[Scan]
initial_time=2016-02-17T20:15:38
final_time=2016-02-17T20:15:57
ip_count=19
run=1032
dataset=6
scan=200
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.7738E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.71036E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.29284E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.52302E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.5528E-8
mult1=-9.78308E-9
mult2=-2.73894E-9
rf_tmon=-4.58026E-3
rf_agc=3.32796E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=5.42176E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20326E1
lens5a_imon=1.96811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=3.02162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.19782E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01E0
lens1_imon=1.48144E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.53559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=2.99784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.71438E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10991E1
os_restr1_imon=4.274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.19994E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.25987E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=3.24615E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=4.22113E-8
tplens_vset=1.4E-1
tplens_vmon=1.59129E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.59222E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.52966E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=2.00173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34029E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83315E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71588E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.72762E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71305E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.52618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.27128E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67613E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09671E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=9.78697E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-2.00683E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56141E1
einzel_imon=7.53287E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82583E2
mask1_imon=2.38893E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.22236E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.99229E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.40121E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.58368E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07605E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64692E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=1.00636E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62918E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66813E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22753E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.01197E-1
chamber_ion_pmon=1.69286E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09748E-1
res40_imon=-2.78889E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3309E4	1.1E1	1.47E2	4.1E1	-7.24736E-2	-8.80025E1	-3.8147E-4	-8.8E1	-2.14577E-4	5.53131E-3	9.33886E-2	2.73201E1	-3.26729E1	-3.26597E1	2.67946E1	1.69508E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00192E-1
2.0E0	5.782E3	5.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80024E1	-6.91414E-4	-8.80003E1	-1.66893E-4	5.67436E-3	9.33647E-2	2.73033E1	-3.26332E1	-3.26398E1	2.67825E1	1.69075E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9968E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80023E1	-8.10623E-4	-8.80004E1	-2.38419E-4	5.67436E-3	9.34362E-2	2.73181E1	-3.26649E1	-3.26614E1	2.67775E1	1.68589E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.00064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80021E1	-5.48363E-4	-8.80002E1	-4.76837E-5	5.48363E-3	9.34839E-2	2.73478E1	-3.26386E1	-3.26254E1	2.68286E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80021E1	-5.48363E-4	-8.80003E1	-2.38419E-4	5.50747E-3	9.35316E-2	2.73169E1	-3.26484E1	-3.2636E1	2.68094E1	1.67854E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.98661E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80023E1	-5.00679E-4	-8.80006E1	7.15256E-5	5.88894E-3	9.3317E-2	2.72831E1	-3.26364E1	-3.26119E1	2.6837E1	1.6936E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80025E1	-3.8147E-4	-8.80002E1	-4.76837E-5	5.98431E-3	9.3174E-2	2.73328E1	-3.26278E1	-3.26284E1	2.67932E1	1.69506E-7	2.53033E-3	2.53033E-3	6.32418E-3	1.98872E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80024E1	-2.6226E-4	-8.79996E1	-1.66893E-4	5.50747E-3	9.29594E-2	2.73015E1	-3.26825E1	-3.2641E1	2.67974E1	1.6922E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.9951E-1
1.2E1	2.83E2	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80025E1	-2.14577E-4	-8.8E1	1.43051E-4	5.8651E-3	9.31025E-2	2.73051E1	-3.26561E1	-3.25972E1	2.68142E1	1.6936E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80026E1	-6.67572E-4	-8.8E1	-9.53674E-5	6.10352E-3	9.32217E-2	2.73175E1	-3.26514E1	-3.26183E1	2.68059E1	1.69139E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.00673E-1
1.4E1	6.88E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80024E1	-6.19888E-4	-8.80001E1	0.0E0	5.8651E-3	9.32217E-2	2.73267E1	-3.26675E1	-3.26062E1	2.68208E1	1.69436E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9917E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80024E1	-6.4373E-4	-8.80003E1	2.38419E-4	5.48363E-3	9.33886E-2	2.73187E1	-3.26443E1	-3.26354E1	2.678E1	1.6936E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.98764E-1
1.6E1	3.261E3	2.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80025E1	-4.76837E-4	-8.80005E1	2.14577E-4	5.98431E-3	9.3317E-2	2.73375E1	-3.26927E1	-3.26206E1	2.67637E1	1.69147E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.9985E-1
1.7E1	3.9178E4	2.0E1	6.87E2	4.7E2	-7.26282E-2	-8.80022E1	-7.15256E-4	-8.80002E1	5.24521E-4	5.79357E-3	9.32932E-2	2.73159E1	-3.27011E1	-3.25876E1	2.68292E1	1.69286E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.98419E-1
1.8E1	1.72096E5	8.2E1	7.27E2	5.0E2	-7.27828E-2	-8.80024E1	-5.72205E-4	-8.80004E1	2.14577E-4	5.8651E-3	9.29832E-2	2.72606E1	-3.26374E1	-3.26224E1	2.681E1	1.69286E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
1.9E1	3.841E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80023E1	-5.00679E-4	-8.80001E1	-4.76837E-5	5.6982E-3	9.31263E-2	2.72895E1	-3.26831E1	-3.26452E1	2.6789E1	1.69213E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99456E-1
2.0E1	3.49E2	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.8002E1	-5.24521E-4	-8.80001E1	-4.76837E-5	5.67436E-3	9.31501E-2	2.73147E1	-3.26885E1	-3.26308E1	2.67872E1	1.69139E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9963E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80023E1	-5.72205E-4	-8.80003E1	-7.15256E-5	5.34058E-3	9.31263E-2	2.72089E1	-3.26154E1	-3.27658E1	2.67891E1	1.69436E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9883E-1
2.2E1	2.9E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80022E1	-8.34465E-4	-8.79998E1	-9.53674E-5	5.36442E-3	9.32455E-2	2.73255E1	-3.26506E1	-3.26302E1	2.67992E1	1.69433E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00151E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80023E1	-7.39098E-4	-8.80002E1	-1.43051E-4	5.43594E-3	9.3174E-2	2.73092E1	-3.26809E1	-3.26396E1	2.67613E1	1.69286E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.01197E-1