[Scan]
initial_time=2016-02-17T20:12:31
final_time=2016-02-17T20:12:51
ip_count=19
run=1032
dataset=6
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.73345E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.40161E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.36155E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.58186E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.55146E-8
mult1=-9.6561E-9
mult2=-2.65074E-9
rf_tmon=-5.40765E-3
rf_agc=3.34357E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.64921E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64571E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=3.03551E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.17846E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04736E0
lens1_imon=1.64733E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64694E1
os_ef1alow_imon=2.99163E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.55408E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.00225E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.71333E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11312E1
os_restr1_imon=4.26653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.1936E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63621E1
os_ef1bup_imon=3.08328E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.26749E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01697E1
cs_anode1_imon=3.25525E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=4.21873E-8
tplens_vset=1.4E-1
tplens_vmon=1.56753E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98732E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.61573E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=2.00506E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74596E1
cs_ef2b_imon=3.12291E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8349E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71364E1
cs_ef2a_imon=3.1728E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08611E0
os_ef2alow_imon=-2.46394E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.78415E-1
os_ef2bup_imon=-5.36546E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10652E1
os_restr2_imon=3.53867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.26767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08937E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09882E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.77354E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-2.02872E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.71969E-6
window_vset=0.0E0
window_vmon=1.50582E-1
window_imon=-1.2078E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.97338E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.72167E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.36621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.58343E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07199E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64532E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=1.00537E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62036E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66857E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73837E-2
os_fil2_imon=-2.66761E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06211E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70562E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33656E-1
cs_fil2_imon=-2.56145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00647E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.67895E-7
chamber_cvt_pmon=2.53306E-3
foreline_cvt_pmon=2.53306E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68979E-1
res40_imon=-2.63379E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3366E4	1.1E1	1.47E2	4.1E1	-7.16233E-2	-8.80021E1	-7.15256E-4	-8.80001E1	2.14577E-4	5.55515E-3	9.31025E-2	2.73181E1	-3.2662E1	-3.26567E1	2.68004E1	1.65862E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00534E-1
2.0E0	5.83E3	8.0E0	3.16E2	1.6E2	-7.21643E-2	-8.8002E1	-6.19888E-4	-8.8E1	2.14577E-4	5.76973E-3	9.31978E-2	2.73068E1	-3.26683E1	-3.26474E1	2.68053E1	1.6565E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00363E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80022E1	-5.00679E-4	-8.80003E1	2.38419E-5	5.57899E-3	9.34601E-2	2.73088E1	-3.2656E1	-3.25972E1	2.67788E1	1.6565E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00192E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80024E1	-1.43051E-4	-8.80002E1	-9.53674E-5	5.22137E-3	9.32932E-2	2.73417E1	-3.26771E1	-3.26308E1	2.67896E1	1.6565E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.8002E1	-2.14577E-4	-8.80001E1	2.14577E-4	5.29289E-3	9.35078E-2	2.73183E1	-3.26458E1	-3.26446E1	2.67783E1	1.65723E-7	2.51248E-3	2.51248E-3	6.32978E-3	2.0064E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80022E1	-5.72205E-4	-8.8E1	3.33786E-4	5.24521E-3	9.34362E-2	2.73027E1	-3.27257E1	-3.26344E1	2.67989E1	1.6565E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	-6.19888E-4	-8.79999E1	3.09944E-4	5.36442E-3	9.31263E-2	2.73075E1	-3.26549E1	-3.26366E1	2.68136E1	1.66877E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00673E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80021E1	-7.39098E-4	-8.80002E1	1.90735E-4	5.62668E-3	9.33647E-2	2.73333E1	-3.26744E1	-3.25697E1	2.67854E1	1.66216E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00363E-1
1.2E1	2.9E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80022E1	-5.72205E-4	-8.8E1	0.0E0	5.38826E-3	9.33886E-2	2.72642E1	-3.26524E1	-3.26645E1	2.68244E1	1.66407E-7	2.51935E-3	2.51935E-3	6.30192E-3	2.00325E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80023E1	-3.09944E-4	-8.79998E1	1.43051E-4	5.24521E-3	9.34362E-2	2.73532E1	-3.27239E1	-3.2599E1	2.6777E1					
1.4E1	6.95E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80023E1	-3.09944E-4	-8.79998E1	3.09944E-4	5.34058E-3	9.32455E-2	2.73075E1	-3.26681E1	-3.26627E1	2.67794E1	1.67122E-7	2.51136E-3	2.51136E-3	6.33538E-3	2.00463E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80026E1	-3.57628E-4	-8.8E1	7.15256E-5	5.14984E-3	9.34601E-2	2.73688E1	-3.27161E1	-3.2644E1	2.68256E1	1.69075E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.9917E-1
1.6E1	3.157E3	1.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80028E1	-4.29153E-4	-8.79998E1	1.43051E-4	5.31673E-3	9.34124E-2	2.73183E1	-3.27131E1	-3.26482E1	2.68124E1	1.67822E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.00499E-1
1.7E1	3.9064E4	2.0E1	6.87E2	4.7E2	-7.17007E-2	-8.80024E1	-5.96046E-4	-8.79999E1	-2.14577E-4	5.60284E-3	9.33409E-2	2.72921E1	-3.26331E1	-3.26502E1	2.68214E1	1.6848E-7	2.52538E-3	2.52538E-3	6.3514E-3	2.00325E-1
1.8E1	1.7178E5	9.8E1	7.27E2	5.0E2	-7.22418E-2	-8.80026E1	-6.4373E-4	-8.80003E1	-3.33786E-4	5.6982E-3	9.34124E-2	2.73399E1	-3.26915E1	-3.26362E1	2.68148E1	1.69433E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99803E-1
1.9E1	3.761E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80025E1	-5.96046E-4	-8.79999E1	-3.09944E-4	5.60284E-3	9.34839E-2	2.73351E1	-3.26825E1	-3.26056E1	2.67716E1	1.68715E-7	2.52492E-3	2.52492E-3	6.33977E-3	2.01391E-1
2.0E1	3.2E2	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80025E1	-6.19888E-4	-8.80002E1	-4.76837E-5	5.26905E-3	9.3627E-2	2.72992E1	-3.2672E1	-3.26301E1	2.68262E1	1.65794E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00325E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80023E1	-5.48363E-4	-8.80001E1	-1.66893E-4	5.65052E-3	9.34839E-2	2.73039E1	-3.26524E1	-3.26603E1	2.6792E1	1.66855E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00363E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80022E1	-5.72205E-4	-8.79999E1	9.53674E-5	5.48363E-3	9.33409E-2	2.72673E1	-3.26679E1	-3.26644E1	2.68064E1	1.66877E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.99803E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80026E1	-5.00679E-4	-8.79999E1	2.14577E-4	5.6982E-3	9.34601E-2	2.72997E1	-3.26819E1	-3.26206E1	2.68142E1	1.67895E-7	2.53306E-3	2.53306E-3	6.32936E-3	1.98764E-1