[Scan]
initial_time=2016-02-17T20:19:10
final_time=2016-02-17T20:19:30
ip_count=19
run=1032
dataset=6
scan=208
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.76343E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.52464E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.30937E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.55588E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.55337E-8
mult1=-1.07036E-8
mult2=-2.75853E-9
rf_tmon=-2.95028E-3
rf_agc=3.44631E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.38623E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20473E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.04685E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05071E1
cs_ea1_imon=2.20383E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04127E0
lens1_imon=1.41065E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.5547E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.71724E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.19392E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27923E0
cs_ionrep_imon=1.27792E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.26489E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.2252E-8
tplens_vset=1.4E-1
tplens_vmon=1.61548E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=7.96103E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=2.00138E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33221E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8479E0
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.98936E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.52906E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.3283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.27056E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09664E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=9.79827E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-2.08612E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.20112E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.36747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.57425E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=1.00495E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6215E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66857E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61924E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22661E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.00847E-1
chamber_ion_pmon=1.69286E-7
chamber_cvt_pmon=2.50789E-3
foreline_cvt_pmon=2.50789E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62606E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3709E4	2.0E1	1.47E2	4.1E1	-7.23964E-2	-8.80023E1	-5.72205E-4	-8.79998E1	2.6226E-4	5.81741E-3	9.31501E-2	2.72763E1	-3.26933E1	-3.26074E1	2.67908E1	1.69297E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.01072E-1
2.0E0	5.821E3	4.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80023E1	-7.39098E-4	-8.80001E1	4.29153E-4	5.79357E-3	9.32455E-2	2.73339E1	-3.26744E1	-3.26407E1	2.678E1	1.69286E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.00499E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80022E1	-8.34465E-4	-8.80001E1	2.6226E-4	5.55515E-3	9.31978E-2	2.73346E1	-3.26868E1	-3.26449E1	2.67932E1	1.69199E-7	2.52521E-3	2.52521E-3	6.3074E-3	2.00787E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80022E1	-8.58307E-4	-8.79998E1	3.57628E-4	5.53131E-3	9.3174E-2	2.73351E1	-3.26609E1	-3.26242E1	2.67866E1	1.69439E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80018E1	-1.07288E-3	-8.79999E1	2.86102E-4	5.60284E-3	9.30786E-2	2.73135E1	-3.26891E1	-3.2632E1	2.68283E1	1.69213E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.8002E1	-8.82149E-4	-8.8E1	3.09944E-4	5.65052E-3	9.30786E-2	2.73087E1	-3.27053E1	-3.26356E1	2.68045E1	1.69286E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80021E1	-7.62939E-4	-8.80002E1	2.6226E-4	5.43594E-3	9.31501E-2	2.73027E1	-3.26554E1	-3.26664E1	2.68034E1	1.69281E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99754E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80019E1	-8.10623E-4	-8.80004E1	2.14577E-4	5.72205E-3	9.31025E-2	2.72974E1	-3.26697E1	-3.26537E1	2.68082E1	1.69213E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.01372E-1
1.2E1	2.96E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80018E1	-8.10623E-4	-8.80001E1	3.09944E-4	5.81741E-3	9.33647E-2	2.73159E1	-3.26705E1	-3.26452E1	2.67992E1	1.69253E-7	2.51863E-3	2.51863E-3	6.31827E-3	2.00085E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80021E1	-9.05991E-4	-8.80001E1	3.57628E-4	5.74589E-3	9.32217E-2	2.72998E1	-3.26732E1	-3.26225E1	2.68105E1					
1.4E1	6.65E2	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80021E1	-9.77516E-4	-8.8E1	1.90735E-4	5.57899E-3	9.31263E-2	2.72871E1	-3.265E1	-3.26314E1	2.68046E1	1.6936E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00673E-1
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80019E1	-9.29832E-4	-8.80003E1	-9.53674E-5	5.38826E-3	9.33886E-2	2.73111E1	-3.26891E1	-3.25984E1	2.67992E1	1.69364E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00705E-1
1.6E1	3.109E3	1.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80022E1	-9.77516E-4	-8.80003E1	7.15256E-5	5.55515E-3	9.32217E-2	2.73175E1	-3.2662E1	-3.26443E1	2.67956E1	1.69139E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00499E-1
1.7E1	3.9041E4	2.7E1	6.87E2	4.7E2	-7.17007E-2	-8.80021E1	-1.0252E-3	-8.80003E1	2.38419E-5	5.50747E-3	9.30786E-2	2.72915E1	-3.26614E1	-3.26236E1	2.67897E1	1.69147E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00192E-1
1.8E1	1.71266E5	1.02E2	7.27E2	5.0E2	-7.10825E-2	-8.80021E1	-7.62939E-4	-8.80004E1	7.15256E-5	5.57899E-3	9.31501E-2	2.72925E1	-3.26855E1	-3.26434E1	2.68112E1	1.69364E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9985E-1
1.9E1	3.862E3	0.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80021E1	-8.10623E-4	-8.80003E1	-7.15256E-5	5.55515E-3	9.29356E-2	2.73145E1	-3.26461E1	-3.26478E1	2.68136E1	1.6936E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.00151E-1
2.0E1	3.65E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80021E1	-9.29832E-4	-8.80005E1	1.19209E-4	5.84126E-3	9.34124E-2	2.73514E1	-3.26735E1	-3.26296E1	2.6794E1	1.69581E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9968E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80018E1	-8.34465E-4	-8.80004E1	5.48363E-4	5.57899E-3	9.31978E-2	2.7285E1	-3.26661E1	-3.26467E1	2.67952E1	1.69507E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.00499E-1
2.2E1	6.0E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80022E1	-6.4373E-4	-8.80001E1	0.0E0	5.4121E-3	9.31263E-2	2.73033E1	-3.26862E1	-3.26189E1	2.67836E1	1.69364E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.00192E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80022E1	-7.15256E-4	-8.8E1	3.33786E-4	5.67436E-3	9.31263E-2	2.73021E1	-3.26855E1	-3.26368E1	2.6798E1	1.69286E-7	2.50789E-3	2.50789E-3	6.33486E-3	2.00847E-1