[Scan]
initial_time=2016-02-17T20:36:40
final_time=2016-02-17T20:37:00
ip_count=19
run=1032
dataset=7
scan=247
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08709E-4
ql1_vset=
ql1_vmon=-8.18968E-1
ql1_imon=1.41543E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=1.85236E-9
ql3_vset=
ql3_vmon=-9.13069E0
ql3_imon=1.8459E-9
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=2.81942E-10
mult1=-9.49936E-9
mult2=-2.6625E-9
rf_tmon=-5.86625E-3
rf_agc=3.26307E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.54279E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53382E1
cs_ef1b_imon=3.04865E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=2.21233E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37374E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04209E1
cs_ea2_imon=1.55647E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.7116E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.20489E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.26553E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.27354E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.68222E-8
tplens_vset=1.4E-1
tplens_vmon=1.60604E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.97891E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=1.99041E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.19251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.10776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82843E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12664E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62295E-1
os_ef2bup_imon=-5.47024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.53122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.27128E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.08378E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=9.76776E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-2.11495E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-8.7158E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.56757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35536E0
defgridb_imon=6.2561E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.57707E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64094E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=1.00592E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65845E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.00673E-1
chamber_ion_pmon=1.69139E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.43385E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.19039E-1	-7.98559E-1	-9.13093E0	-9.14218E0	5.57899E-3	9.32932E-2	2.73204E1	-3.26644E1	-3.26113E1	2.67833E1	1.69075E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.02251E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.19111E-1	-7.99036E-1	-9.13079E0	-9.14228E0	5.55515E-3	9.30548E-2	2.73082E1	-3.26787E1	-3.25764E1	2.67845E1	1.69508E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00876E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.18706E-1	-7.99036E-1	-9.13055E0	-9.14221E0	5.36442E-3	9.33409E-2	2.72697E1	-3.26472E1	-3.26614E1	2.67896E1	1.69506E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.19087E-1	-7.98941E-1	-9.13088E0	-9.14207E0	5.55515E-3	9.33409E-2	2.73183E1	-3.26819E1	-3.26338E1	2.67879E1	1.69147E-7	2.50882E-3	2.50882E-3	6.3074E-3	2.01391E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.19206E-1	-7.98988E-1	-9.1306E0	-9.14209E0	5.57899E-3	9.30071E-2	2.72862E1	-3.2688E1	-3.26213E1	2.67848E1	1.69507E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.01547E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.19159E-1	-7.98965E-1	-9.13031E0	-9.1419E0	5.74589E-3	9.34362E-2	2.72996E1	-3.26664E1	-3.26597E1	2.67986E1	1.69292E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.01047E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.19039E-1	-7.9906E-1	-9.13064E0	-9.14202E0	5.91278E-3	9.3317E-2	2.7288E1	-3.26921E1	-3.2639E1	2.67776E1	1.69431E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.0153E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18563E-1	-7.98988E-1	-9.1305E0	-9.14209E0	5.67436E-3	9.33409E-2	2.73045E1	-3.26708E1	-3.26313E1	2.68105E1	1.69364E-7	2.51847E-3	2.51847E-3	6.35059E-3	2.00192E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.18801E-1	-7.99179E-1	-9.13117E0	-9.14202E0	5.45979E-3	9.3174E-2	2.73177E1	-3.26543E1	-3.26302E1	2.67704E1	1.69581E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00876E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.18706E-1	-7.98917E-1	-9.1306E0	-9.1424E0	5.72205E-3	9.35078E-2	2.73163E1	-3.27039E1	-3.26301E1	2.67704E1	1.69433E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00325E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.18777E-1	-7.99036E-1	-9.13062E0	-9.14226E0	5.62668E-3	9.3317E-2	2.73027E1	-3.26676E1	-3.26291E1	2.67782E1	1.6922E-7	2.50882E-3	2.50882E-3	6.33436E-3	2.00534E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.1892E-1	-7.98965E-1	-9.13088E0	-9.14199E0	5.4121E-3	9.35316E-2	2.73411E1	-3.26885E1	-3.26638E1	2.68034E1	1.69469E-7	2.51843E-3	2.51843E-3	6.30187E-3	2.00393E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.18706E-1	-7.98941E-1	-9.13105E0	-9.1419E0	5.81741E-3	9.31263E-2	2.73183E1	-3.26777E1	-3.2641E1	2.6816E1	1.69508E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9951E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.19421E-1	-7.9875E-1	-9.13095E0	-9.14168E0	5.74589E-3	9.32455E-2	2.73277E1	-3.26823E1	-3.2596E1	2.68376E1					
1.8E1	9.7E1	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.19468E-1	-7.99012E-1	-9.13148E0	-9.14202E0	5.38826E-3	9.31501E-2	2.73906E1	-3.27186E1	-3.25322E1	2.68022E1	1.69431E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.00463E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.19564E-1	-7.98392E-1	-9.13141E0	-9.14197E0	5.76973E-3	9.3174E-2	2.73261E1	-3.26561E1	-3.2635E1	2.67734E1	1.69286E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.18968E-1	-7.98464E-1	-9.13088E0	-9.1419E0	5.55515E-3	9.3174E-2	2.73099E1	-3.26741E1	-3.26681E1	2.67866E1	1.6922E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00705E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18563E-1	-7.98535E-1	-9.13079E0	-9.14216E0	5.57899E-3	9.29832E-2	2.72933E1	-3.26697E1	-3.26644E1	2.67955E1	1.69433E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.18944E-1	-7.98774E-1	-9.13091E0	-9.14235E0	5.53131E-3	9.33886E-2	2.72997E1	-3.26981E1	-3.26825E1	2.67878E1	1.69364E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.18968E-1	-7.98798E-1	-9.13069E0	-9.14235E0	5.19753E-3	9.34362E-2	2.73375E1	-3.26638E1	-3.26166E1	2.67734E1	1.69139E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00673E-1