5532E-8
mult1=-9.58437E-9
mult2=-2.6301E-9
rf_tmon=-6.03456E-3
rf_agc=3.10558E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=5.53465E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62949E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20253E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.04433E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.19468E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04196E0
lens1_imon=1.39859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04111E1
cs_ea2_imon=1.56634E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.00036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.71243E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.18567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=1.2729E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93132E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=3.26561E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=4.22317E-8
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26605E1
iondef2_imon=1.59338E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.82816E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=2.01011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8367E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10141E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.68302E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.53122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72644E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67976E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09866E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.79056E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.8875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.50681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.2833E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.57034E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=1.00567E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61993E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66884E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57071E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58961E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33131E-3
inlet_lpb_pmon=1.99233E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.5126E-3
foreline_cvt_pmon=2.5126E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59893E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3115E4	1.7E1	1.47E2	4.1E1	-7.20871E-2	-8.80018E1	-7.39098E-4	-8.8E1	-2.38419E-5	5.55515E-3	9.32217E-2	2.73269E1	-3.26956E1	-3.26467E1	2.68238E1	1.6565E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9883E-1
2.0E0	5.735E3	6.0E0	3.16E2	1.6E2	-7.201E-2	-8.80019E1	-5.24521E-4	-8.8E1	4.76837E-5	5.53131E-3	9.31978E-2	2.73198E1	-3.27001E1	-3.26676E1	2.681E1	1.65866E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.9911E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80019E1	-5.96046E-4	-8.80003E1	-4.76837E-5	5.4121E-3	9.3174E-2	2.73411E1	-3.26425E1	-3.26531E1	2.67793E1	1.6565E-7	2.51581E-3	2.51581E-3	6.33538E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80023E1	-4.29153E-4	-8.80001E1	-9.53674E-5	5.31673E-3	9.29117E-2	2.73269E1	-3.26573E1	-3.26301E1	2.68123E1	1.6565E-7	2.51919E-3	2.51919E-3	6.32858E-3	1.98395E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80025E1	-1.90735E-4	-8.8E1	4.76837E-5	5.53131E-3	9.30548E-2	2.73099E1	-3.265E1	-3.26254E1	2.67722E1	1.65721E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80023E1	-5.96046E-4	-8.80002E1	-1.43051E-4	5.38826E-3	9.3174E-2	2.73417E1	-3.2647E1	-3.26591E1	2.68172E1	1.6565E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80022E1	-3.09944E-4	-8.80001E1	9.53674E-5	5.34058E-3	9.35555E-2	2.72805E1	-3.26645E1	-3.26182E1	2.68118E1	1.6565E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80021E1	-3.09944E-4	-8.79999E1	-2.38419E-5	4.98295E-3	9.34601E-2	2.73222E1	-3.26478E1	-3.26337E1	2.67637E1	1.6565E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.00499E-1
1.2E1	3.05E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80022E1	-4.29153E-4	-8.79999E1	-4.76837E-5	5.48363E-3	9.34839E-2	2.72919E1	-3.26218E1	-3.26591E1	2.67992E1	1.65721E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00534E-1
1.3E1	2.1E1	1.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80024E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.65052E-3	9.33409E-2	2.73216E1	-3.26614E1	-3.26272E1	2.67866E1	1.6565E-7	2.5147E-3	2.5147E-3	6.34661E-3	1.98872E-1
1.4E1	7.56E2	1.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80021E1	-5.48363E-4	-8.79999E1	-3.8147E-4	5.45979E-3	9.34362E-2	2.72985E1	-3.26446E1	-3.26579E1	2.68134E1	1.65721E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9883E-1
1.5E1	9.6E1	2.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80023E1	-3.8147E-4	-8.79998E1	-1.19209E-4	5.43594E-3	9.31501E-2	2.72126E1	-3.2584E1	-3.27047E1	2.68148E1	1.6565E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.98937E-1
1.6E1	3.129E3	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80023E1	-4.29153E-4	-8.79999E1	1.19209E-4	5.48363E-3	9.34839E-2	2.73502E1	-3.26987E1	-3.26603E1	2.68058E1	1.6565E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.99456E-1
1.7E1	3.9526E4	3.1E1	6.87E2	4.7E2	-7.27053E-2	-8.80024E1	-4.05312E-4	-8.8E1	1.19209E-4	5.57899E-3	9.3627E-2	2.73015E1	-3.26837E1	-3.259E1	2.67956E1	1.65794E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.98764E-1
1.8E1	1.72278E5	8.1E1	7.27E2	5.0E2	-7.286E-2	-8.80018E1	-4.05312E-4	-8.80003E1	1.43051E-4	5.45979E-3	9.33647E-2	2.72962E1	-3.26785E1	-3.25953E1	2.67956E1	1.6565E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98592E-1
1.9E1	3.824E3	3.0E0	7.68E2	5.29E2	-7.11597E-2	-8.80021E1	-4.05312E-4	-8.80001E1	4.76837E-5	5.62668E-3	9.34839E-2	2.73129E1	-3.27017E1	-3.26194E1	2.68004E1	1.65791E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9917E-1
2.0E1	3.69E2	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.8002E1	-1.90735E-4	-8.80002E1	2.14577E-4	5.6982E-3	9.33647E-2	2.72915E1	-3.27092E1	-3.26567E1	2.68088E1	1.6565E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9934E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.8002E1	-4.29153E-4	-8.79999E1	1.19209E-4	5.79357E-3	9.37939E-2	2.7361E1	-3.26861E1	-3.26434E1	2.67992E1	1.65722E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
2.2E1	2.1E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80018E1	-3.8147E-4	-8.79999E1	0.0E0	5.45979E-3	9.33886E-2	2.73224E1	-3.26579E1	-3.26621E1	2.67925E1	1.65721E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9985E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80021E1	-4.05312E-4	-8.80001E1	-7.15256E-5	5.79357E-3	9.35555E-2	2.72644E1	-3.26605E1	-3.26419E1	2.67976E1	1.6565E-7	2.5126E-3	2.5126E-3	6.33131E-3	1.99233E-1