[Scan]
initial_time=2016-02-17T20:14:18
final_time=2016-02-17T20:14:37
ip_count=19
run=1032
dataset=6
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.73207E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.57971E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.32681E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.55647E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=1.55494E-8
mult1=-8.91095E-9
mult2=-2.83175E-9
rf_tmon=-3.60949E-3
rf_agc=3.29366E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.55563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=1.96634E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=3.04716E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.19074E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0336E0
lens1_imon=1.66195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.58691E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=3.00754E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.71476E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11384E1
os_restr1_imon=4.26628E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.19286E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.26058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=3.25463E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=4.22444E-8
tplens_vset=1.4E-1
tplens_vmon=1.61253E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26646E1
iondef3_imon=1.49383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.59824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.57198E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32525E0
ionrepsh_imon=2.01341E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.19746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84377E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.109E0
os_ef2alow_imon=-2.74139E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.86429E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1095E1
os_restr2_imon=3.52674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.2767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72953E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.07773E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09911E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.77136E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-1.99769E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=1.86409E-1
window_imon=-1.02462E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.68437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.30022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34059E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.59993E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07086E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64632E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30903E1
cs_fil1_imon=1.00683E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63026E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66947E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57211E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49775E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.57072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.46612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22624E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00909E-1
res40_imon=-2.67189E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3234E4	1.3E1	1.47E2	4.1E1	-7.27828E-2	-8.80023E1	-7.15256E-4	-8.80004E1	-7.15256E-5	5.45979E-3	9.34362E-2	2.73193E1	-3.26703E1	-3.26172E1	2.684E1	1.69147E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.00534E-1
2.0E0	5.706E3	8.0E0	3.16E2	1.6E2	-7.286E-2	-8.80022E1	-5.96046E-4	-8.80004E1	-2.14577E-4	5.67436E-3	9.35555E-2	2.73051E1	-3.2667E1	-3.26223E1	2.68016E1	1.69292E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9883E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80022E1	-6.19888E-4	-8.80003E1	-3.09944E-4	5.38826E-3	9.36031E-2	2.73092E1	-3.26691E1	-3.25983E1	2.67872E1	1.69431E-7	2.5147E-3	2.5147E-3	6.34099E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80021E1	-5.48363E-4	-8.80003E1	-1.19209E-4	5.53131E-3	9.3627E-2	2.736E1	-3.27062E1	-3.26254E1	2.68123E1	1.68787E-7	2.52384E-3	2.52384E-3	6.29396E-3	1.99085E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80023E1	-5.72205E-4	-8.80004E1	1.66893E-4	5.62668E-3	9.31025E-2	2.73285E1	-3.26651E1	-3.2623E1	2.68274E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80024E1	-6.91414E-4	-8.80003E1	9.53674E-5	5.34058E-3	9.37939E-2	2.73219E1	-3.26422E1	-3.26458E1	2.68178E1	1.69286E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80024E1	-7.15256E-4	-8.80006E1	9.53674E-5	5.55515E-3	9.3627E-2	2.73177E1	-3.265E1	-3.26368E1	2.67956E1	1.69213E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80025E1	-5.72205E-4	-8.80004E1	-1.19209E-4	5.17368E-3	9.377E-2	2.73015E1	-3.26549E1	-3.26026E1	2.68052E1	1.6936E-7	2.52538E-3	2.52538E-3	6.29098E-3	2.00499E-1
1.2E1	3.35E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80023E1	-8.34465E-4	-8.80004E1	2.38419E-5	5.48363E-3	9.3627E-2	2.73051E1	-3.26555E1	-3.26278E1	2.6798E1	1.68406E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80022E1	-4.76837E-4	-8.80005E1	2.14577E-4	5.65052E-3	9.34601E-2	2.72961E1	-3.27137E1	-3.25773E1	2.6792E1	1.65933E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98491E-1
1.4E1	6.84E2	0.0E0	5.66E2	3.82E2	-7.11597E-2	-8.80022E1	-6.19888E-4	-8.80004E1	0.0E0	5.43594E-3	9.37939E-2	2.73183E1	-3.2635E1	-3.26386E1	2.67896E1	1.68041E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98419E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80021E1	-8.34465E-4	-8.80004E1	1.66893E-4	5.57899E-3	9.37462E-2	2.73159E1	-3.26765E1	-3.26236E1	2.67746E1	1.67822E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.97388E-1
1.6E1	3.165E3	0.0E0	6.47E2	4.41E2	-7.0464E-2	-8.80023E1	-7.86781E-4	-8.8E1	2.38419E-4	5.43594E-3	9.33886E-2	2.73099E1	-3.26609E1	-3.26434E1	2.67908E1	1.67895E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.97731E-1
1.7E1	3.9085E4	2.1E1	6.87E2	4.7E2	-7.14689E-2	-8.80023E1	-5.96046E-4	-8.80001E1	3.09944E-4	5.50747E-3	9.36031E-2	2.73069E1	-3.26795E1	-3.26218E1	2.68214E1	1.6826E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99456E-1
1.8E1	1.72894E5	8.9E1	7.27E2	5.0E2	-7.16233E-2	-8.80023E1	-8.10623E-4	-8.80003E1	-2.38419E-5	5.60284E-3	9.35555E-2	2.73345E1	-3.26843E1	-3.26777E1	2.68058E1	1.6936E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00673E-1
1.9E1	3.748E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.80021E1	-6.91414E-4	-8.80002E1	-1.43051E-4	5.57899E-3	9.35078E-2	2.73435E1	-3.26621E1	-3.26164E1	2.6795E1	1.69433E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00325E-1
2.0E1	3.65E2	0.0E0	8.08E2	5.58E2	-7.17007E-2	-8.80023E1	-4.76837E-4	-8.8E1	-3.8147E-4	5.62668E-3	9.36031E-2	2.7326E1	-3.26434E1	-3.26417E1	2.68047E1	1.6936E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.00499E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.06958E-2	-8.80021E1	-7.15256E-4	-8.80003E1	-2.38419E-5	5.4121E-3	9.32455E-2	2.73261E1	-3.26585E1	-3.26044E1	2.67986E1	1.69075E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00363E-1
2.2E1	3.5E1	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80021E1	-6.4373E-4	-8.80003E1	-2.38419E-5	5.4121E-3	9.35078E-2	2.73086E1	-3.27019E1	-3.26231E1	2.68065E1	1.69402E-7	2.51777E-3	2.51777E-3	6.31274E-3	2.00212E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80018E1	-8.10623E-4	-8.80002E1	-2.6226E-4	5.34058E-3	9.33647E-2	2.72953E1	-3.26536E1	-3.26646E1	2.67962E1