[Scan]
initial_time=2016-02-17T20:18:17
final_time=2016-02-17T20:18:37
ip_count=19
run=1032
dataset=6
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.7508E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.48077E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.32626E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.50183E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.54935E-8
mult1=-1.01498E-8
mult2=-2.74256E-9
rf_tmon=-4.44033E-3
rf_agc=3.42889E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=5.36168E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.35029E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19592E1
lens5a_imon=1.96829E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12539E2
lens4a_imon=2.0532E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.03352E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02006E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.19504E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05818E0
lens1_imon=1.56441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.54723E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.71863E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.23614E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=1.24225E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=3.26129E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.22723E-8
tplens_vset=1.4E-1
tplens_vmon=1.6138E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.47946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.58689E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.5305E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=2.03066E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81928E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.56289E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.52762E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.28137E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67846E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09652E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.8078E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11152E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.59679E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86068E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.5844E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07233E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64765E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=1.00562E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67023E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56641E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22784E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.69433E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01338E-1
res40_imon=-2.79249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3283E4	1.4E1	1.47E2	4.1E1	-7.18554E-2	-8.80025E1	-7.39098E-4	-8.80004E1	2.38419E-4	5.84126E-3	9.31978E-2	2.73039E1	-3.26645E1	-3.26128E1	2.68076E1	1.69213E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
2.0E0	5.758E3	4.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80022E1	-8.82149E-4	-8.80003E1	2.38419E-4	5.84126E-3	9.36031E-2	2.73405E1	-3.26753E1	-3.2641E1	2.67914E1	1.69286E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00673E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80023E1	-1.33514E-3	-8.80001E1	9.53674E-5	5.38826E-3	9.33886E-2	2.73128E1	-3.26885E1	-3.2659E1	2.6813E1	1.69206E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80022E1	-9.29832E-4	-8.80003E1	2.38419E-5	5.76973E-3	9.31025E-2	2.72967E1	-3.26801E1	-3.26212E1	2.67914E1	1.69147E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80023E1	-8.10623E-4	-8.80006E1	7.15256E-5	5.60284E-3	9.30786E-2	2.72992E1	-3.26673E1	-3.26172E1	2.68047E1	1.6922E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80023E1	-7.62939E-4	-8.80003E1	-1.19209E-4	5.72205E-3	9.3174E-2	2.73057E1	-3.26302E1	-3.26561E1	2.67932E1	1.6936E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80023E1	-4.52995E-4	-8.80002E1	7.15256E-5	5.65052E-3	9.32217E-2	2.72781E1	-3.26993E1	-3.26254E1	2.68016E1	1.69433E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80023E1	-3.33786E-4	-8.80002E1	-4.76837E-5	5.65052E-3	9.30309E-2	2.72847E1	-3.26152E1	-3.26056E1	2.68106E1	1.69364E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00705E-1
1.2E1	3.32E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80026E1	-7.62939E-4	-8.80003E1	1.43051E-4	5.8651E-3	9.29117E-2	2.72925E1	-3.26524E1	-3.26278E1	2.6804E1	1.69286E-7	2.52757E-3	2.52757E-3	6.32386E-3	2.00847E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80024E1	-7.86781E-4	-8.80003E1	1.43051E-4	5.45979E-3	9.30786E-2	2.72979E1	-3.26807E1	-3.2599E1	2.68268E1	1.69206E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99754E-1
1.4E1	6.87E2	1.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80022E1	-9.29832E-4	-8.80003E1	1.66893E-4	5.53131E-3	9.32932E-2	2.73394E1	-3.26474E1	-3.26334E1	2.67864E1	1.69433E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00673E-1
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80023E1	-9.53674E-4	-8.80005E1	3.8147E-4	5.60284E-3	9.32217E-2	2.72933E1	-3.26638E1	-3.26307E1	2.67914E1	1.69433E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99977E-1
1.6E1	3.222E3	2.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80021E1	-1.0252E-3	-8.80006E1	1.90735E-4	5.45979E-3	9.34362E-2	2.73087E1	-3.26573E1	-3.2611E1	2.68004E1	1.69292E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00192E-1
1.7E1	3.9539E4	2.3E1	6.87E2	4.7E2	-7.13143E-2	-8.8002E1	-8.10623E-4	-8.80001E1	1.19209E-4	5.65052E-3	9.31025E-2	2.73171E1	-3.26585E1	-3.26308E1	2.67998E1	1.69206E-7	2.52809E-3	2.52809E-3	6.32418E-3	1.99754E-1
1.8E1	1.72197E5	1.04E2	7.27E2	5.0E2	-7.18554E-2	-8.80022E1	-5.72205E-4	-8.80002E1	4.29153E-4	5.60284E-3	9.31501E-2	2.73496E1	-3.26645E1	-3.26128E1	2.681E1	1.69213E-7	2.51552E-3	2.51552E-3	6.28006E-3	1.99456E-1
1.9E1	3.814E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80023E1	-7.15256E-4	-8.80003E1	2.14577E-4	5.76973E-3	9.35316E-2	2.72903E1	-3.26756E1	-3.26419E1	2.68274E1	1.69364E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.00363E-1
2.0E1	3.61E2	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80023E1	-9.05991E-4	-8.80004E1	4.29153E-4	5.34058E-3	9.3317E-2	2.72993E1	-3.26868E1	-3.25947E1	2.68163E1	1.69286E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80022E1	-8.10623E-4	-8.80002E1	3.33786E-4	5.62668E-3	9.33647E-2	2.73033E1	-3.26278E1	-3.26646E1	2.6786E1	1.68607E-7	2.51679E-3	2.51679E-3	6.30221E-3	2.00435E-1
2.2E1	2.9E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80023E1	-5.96046E-4	-8.80002E1	9.53674E-5	5.53131E-3	9.3317E-2	2.73299E1	-3.26472E1	-3.26443E1	2.68106E1	1.69131E-7	2.52362E-3	2.52362E-3	6.33538E-3	1.99754E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80023E1	-7.62939E-4	-8.80001E1	4.05312E-4	5.96046E-3	9.32932E-2	2.73303E1	-3.26386E1	-3.26356E1	2.67846E1	1.69433E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00499E-1