[Scan]
initial_time=2016-02-17T20:36:14
final_time=2016-02-17T20:36:33
ip_count=19
run=1032
dataset=7
scan=246
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.19135E-1
ql1_imon=1.42257E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.9022E-9
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=2.08482E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=2.54893E-10
mult1=-9.78308E-9
mult2=-2.79185E-9
rf_tmon=-4.69234E-3
rf_agc=3.19582E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.56665E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7088E0
bslens_imon=2.75405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.96865E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05313E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.0537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.01937E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05457E1
cs_ea1_imon=2.19144E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.5702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.57391E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83908E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.71229E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15558E1
os_ea1_imon=2.18495E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.2783E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93186E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=3.25192E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.69452E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.48415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.60023E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.02205E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=2.00722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.7598E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00378E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65299E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.53375E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22982E2
cs_ionfoca_imon=6.32884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.27921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73181E1
iondef1_imon=1.0757E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.08239E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.76203E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.38911E-4
mask2_vset=0.0E0
mask2_vmon=-1.86068E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.7433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20306E0
defgridb_imon=5.86873E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.57437E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64025E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00413E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62144E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86735E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85514E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22544E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.69075E-7
chamber_cvt_pmon=2.52923E-3
foreline_cvt_pmon=2.52923E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36177E-1
res40_imon=-2.83214E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.19516E-1	-7.98464E-1	-9.13072E0	-9.1418E0	5.74589E-3	9.3174E-2	2.73181E1	-3.26608E1	-3.26136E1	2.67792E1	1.69213E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99803E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.19564E-1	-7.98392E-1	-9.1311E0	-9.14233E0	5.26905E-3	9.30548E-2	2.72702E1	-3.26976E1	-3.26787E1	2.6802E1	1.69364E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.19492E-1	-7.98535E-1	-9.13088E0	-9.14185E0	5.48363E-3	9.31263E-2	2.73375E1	-3.26714E1	-3.26307E1	2.68041E1	1.69431E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.19492E-1	-7.98368E-1	-9.13062E0	-9.14199E0	5.38826E-3	9.33409E-2	2.737E1	-3.2662E1	-3.26744E1	2.6819E1	1.69364E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.19421E-1	-7.98678E-1	-9.1306E0	-9.14211E0	5.38826E-3	9.32693E-2	2.73105E1	-3.26272E1	-3.26524E1	2.67854E1	1.69433E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.19302E-1	-7.98726E-1	-9.13062E0	-9.14195E0	5.26905E-3	9.32217E-2	2.72968E1	-3.26938E1	-3.2629E1	2.68286E1	1.69436E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.19206E-1	-7.98726E-1	-9.13079E0	-9.14197E0	5.38826E-3	9.32217E-2	2.73309E1	-3.26609E1	-3.2647E1	2.68094E1	1.69433E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.19278E-1	-7.98655E-1	-9.13062E0	-9.14214E0	5.36442E-3	9.32932E-2	2.72925E1	-3.27107E1	-3.26212E1	2.68292E1	1.69075E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.00363E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.19039E-1	-7.98559E-1	-9.13091E0	-9.14218E0	5.24521E-3	9.29594E-2	2.72986E1	-3.27051E1	-3.26396E1	2.68004E1	1.69433E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.19087E-1	-7.98845E-1	-9.13072E0	-9.14218E0	5.53131E-3	9.28879E-2	2.73008E1	-3.26352E1	-3.26138E1	2.68064E1	1.69433E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18706E-1	-7.98512E-1	-9.13069E0	-9.14233E0	5.19753E-3	9.33886E-2	2.7263E1	-3.26645E1	-3.25978E1	2.67926E1	1.69433E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.18634E-1	-7.98702E-1	-9.13057E0	-9.14199E0	5.65052E-3	9.34124E-2	2.73339E1	-3.26639E1	-3.26849E1	2.6782E1	1.69213E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9963E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.19063E-1	-7.98488E-1	-9.13062E0	-9.14202E0	5.24521E-3	9.29356E-2	2.73147E1	-3.26747E1	-3.2647E1	2.67937E1	1.69131E-7	2.52027E-3	2.52027E-3	6.30182E-3	1.99931E-1
1.7E1	1.3E1	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.19278E-1	-7.9844E-1	-9.13072E0	-9.14195E0	5.55515E-3	9.30548E-2	2.73204E1	-3.26773E1	-3.26579E1	2.6804E1	1.69436E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.99E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.19302E-1	-7.9875E-1	-9.13048E0	-9.14211E0	5.53131E-3	9.31978E-2	2.72873E1	-3.26572E1	-3.26517E1	2.6768E1	1.69508E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9934E-1
1.9E1	3.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.19016E-1	-7.98726E-1	-9.13033E0	-9.14171E0	5.38826E-3	9.32932E-2	2.73201E1	-3.26783E1	-3.26915E1	2.67908E1	1.69206E-7	2.52473E-3	2.52473E-3	6.33538E-3	1.97994E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.19016E-1	-7.98559E-1	-9.13057E0	-9.1419E0	5.60284E-3	9.34601E-2	2.73351E1	-3.26747E1	-3.26416E1	2.68022E1	1.69433E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.97903E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.19302E-1	-7.98464E-1	-9.13055E0	-9.14223E0	5.53131E-3	9.32217E-2	2.73429E1	-3.2647E1	-3.2608E1	2.67956E1	1.69286E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98592E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.19421E-1	-7.98392E-1	-9.13062E0	-9.1419E0	5.34058E-3	9.33647E-2	2.73134E1	-3.27021E1	-3.26266E1	2.68022E1	1.6936E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98592E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.19135E-1	-7.98821E-1	-9.131E0	-9.1419E0	5.74589E-3	9.32217E-2	2.73181E1	-3.26649E1	-3.26408E1	2.68022E1	1.69075E-7	2.52923E-3	2.52923E-3	6.3074E-3	2.00705E-1