[Scan]
initial_time=2016-02-17T20:17:24
final_time=2016-02-17T20:17:43
ip_count=19
run=1032
dataset=6
scan=204
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.74897E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.85496E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.2934E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.48031E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.55759E-8
mult1=-1.25054E-8
mult2=-2.74023E-9
rf_tmon=-9.13119E-3
rf_agc=3.00411E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.55789E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53801E1
cs_ef1b_imon=3.05037E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.2187E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00646E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64659E1
os_ef1alow_imon=2.97995E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04186E1
cs_ea2_imon=1.57311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84415E1
cs_ef1a_imon=3.00048E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.71707E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.112E1
os_restr1_imon=4.26476E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.19392E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63709E1
os_ef1bup_imon=3.08682E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.27545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01756E1
cs_anode1_imon=3.25843E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=4.22309E-8
tplens_vset=1.4E-1
tplens_vmon=1.62433E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26321E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26701E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98686E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=8.61144E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=2.0127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.20454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7466E1
cs_ef2b_imon=3.13458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85911E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.17988E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06429E0
os_ef2alow_imon=-2.58779E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.76056E-1
os_ef2bup_imon=-5.30531E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10888E1
os_restr2_imon=3.53337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.32087E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01738E1
cs_anode2_imon=2.2751E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72929E1
iondef1_imon=1.08361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08123E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.099E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=9.78749E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10714E0
cs_ionaccel_imon=-2.02164E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.69846E-6
window_vset=0.0E0
window_vmon=1.57659E-1
window_imon=-9.7426E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39031E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.38108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.31084E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.34624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59159E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.57405E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06663E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64625E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=1.00583E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61487E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67006E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58478E-2
os_fil2_imon=-2.6794E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03852E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7015E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35309E-1
cs_fil2_imon=-2.31966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08314E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22785E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.69292E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18517E-1
res40_imon=-2.71871E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3279E4	1.9E1	1.47E2	4.1E1	-7.13915E-2	-8.8002E1	-1.09673E-3	-8.80002E1	4.76837E-5	5.65052E-3	9.29832E-2	2.72931E1	-3.26561E1	-3.26543E1	2.6786E1	1.69213E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00151E-1
2.0E0	5.79E3	4.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80022E1	-6.91414E-4	-8.80003E1	-7.15256E-5	5.74589E-3	9.32693E-2	2.73225E1	-3.26524E1	-3.26158E1	2.68184E1	1.6922E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00363E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80023E1	-9.05991E-4	-8.80003E1	2.14577E-4	5.88894E-3	9.29832E-2	2.73157E1	-3.26756E1	-3.26272E1	2.67956E1	1.69506E-7	2.51248E-3	2.51248E-3	6.30182E-3	1.99224E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80019E1	-8.82149E-4	-8.80003E1	2.38419E-4	6.07967E-3	9.36031E-2	2.73484E1	-3.26777E1	-3.26645E1	2.6795E1	1.6951E-7	2.51393E-3	2.51393E-3	6.33388E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.8002E1	-5.24521E-4	-8.80003E1	2.38419E-4	5.57899E-3	9.32217E-2	2.72913E1	-3.26591E1	-3.26236E1	2.67908E1	1.69286E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.8002E1	-5.48363E-4	-8.80002E1	1.19209E-4	5.57899E-3	9.32217E-2	2.73057E1	-3.26585E1	-3.25954E1	2.68016E1	1.6936E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80019E1	-7.62939E-4	-8.80003E1	0.0E0	5.53131E-3	9.31263E-2	2.72945E1	-3.26543E1	-3.26124E1	2.68123E1	1.69131E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.00108E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.8002E1	-7.86781E-4	-8.80003E1	4.76837E-5	5.67436E-3	9.32693E-2	2.73135E1	-3.27035E1	-3.25942E1	2.68022E1	1.6922E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.00021E-1
1.2E1	3.5E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80022E1	-9.05991E-4	-8.80003E1	-1.66893E-4	5.65052E-3	9.32693E-2	2.73027E1	-3.26741E1	-3.26158E1	2.68064E1	1.69362E-7	2.51755E-3	2.51755E-3	6.3074E-3	1.99397E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80024E1	-7.86781E-4	-8.80001E1	7.15256E-5	5.88894E-3	9.34124E-2	2.73207E1	-3.26506E1	-3.2611E1	2.67986E1					
1.4E1	6.72E2	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80022E1	-5.24521E-4	-8.80005E1	2.14577E-4	5.60284E-3	9.3317E-2	2.72898E1	-3.26685E1	-3.26095E1	2.68148E1	1.69286E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98419E-1
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80023E1	-7.15256E-4	-8.80004E1	-1.19209E-4	5.96046E-3	9.34362E-2	2.73273E1	-3.26585E1	-3.26603E1	2.68154E1	1.69436E-7	2.51954E-3	2.51954E-3	6.28592E-3	1.9934E-1
1.6E1	3.228E3	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80023E1	-3.09944E-4	-8.80003E1	-4.76837E-5	5.4121E-3	9.3317E-2	2.72967E1	-3.26915E1	-3.26434E1	2.6789E1	1.69356E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.98872E-1
1.7E1	3.9676E4	2.2E1	6.87E2	4.7E2	-7.25507E-2	-8.80021E1	-3.57628E-4	-8.80002E1	-2.86102E-4	6.07967E-3	9.35316E-2	2.73039E1	-3.26536E1	-3.265E1	2.68059E1	1.69075E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1
1.8E1	1.72469E5	8.7E1	7.27E2	5.0E2	-7.17007E-2	-8.80026E1	-6.4373E-4	-8.80003E1	-2.14577E-4	5.76973E-3	9.3174E-2	2.73183E1	-3.26561E1	-3.26512E1	2.67982E1	1.69066E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
1.9E1	3.804E3	2.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80024E1	-5.00679E-4	-8.80004E1	-4.76837E-5	5.43594E-3	9.3174E-2	2.73016E1	-3.26585E1	-3.26195E1	2.67856E1	1.69213E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98592E-1
2.0E1	3.49E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80023E1	-5.72205E-4	-8.80002E1	-9.53674E-5	5.36442E-3	9.31978E-2	2.73496E1	-3.26476E1	-3.26284E1	2.68106E1	1.69508E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9968E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80023E1	-2.38419E-4	-8.80001E1	7.15256E-5	5.74589E-3	9.3317E-2	2.72883E1	-3.26816E1	-3.26364E1	2.68024E1	1.69286E-7	2.52538E-3	2.52538E-3	6.34037E-3	2.00151E-1
2.2E1	5.9E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80023E1	-2.6226E-4	-8.80002E1	9.53674E-5	5.76973E-3	9.30309E-2	2.73111E1	-3.27197E1	-3.26248E1	2.6792E1	1.6922E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.01047E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80023E1	-4.29153E-4	-8.80004E1	2.38419E-5	5.65052E-3	9.30786E-2	2.72929E1	-3.26701E1	-3.26321E1	2.68064E1	1.69292E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00192E-1