[Scan]
initial_time=2016-02-17T20:12:58
final_time=2016-02-17T20:13:17
ip_count=19
run=1032
dataset=6
scan=194
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.74979E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.48768E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.28129E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.50708E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.55366E-8
mult1=-9.77651E-9
mult2=-2.84037E-9
rf_tmon=-4.7828E-3
rf_agc=3.27027E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=5.3221E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.05658E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02381E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05318E1
cs_ea1_imon=2.20694E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08101E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.95567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.58617E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.02631E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.7147E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.21775E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.2473E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.23282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=4.22493E-8
tplens_vset=1.4E-1
tplens_vmon=1.56933E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.35943E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24549E0
ionrepsh_imon=2.01984E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85533E0
os_ea2_imon=-2.77716E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.63497E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10451E1
os_restr2_imon=3.52257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.32632E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.28786E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.07859E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09434E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.77364E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-2.04647E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-8.39144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.18093E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.73031E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.41165E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.5826E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07281E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=1.00778E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6212E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66941E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77707E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.7861E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.73377E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22653E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0314E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3213E4	1.1E1	1.47E2	4.1E1	-7.17007E-2	-8.80025E1	-6.67572E-4	-8.80003E1	-1.19209E-4	5.74589E-3	9.32693E-2	2.73039E1	-3.2698E1	-3.26266E1	2.68394E1	1.69433E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00151E-1
2.0E0	5.737E3	8.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80022E1	-7.86781E-4	-8.80002E1	9.53674E-5	5.93662E-3	9.3174E-2	2.73069E1	-3.26493E1	-3.26505E1	2.6786E1	1.6922E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.00705E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80023E1	-5.96046E-4	-8.80004E1	-2.6226E-4	5.79357E-3	9.34124E-2	2.73307E1	-3.26459E1	-3.26454E1	2.68134E1	1.69431E-7	2.52362E-3	2.52362E-3	6.31858E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80024E1	-5.72205E-4	-8.80001E1	3.57628E-4	6.12736E-3	9.34124E-2	2.73075E1	-3.26805E1	-3.26468E1	2.6792E1	1.69441E-7	2.52197E-3	2.52197E-3	6.3126E-3	1.98465E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80024E1	-5.24521E-4	-8.80002E1	-1.19209E-4	5.55515E-3	9.3174E-2	2.73145E1	-3.26856E1	-3.26231E1	2.68064E1	1.6897E-7	2.51725E-3	2.51725E-3	6.3074E-3	1.98804E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80023E1	-9.29832E-4	-8.80002E1	-3.09944E-4	5.31673E-3	9.35078E-2	2.73273E1	-3.26536E1	-3.26308E1	2.67782E1	1.69075E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00534E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80023E1	-7.39098E-4	-8.80004E1	-3.8147E-4	5.74589E-3	9.33647E-2	2.73075E1	-3.26855E1	-3.26524E1	2.68022E1	1.6936E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80024E1	-5.00679E-4	-8.8E1	-2.6226E-4	5.36442E-3	9.34362E-2	2.73411E1	-3.26849E1	-3.26278E1	2.68142E1	1.69433E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98937E-1
1.2E1	3.21E2	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80024E1	-5.24521E-4	-8.8E1	-1.43051E-4	5.84126E-3	9.3627E-2	2.72895E1	-3.26597E1	-3.26398E1	2.6789E1	1.69508E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9731E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80023E1	-5.96046E-4	-8.80001E1	-1.43051E-4	5.93662E-3	9.35555E-2	2.73428E1	-3.26508E1	-3.26148E1	2.67943E1	1.69507E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.9963E-1
1.4E1	6.95E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80025E1	-6.67572E-4	-8.79996E1	-4.76837E-5	5.67436E-3	9.35078E-2	2.73296E1	-3.26799E1	-3.2645E1	2.68001E1	1.6922E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9985E-1
1.5E1	8.2E1	1.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80025E1	-7.15256E-4	-8.80001E1	-9.53674E-5	5.84126E-3	9.36508E-2	2.7321E1	-3.26413E1	-3.26325E1	2.68128E1	1.68981E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.00285E-1
1.6E1	3.231E3	4.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80022E1	-8.58307E-4	-8.80004E1	-9.53674E-5	5.65052E-3	9.34124E-2	2.72883E1	-3.26663E1	-3.26302E1	2.67788E1	1.69364E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00363E-1
1.7E1	3.9609E4	1.7E1	6.87E2	4.7E2	-7.30918E-2	-8.80023E1	-6.91414E-4	-8.80003E1	7.15256E-5	5.6982E-3	9.34601E-2	2.72907E1	-3.26549E1	-3.26723E1	2.68202E1	1.69286E-7	2.52428E-3	2.52428E-3	6.28552E-3	2.00673E-1
1.8E1	1.72258E5	9.4E1	7.27E2	5.0E2	-7.35556E-2	-8.80022E1	-5.24521E-4	-8.80005E1	2.86102E-4	5.8651E-3	9.33647E-2	2.73051E1	-3.26591E1	-3.26284E1	2.68034E1	1.66516E-7	2.51771E-3	2.51771E-3	6.3514E-3	2.00325E-1
1.9E1	3.866E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80021E1	-5.96046E-4	-8.80003E1	1.19209E-4	5.62668E-3	9.31978E-2	2.73299E1	-3.26437E1	-3.26354E1	2.68394E1	1.65794E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.9963E-1
2.0E1	3.88E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.8002E1	-4.29153E-4	-8.80002E1	1.43051E-4	5.96046E-3	9.32217E-2	2.73352E1	-3.26325E1	-3.26561E1	2.67972E1	1.68356E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9951E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80022E1	-8.10623E-4	-8.80003E1	-2.14577E-4	5.74589E-3	9.31978E-2	2.7285E1	-3.2639E1	-3.26526E1	2.68022E1	1.67926E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9883E-1
2.2E1	5.2E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80021E1	-7.15256E-4	-8.80004E1	2.86102E-4	5.74589E-3	9.35316E-2	2.73364E1	-3.26679E1	-3.26319E1	2.67763E1	1.68499E-7	2.51793E-3	2.51793E-3	6.33436E-3	1.98915E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80021E1	-5.00679E-4	-8.80003E1	-1.43051E-4	5.4121E-3	9.37939E-2	2.72931E1	-3.27041E1	-3.26092E1	2.68244E1