[Scan]
initial_time=2016-02-17T20:37:07
final_time=2016-02-17T20:37:26
ip_count=19
run=1032
dataset=7
scan=248
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=1.40934E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.87961E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=1.62752E-9
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=2.80547E-10
mult1=-8.90827E-9
mult2=-2.65662E-9
rf_tmon=-5.97833E-3
rf_agc=3.26602E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=1.55107E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.23494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.0519E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.19685E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37016E0
lens1_imon=2.43321E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.56382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.00757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.71067E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11075E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.19757E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.2455E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.22345E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.68771E-8
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.06933E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30978E0
ionrepsh_imon=1.99317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.19793E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83009E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65299E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10667E1
os_restr2_imon=3.53735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.29254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.07498E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.0827E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.74761E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.4226E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.3894E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=6.22922E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.57274E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63939E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=1.00533E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73837E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.69433E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.53596E-1
res40_imon=-2.9799E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.18586E-1	-7.98821E-1	-9.13072E0	-9.14218E0	5.62668E-3	9.35793E-2	2.73015E1	-3.26777E1	-3.26362E1	2.67746E1	1.69213E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18515E-1	-7.98726E-1	-9.13041E0	-9.14207E0	5.67436E-3	9.34362E-2	2.73351E1	-3.26374E1	-3.26086E1	2.68238E1	1.69507E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.01197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.18706E-1	-7.98607E-1	-9.13055E0	-9.14214E0	5.45979E-3	9.33647E-2	2.72811E1	-3.26494E1	-3.26561E1	2.67896E1	1.69213E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00325E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.18276E-1	-7.98988E-1	-9.13069E0	-9.14218E0	5.55515E-3	9.32932E-2	2.72943E1	-3.26867E1	-3.26128E1	2.67998E1	1.69581E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.18443E-1	-7.98965E-1	-9.13074E0	-9.14221E0	5.6982E-3	9.31501E-2	2.73177E1	-3.27053E1	-3.26278E1	2.68142E1	1.69433E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18491E-1	-7.99155E-1	-9.13081E0	-9.14235E0	5.57899E-3	9.31025E-2	2.73255E1	-3.26729E1	-3.25996E1	2.68208E1	1.69066E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.183E-1	-7.98774E-1	-9.13098E0	-9.14214E0	5.24521E-3	9.3317E-2	2.73123E1	-3.26843E1	-3.26374E1	2.68232E1	1.6936E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18324E-1	-7.98678E-1	-9.13124E0	-9.14233E0	5.45979E-3	9.32693E-2	2.73086E1	-3.26496E1	-3.26626E1	2.67854E1	1.69213E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18419E-1	-7.98988E-1	-9.13115E0	-9.14233E0	5.6982E-3	9.30548E-2	2.73207E1	-3.26645E1	-3.26044E1	2.68046E1	1.69436E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.18348E-1	-7.99203E-1	-9.13107E0	-9.1423E0	5.43594E-3	9.30309E-2	2.73351E1	-3.26543E1	-3.26284E1	2.67788E1	1.69433E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.18253E-1	-7.99108E-1	-9.13072E0	-9.14226E0	5.43594E-3	9.31978E-2	2.73369E1	-3.26909E1	-3.26422E1	2.6792E1	1.69507E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.00325E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18396E-1	-7.99179E-1	-9.13048E0	-9.14211E0	5.36442E-3	9.31978E-2	2.73033E1	-3.265E1	-3.26296E1	2.6804E1	1.6936E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.00151E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18491E-1	-7.98821E-1	-9.13079E0	-9.14228E0	5.10216E-3	9.32455E-2	2.73249E1	-3.26549E1	-3.26609E1	2.68076E1	1.69213E-7	2.51443E-3	2.51443E-3	6.3514E-3	1.99803E-1
1.7E1	1.3E1	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18419E-1	-7.98798E-1	-9.13048E0	-9.14221E0	5.55515E-3	9.33647E-2	2.73363E1	-3.27173E1	-3.25767E1	2.67902E1	1.69213E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00325E-1
1.8E1	7.3E1	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.18324E-1	-7.98655E-1	-9.13069E0	-9.14209E0	5.74589E-3	9.31263E-2	2.74679E1	-3.27306E1	-3.2593E1	2.68028E1	1.68919E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99977E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.1861E-1	-7.98702E-1	-9.13079E0	-9.14195E0	5.57899E-3	9.34839E-2	2.73149E1	-3.26615E1	-3.26229E1	2.67968E1	1.69213E-7	2.52647E-3	2.52647E-3	6.3514E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18515E-1	-7.98774E-1	-9.13069E0	-9.14199E0	5.55515E-3	9.33409E-2	2.73452E1	-3.2662E1	-3.26425E1	2.6786E1	1.69356E-7	2.52362E-3	2.52362E-3	6.31858E-3	1.99048E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18586E-1	-7.98869E-1	-9.13074E0	-9.14173E0	5.60284E-3	9.35316E-2	2.73116E1	-3.26762E1	-3.2659E1	2.67775E1	1.69292E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18706E-1	-7.9875E-1	-9.13091E0	-9.14178E0	5.72205E-3	9.33647E-2	2.73129E1	-3.26711E1	-3.25936E1	2.68047E1	1.69292E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98661E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.18491E-1	-7.98821E-1	-9.13091E0	-9.14159E0	5.76973E-3	9.33409E-2	2.73051E1	-3.26685E1	-3.26178E1	2.68202E1	1.69433E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.9963E-1