[Scan]
initial_time=2016-02-17T20:22:44
final_time=2016-02-17T20:23:03
ip_count=19
run=1032
dataset=6
scan=216
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.79439E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.26488E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.26703E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.50279E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.55208E-8
mult1=-1.07759E-8
mult2=-2.7745E-9
rf_tmon=-4.22403E-3
rf_agc=3.31894E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.6746E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.48309E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.04577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05407E1
cs_ea1_imon=2.16242E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00941E0
lens1_imon=1.64779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.57736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.99892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.71508E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.26139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.2148E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=1.25881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=3.24146E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=4.21951E-8
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.60992E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.17239E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=2.02969E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83905E0
os_ea2_imon=-2.38717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73708E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.5251E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73532E1
iondef1_imon=1.09281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67898E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10004E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=9.79477E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.94917E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47078E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.4543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.40995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=5.8526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.57767E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64582E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=1.00513E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66756E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59266E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.65588E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22658E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.97815E-1
chamber_ion_pmon=1.69364E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.11259E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3578E4	1.7E1	1.47E2	4.1E1	-7.30146E-2	-8.80023E1	-7.86781E-4	-8.80003E1	-2.38419E-5	5.126E-3	9.3317E-2	2.72691E1	-3.26685E1	-3.26018E1	2.67949E1	1.69286E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.00151E-1
2.0E0	5.697E3	2.0E0	3.16E2	1.6E2	-7.29374E-2	-8.8002E1	-5.00679E-4	-8.80001E1	-2.6226E-4	5.07832E-3	9.34362E-2	2.7302E1	-3.26621E1	-3.26327E1	2.68238E1	1.69436E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.00705E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80021E1	-5.96046E-4	-8.80002E1	-9.53674E-5	5.07832E-3	9.35316E-2	2.73299E1	-3.26868E1	-3.26567E1	2.68047E1	1.69507E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98419E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80022E1	-6.67572E-4	-8.80002E1	2.14577E-4	5.24521E-3	9.33886E-2	2.73204E1	-3.26779E1	-3.26396E1	2.67902E1	1.69139E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.98764E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80023E1	-5.72205E-4	-8.80002E1	1.19209E-4	5.14984E-3	9.34601E-2	2.72991E1	-3.26855E1	-3.26194E1	2.67945E1	1.69084E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.99227E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80024E1	-5.24521E-4	-8.79998E1	2.14577E-4	5.43594E-3	9.34601E-2	2.73057E1	-3.26663E1	-3.26122E1	2.68029E1	1.69356E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99577E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-6.4373E-4	-8.80003E1	9.53674E-5	5.29289E-3	9.35316E-2	2.73122E1	-3.26608E1	-3.26349E1	2.67881E1	1.69362E-7	2.52026E-3	2.52026E-3	6.3074E-3	2.00171E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.8002E1	-8.34465E-4	-8.80004E1	1.43051E-4	5.17368E-3	9.34601E-2	2.73051E1	-3.26542E1	-3.25948E1	2.68157E1					
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80022E1	-5.48363E-4	-8.80002E1	-1.19209E-4	5.31673E-3	9.30548E-2	2.73252E1	-3.26478E1	-3.2629E1	2.68001E1	1.68981E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.00108E-1
1.3E1	2.9E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.8002E1	-2.6226E-4	-8.80003E1	2.38419E-5	5.45979E-3	9.29117E-2	2.73207E1	-3.26741E1	-3.26308E1	2.68178E1	1.69436E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9883E-1
1.4E1	6.36E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80018E1	-5.00679E-4	-8.80003E1	-2.38419E-4	5.34058E-3	9.32932E-2	2.73279E1	-3.27095E1	-3.26098E1	2.67836E1	1.69286E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.99283E-1
1.5E1	1.09E2	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.8002E1	-3.09944E-4	-8.80002E1	-2.38419E-5	5.22137E-3	9.3174E-2	2.72991E1	-3.26903E1	-3.26651E1	2.67764E1	1.69364E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1
1.6E1	3.17E3	0.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80019E1	-5.48363E-4	-8.80003E1	-2.38419E-5	5.14984E-3	9.35078E-2	2.73063E1	-3.26402E1	-3.26325E1	2.68184E1	1.69286E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00847E-1
1.7E1	3.9713E4	2.0E1	6.87E2	4.7E2	-7.34782E-2	-8.80021E1	-8.10623E-4	-8.79999E1	0.0E0	5.45979E-3	9.34124E-2	2.73742E1	-3.26561E1	-3.2611E1	2.67692E1	1.69213E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
1.8E1	1.72378E5	8.7E1	7.27E2	5.0E2	-7.30146E-2	-8.8002E1	-5.00679E-4	-8.79999E1	1.19209E-4	5.24521E-3	9.3174E-2	2.73165E1	-3.2653E1	-3.2623E1	2.6801E1	1.69066E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98937E-1
1.9E1	3.84E3	9.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80018E1	-7.39098E-4	-8.79999E1	7.15256E-5	5.55515E-3	9.30786E-2	2.73051E1	-3.26638E1	-3.26337E1	2.68233E1	1.6922E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.00192E-1
2.0E1	3.73E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80027E1	-8.34465E-4	-8.79997E1	4.76837E-5	5.17368E-3	9.34839E-2	2.73033E1	-3.26278E1	-3.26434E1	2.68262E1	1.69066E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80023E1	-3.8147E-4	-8.79997E1	-9.53674E-5	5.34058E-3	9.31978E-2	2.72903E1	-3.26885E1	-3.26372E1	2.67914E1	1.69433E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
2.2E1	3.4E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80018E1	-6.67572E-4	-8.80001E1	4.76837E-5	5.4121E-3	9.34124E-2	2.73357E1	-3.27017E1	-3.25876E1	2.68076E1	1.69292E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.98491E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.8002E1	-4.29153E-4	-8.8E1	7.15256E-5	5.31673E-3	9.33409E-2	2.73532E1	-3.26921E1	-3.2617E1	2.67898E1	1.69364E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.97815E-1