[Scan]
initial_time=2016-02-17T20:30:43
final_time=2016-02-17T20:31:02
ip_count=19
run=1032
dataset=6
scan=234
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.80661E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.39863E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.29603E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.492E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.55213E-8
mult1=-8.71694E-9
mult2=-2.65474E-9
rf_tmon=-5.18535E-3
rf_agc=3.27928E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=5.17631E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.27072E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20143E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53377E1
cs_ef1b_imon=3.05411E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02376E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.18118E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05366E0
lens1_imon=1.50267E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.96271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84655E1
cs_ef1a_imon=3.00893E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.71525E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=4.28783E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15648E1
os_ea1_imon=2.2056E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.0694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.27651E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=3.26784E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.22444E-8
tplens_vset=1.4E-1
tplens_vmon=1.59542E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.4779E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26999E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=8.35574E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=2.02226E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7449E1
cs_ef2b_imon=3.11805E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84141E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17887E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.68232E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.66736E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1099E1
os_restr2_imon=3.5337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.28335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.28608E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.08647E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=9.78829E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-1.98379E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.60791E-6
window_vset=0.0E0
window_vmon=1.81196E-1
window_imon=-1.31307E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86251E1
mask2_imon=-5.45035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.18342E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.60296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29039E0
defgridb_imon=6.37644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.57815E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06964E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=1.00594E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62853E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66333E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81271E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76755E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5433E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.1479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.6922E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98592E-1
res40_imon=-2.64409E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3686E4	1.4E1	1.47E2	4.1E1	-7.27053E-2	-8.8002E1	-8.10623E-4	-8.80002E1	-3.33786E-4	5.79357E-3	9.31501E-2	2.73339E1	-3.26801E1	-3.26314E1	2.67884E1	1.69297E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.00399E-1
2.0E0	5.663E3	6.0E0	3.16E2	1.6E2	-7.286E-2	-8.80021E1	-6.67572E-4	-8.80001E1	-1.43051E-4	5.60284E-3	9.3317E-2	2.73051E1	-3.27059E1	-3.26122E1	2.67686E1	1.6936E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98937E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80022E1	-6.91414E-4	-8.80005E1	-1.90735E-4	5.22137E-3	9.30548E-2	2.7324E1	-3.26714E1	-3.26337E1	2.67523E1	1.69433E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98592E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.8002E1	-9.77516E-4	-8.80001E1	4.76837E-5	5.65052E-3	9.31501E-2	2.72862E1	-3.26644E1	-3.2672E1	2.68082E1	1.69436E-7	2.52384E-3	2.52384E-3	6.33977E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.8002E1	-9.53674E-4	-8.80001E1	1.43051E-4	5.6982E-3	9.31501E-2	2.72985E1	-3.26609E1	-3.26026E1	2.6819E1	1.69147E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.97478E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80018E1	-7.86781E-4	-8.80002E1	-2.14577E-4	5.29289E-3	9.33409E-2	2.73357E1	-3.26422E1	-3.26014E1	2.68175E1	1.6936E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80018E1	-1.0252E-3	-8.80002E1	0.0E0	5.29289E-3	9.32455E-2	2.72915E1	-3.26372E1	-3.2616E1	2.68154E1	1.69213E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.98075E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80018E1	-8.82149E-4	-8.79999E1	2.38419E-5	5.67436E-3	9.33409E-2	2.73448E1	-3.26567E1	-3.26266E1	2.67968E1	1.69213E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00499E-1
1.2E1	3.1E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80017E1	-7.39098E-4	-8.8E1	1.90735E-4	5.65052E-3	9.34601E-2	2.72739E1	-3.26903E1	-3.2623E1	2.68028E1	1.69364E-7	2.52169E-3	2.52169E-3	6.34518E-3	2.00705E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80019E1	-7.15256E-4	-8.80002E1	-1.19209E-4	5.67436E-3	9.3174E-2	2.72781E1	-3.26969E1	-3.26567E1	2.67656E1	1.69507E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.9963E-1
1.4E1	6.48E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80023E1	-8.58307E-4	-8.80003E1	2.38419E-5	5.6982E-3	9.31978E-2	2.72943E1	-3.26663E1	-3.2626E1	2.67824E1	1.6936E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98247E-1
1.5E1	1.05E2	2.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80019E1	-8.10623E-4	-8.80002E1	-2.38419E-5	5.8651E-3	9.30786E-2	2.73135E1	-3.26879E1	-3.26446E1	2.6795E1	1.69286E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.9963E-1
1.6E1	3.242E3	4.0E0	6.47E2	4.41E2	-7.30146E-2	-8.8002E1	-7.39098E-4	-8.80003E1	-1.43051E-4	5.88894E-3	9.34124E-2	2.73183E1	-3.26711E1	-3.26338E1	2.68046E1	1.69286E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99456E-1
1.7E1	3.9336E4	1.3E1	6.87E2	4.7E2	-7.32464E-2	-8.80023E1	-7.39098E-4	-8.80005E1	-1.19209E-4	5.79357E-3	9.29594E-2	2.72925E1	-3.26759E1	-3.2635E1	2.6801E1	1.69581E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
1.8E1	1.71463E5	9.1E1	7.27E2	5.0E2	-7.3401E-2	-8.80022E1	-8.10623E-4	-8.80003E1	7.15256E-5	5.34058E-3	9.33647E-2	2.73322E1	-3.26691E1	-3.26183E1	2.68064E1	1.68919E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00151E-1
1.9E1	3.741E3	4.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80025E1	-5.00679E-4	-8.80003E1	-9.53674E-5	5.45979E-3	9.32455E-2	2.73087E1	-3.26729E1	-3.26362E1	2.67943E1	1.69292E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.00876E-1
2.0E1	3.54E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80024E1	-1.90735E-4	-8.80005E1	-4.76837E-5	5.43594E-3	9.34601E-2	2.72889E1	-3.26825E1	-3.26362E1	2.67878E1	1.68992E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80022E1	-7.39098E-4	-8.80002E1	-1.90735E-4	5.76973E-3	9.34124E-2	2.7301E1	-3.26703E1	-3.26183E1	2.6819E1	1.6936E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9963E-1
2.2E1	3.6E1	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80024E1	-4.52995E-4	-8.80003E1	-1.19209E-4	5.76973E-3	9.35078E-2	2.73482E1	-3.26561E1	-3.26142E1	2.68028E1	1.69436E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00192E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80023E1	-6.91414E-4	-8.80004E1	-9.53674E-5	5.76973E-3	9.31025E-2	2.73159E1	-3.26999E1	-3.26164E1	2.68112E1	1.6922E-7	2.5131E-3	2.5131E-3	6.33436E-3	1.9985E-1