[Scan]
initial_time=2016-02-17T20:35:47
final_time=2016-02-17T20:36:06
ip_count=19
run=1032
dataset=7
scan=245
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.19325E-1
ql1_imon=1.43558E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.87027E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=2.66639E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=1.96886E-10
mult1=-9.87283E-9
mult2=-2.73458E-9
rf_tmon=-4.83086E-3
rf_agc=3.27388E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.51608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.72161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=3.03604E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.19576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35694E0
lens1_imon=2.46565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.56742E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.01874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.70961E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.21235E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.28083E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.23354E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.68657E-8
tplens_vset=1.4E-1
tplens_vmon=1.58856E0
tplens_imon=-1.09497E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27023E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.0092E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=2.01732E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8367E0
os_ea2_imon=-8.04039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64698E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10577E1
os_restr2_imon=3.52942E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.27128E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.08453E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.77085E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.53647E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.68202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.54646E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.59022E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6398E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=1.00633E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61585E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65937E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71258E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94408E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.74405E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.69292E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.50302E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.19254E-1	-7.99179E-1	-9.13069E0	-9.14226E0	5.34058E-3	9.32932E-2	2.7334E1	-3.2675E1	-3.26307E1	2.68059E1	1.6936E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00673E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.19349E-1	-7.98774E-1	-9.13093E0	-9.14209E0	5.62668E-3	9.36031E-2	2.73192E1	-3.26438E1	-3.26278E1	2.68045E1	1.69508E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.01219E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.19468E-1	-7.98869E-1	-9.1311E0	-9.14226E0	5.48363E-3	9.32932E-2	2.72992E1	-3.2688E1	-3.26425E1	2.67845E1	1.69281E-7	2.52921E-3	2.52921E-3	6.31299E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.19468E-1	-7.99084E-1	-9.13095E0	-9.14207E0	5.53131E-3	9.31978E-2	2.7318E1	-3.26589E1	-3.26127E1	2.68048E1	1.69364E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.19612E-1	-7.98845E-1	-9.13093E0	-9.14171E0	5.57899E-3	9.32693E-2	2.73267E1	-3.26999E1	-3.26068E1	2.67845E1	1.69343E-7	2.51872E-3	2.51872E-3	6.29416E-3	1.99609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.19826E-1	-7.98893E-1	-9.13095E0	-9.14192E0	5.43594E-3	9.31978E-2	2.73033E1	-3.26554E1	-3.26392E1	2.67998E1	1.69435E-7	2.51755E-3	2.51755E-3	6.3074E-3	2.00516E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.19659E-1	-7.98821E-1	-9.13088E0	-9.14176E0	5.38826E-3	9.32455E-2	2.73375E1	-3.26633E1	-3.26146E1	2.68034E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.19612E-1	-7.98655E-1	-9.13086E0	-9.14178E0	5.67436E-3	9.32455E-2	2.73111E1	-3.26651E1	-3.26224E1	2.68298E1	1.69507E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.19635E-1	-7.98678E-1	-9.13086E0	-9.14187E0	5.24521E-3	9.31501E-2	2.72733E1	-3.26867E1	-3.26002E1	2.6795E1	1.6936E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00499E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.19826E-1	-7.98869E-1	-9.13091E0	-9.14207E0	5.36442E-3	9.33647E-2	2.73281E1	-3.2662E1	-3.26431E1	2.67782E1	1.69286E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99977E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.19516E-1	-7.98702E-1	-9.13086E0	-9.14214E0	5.48363E-3	9.31025E-2	2.73165E1	-3.26801E1	-3.26392E1	2.67788E1	1.69286E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.19421E-1	-7.98464E-1	-9.13093E0	-9.14209E0	5.6982E-3	9.31025E-2	2.73165E1	-3.26837E1	-3.25888E1	2.68088E1	1.69286E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.19755E-1	-7.98082E-1	-9.13105E0	-9.14199E0	5.65052E-3	9.30548E-2	2.72996E1	-3.2686E1	-3.26505E1	2.67944E1	1.6922E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00192E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.19254E-1	-7.98249E-1	-9.13084E0	-9.1418E0	5.62668E-3	9.32932E-2	2.72668E1	-3.26844E1	-3.26349E1	2.67998E1	1.68981E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.00108E-1
1.8E1	8.1E1	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.19421E-1	-7.98512E-1	-9.13088E0	-9.14216E0	5.84126E-3	9.3174E-2	2.73051E1	-3.26549E1	-3.26809E1	2.68209E1	1.6922E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98491E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.19516E-1	-7.98321E-1	-9.13103E0	-9.14166E0	5.62668E-3	9.33409E-2	2.72962E1	-3.26632E1	-3.26148E1	2.67956E1	1.69436E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9883E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.19397E-1	-7.98583E-1	-9.13124E0	-9.14176E0	5.76973E-3	9.31025E-2	2.72949E1	-3.26431E1	-3.26294E1	2.68018E1	1.69147E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.19445E-1	-7.98559E-1	-9.13093E0	-9.14197E0	5.65052E-3	9.33409E-2	2.73113E1	-3.26522E1	-3.26516E1	2.67907E1	1.69439E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.98727E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18968E-1	-7.98512E-1	-9.13091E0	-9.14211E0	5.34058E-3	9.33647E-2	2.73015E1	-3.26549E1	-3.26164E1	2.67787E1	1.69122E-7	2.51725E-3	2.51725E-3	6.33021E-3	2.00425E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19325E-1	-7.98249E-1	-9.13103E0	-9.14211E0	5.60284E-3	9.33647E-2	2.73225E1	-3.27023E1	-3.26092E1	2.67914E1	1.69292E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00534E-1