[Scan]
initial_time=2016-02-17T20:11:38
final_time=2016-02-17T20:11:57
ip_count=19
run=1032
dataset=6
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.7677E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.59342E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.30562E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.52564E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.55171E-8
mult1=-9.96916E-9
mult2=-2.73258E-9
rf_tmon=-4.66864E-3
rf_agc=3.40906E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.41127E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.75916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53696E1
cs_ef1b_imon=3.0416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.16561E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03832E0
lens1_imon=1.33278E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.96375E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.5816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=2.9999E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.71113E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.26628E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1576E1
os_ea1_imon=2.19852E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27746E0
cs_ionrep_imon=1.27438E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=3.26332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=4.22302E-8
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=8.41141E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=2.01766E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.12014E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84436E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.17574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.66494E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.7137E-1
os_ef2bup_imon=-5.40344E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.53648E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.3191E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.26627E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09699E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.77647E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-2.00812E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-1.07327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86211E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.13741E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.80471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.03831E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.57045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07567E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64452E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30929E1
cs_fil1_imon=1.00486E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.628E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66939E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58478E-2
os_fil2_imon=-2.72131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70782E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.40275E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.98741E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22577E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.6565E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.53038E-1
res40_imon=-2.65104E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.329E4	9.0E0	1.47E2	4.1E1	-7.30146E-2	-8.8002E1	-3.09944E-4	-8.8E1	3.33786E-4	5.4121E-3	9.37223E-2	2.73045E1	-3.26567E1	-3.26603E1	2.68118E1	1.65721E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9883E-1
2.0E0	5.732E3	3.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80024E1	-5.00679E-4	-8.80001E1	1.19209E-4	5.48363E-3	9.35078E-2	2.73033E1	-3.26428E1	-3.26579E1	2.68058E1	1.6565E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9968E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80024E1	-2.86102E-4	-8.80001E1	-2.14577E-4	5.57899E-3	9.3317E-2	2.73126E1	-3.26231E1	-3.26758E1	2.68157E1	1.66679E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80025E1	-4.76837E-5	-8.80002E1	0.0E0	5.74589E-3	9.33647E-2	2.72968E1	-3.26726E1	-3.26148E1	2.68022E1	1.6565E-7	2.50646E-3	2.50646E-3	6.3074E-3	1.9994E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80026E1	-2.38419E-4	-8.80003E1	-4.76837E-5	5.67436E-3	9.33886E-2	2.73117E1	-3.26543E1	-3.25966E1	2.68208E1	1.65722E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80022E1	-9.53674E-5	-8.80002E1	-2.86102E-4	5.57899E-3	9.31263E-2	2.72456E1	-3.26585E1	-3.2596E1	2.6819E1	1.6565E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.01547E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80022E1	-4.76837E-5	-8.8E1	-2.6226E-4	5.96046E-3	9.33409E-2	2.72976E1	-3.26509E1	-3.26388E1	2.67804E1	1.65722E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80021E1	-4.29153E-4	-8.80003E1	2.38419E-5	5.60284E-3	9.32693E-2	2.72745E1	-3.26429E1	-3.26229E1	2.67951E1	1.6565E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.99896E-1
1.2E1	3.16E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80023E1	-4.05312E-4	-8.80002E1	-7.15256E-5	5.4121E-3	9.33409E-2	2.73369E1	-3.26747E1	-3.26242E1	2.681E1	1.6565E-7	2.52407E-3	2.52407E-3	6.30171E-3	2.00425E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80021E1	-4.29153E-4	-8.79999E1	-2.38419E-5	5.55515E-3	9.34362E-2	2.73423E1	-3.2682E1	-3.26478E1	2.67944E1	1.6565E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.01219E-1
1.4E1	6.75E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80022E1	-7.86781E-4	-8.79998E1	-4.76837E-5	5.76973E-3	9.33886E-2	2.73261E1	-3.26543E1	-3.26422E1	2.68099E1	1.6565E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.99456E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80021E1	-7.86781E-4	-8.79998E1	-2.38419E-5	5.45979E-3	9.35555E-2	2.73327E1	-3.26458E1	-3.25719E1	2.68118E1	1.66784E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9934E-1
1.6E1	3.131E3	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80022E1	-8.34465E-4	-8.79998E1	-1.19209E-4	5.17368E-3	9.33409E-2	2.73281E1	-3.26759E1	-3.26575E1	2.67977E1	1.6565E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
1.7E1	3.9725E4	2.7E1	6.87E2	4.7E2	-7.18554E-2	-8.80023E1	-3.57628E-4	-8.8E1	-1.43051E-4	5.48363E-3	9.33409E-2	2.7364E1	-3.2632E1	-3.26272E1	2.684E1	1.66214E-7	2.52247E-3	2.52247E-3	6.27745E-3	1.99826E-1
1.8E1	1.72219E5	8.6E1	7.27E2	5.0E2	-7.15461E-2	-8.80023E1	-5.48363E-4	-8.80003E1	1.43051E-4	5.76973E-3	9.34839E-2	2.73039E1	-3.26573E1	-3.2632E1	2.6813E1	1.66263E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99543E-1
1.9E1	3.813E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80021E1	-9.77516E-4	-8.80003E1	-2.38419E-5	5.53131E-3	9.33886E-2	2.72909E1	-3.2639E1	-3.26001E1	2.68406E1					
2.0E1	3.18E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80022E1	-7.15256E-4	-8.80002E1	2.38419E-5	5.72205E-3	9.3174E-2	2.73167E1	-3.26278E1	-3.26432E1	2.6802E1	1.6565E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-5.48363E-4	-8.80001E1	9.53674E-5	5.74589E-3	9.34839E-2	2.73346E1	-3.26773E1	-3.26018E1	2.68175E1	1.6565E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
2.2E1	5.2E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80022E1	-5.00679E-4	-8.80002E1	9.53674E-5	5.79357E-3	9.34362E-2	2.73322E1	-3.26809E1	-3.26649E1	2.67986E1	1.65791E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98661E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.8002E1	-1.19209E-4	-8.80001E1	7.15256E-5	5.60284E-3	9.31263E-2	2.73051E1	-3.2653E1	-3.26164E1	2.68088E1	1.6565E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.9951E-1