[Scan]
initial_time=2016-02-17T20:38:00
final_time=2016-02-17T20:38:20
ip_count=19
run=1032
dataset=7
scan=250
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.17943E-1
ql1_imon=1.39835E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=1.87124E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=1.28506E-9
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=3.40402E-10
mult1=-9.85401E-9
mult2=-2.69386E-9
rf_tmon=-4.82802E-3
rf_agc=3.33858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.5749E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.6813E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20149E1
lens5a_imon=1.99996E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.04144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.21127E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38554E0
lens1_imon=2.79102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0349E1
cs_ea2_imon=1.57948E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.71056E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=4.25598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.20489E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.26093E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.26886E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.68774E-8
tplens_vset=1.4E-1
tplens_vmon=1.57241E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.51825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.02579E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2462E0
ionrepsh_imon=1.97059E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83256E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4848E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=3.53014E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.28641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73428E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67972E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.09134E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.75392E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-2.10774E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.85942E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.29857E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.53736E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.57473E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64244E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=1.00514E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62912E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65606E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69874E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91537E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.00847E-1
chamber_ion_pmon=1.69139E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.65299E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.1811E-1	-7.98249E-1	-9.13064E0	-9.14202E0	5.50747E-3	9.33886E-2	2.73281E1	-3.26732E1	-3.26089E1	2.68354E1	1.69364E-7	2.52276E-3	2.52276E-3	6.33977E-3	1.9917E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18419E-1	-7.98607E-1	-9.13079E0	-9.14223E0	5.72205E-3	9.3627E-2	2.73082E1	-3.26774E1	-3.26548E1	2.68157E1	1.69364E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18229E-1	-7.98416E-1	-9.13074E0	-9.14235E0	6.05583E-3	9.36031E-2	2.7359E1	-3.26295E1	-3.26382E1	2.67804E1	1.69506E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18372E-1	-7.98082E-1	-9.13098E0	-9.14209E0	5.8651E-3	9.35316E-2	2.72895E1	-3.27354E1	-3.26128E1	2.68358E1	1.69226E-7	2.51814E-3	2.51814E-3	6.33919E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.18276E-1	-7.98702E-1	-9.13072E0	-9.1423E0	6.00815E-3	9.3317E-2	2.73039E1	-3.26434E1	-3.26008E1	2.67812E1	1.69433E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1799E-1	-7.98559E-1	-9.13048E0	-9.14221E0	5.81741E-3	9.34839E-2	2.72895E1	-3.2653E1	-3.26512E1	2.68256E1	1.69213E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18133E-1	-7.98702E-1	-9.1305E0	-9.14228E0	5.91278E-3	9.36508E-2	2.73171E1	-3.26296E1	-3.26687E1	2.67926E1	1.69507E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.18133E-1	-7.98821E-1	-9.13093E0	-9.14204E0	5.38826E-3	9.29832E-2	2.72756E1	-3.26596E1	-3.2603E1	2.68053E1	1.69364E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.01219E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.17895E-1	-7.98488E-1	-9.13076E0	-9.14226E0	5.57899E-3	9.31025E-2	2.72803E1	-3.26874E1	-3.26189E1	2.68268E1	1.69286E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00847E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.1799E-1	-7.98631E-1	-9.13053E0	-9.14209E0	5.50747E-3	9.36031E-2	2.73099E1	-3.26975E1	-3.2593E1	2.68418E1	1.69508E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.02079E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1811E-1	-7.98178E-1	-9.1305E0	-9.14226E0	5.50747E-3	9.32455E-2	2.73381E1	-3.26771E1	-3.26404E1	2.6804E1	1.6936E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.01722E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.18038E-1	-7.98416E-1	-9.13062E0	-9.14233E0	5.36442E-3	9.31978E-2	2.73255E1	-3.2644E1	-3.26344E1	2.67944E1	1.69507E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.01197E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17919E-1	-7.98273E-1	-9.13036E0	-9.14209E0	5.43594E-3	9.3317E-2	2.73219E1	-3.26651E1	-3.26897E1	2.67896E1	1.6936E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00847E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18062E-1	-7.98178E-1	-9.1306E0	-9.14202E0	5.79357E-3	9.34124E-2	2.73057E1	-3.26693E1	-3.27029E1	2.67884E1	1.69292E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00705E-1
1.8E1	1.06E2	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.17823E-1	-7.98488E-1	-9.13098E0	-9.14223E0	5.50747E-3	9.33886E-2	2.73558E1	-3.27499E1	-3.27593E1	2.68105E1	1.69131E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.0064E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17919E-1	-7.98559E-1	-9.13095E0	-9.14197E0	5.4121E-3	9.32932E-2	2.73616E1	-3.26536E1	-3.26452E1	2.67962E1	1.69436E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00192E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18205E-1	-7.98702E-1	-9.13105E0	-9.14192E0	5.55515E-3	9.3317E-2	2.73291E1	-3.26897E1	-3.2617E1	2.67794E1	1.69066E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.18467E-1	-7.98583E-1	-9.13095E0	-9.14207E0	5.48363E-3	9.34601E-2	2.7308E1	-3.26531E1	-3.26402E1	2.68154E1	1.69292E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9985E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17847E-1	-7.98845E-1	-9.13098E0	-9.14202E0	5.43594E-3	9.35078E-2	2.7254E1	-3.26867E1	-3.26296E1	2.68208E1	1.69139E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00151E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.17943E-1	-7.98941E-1	-9.13098E0	-9.14226E0	5.65052E-3	9.33647E-2	2.73428E1	-3.26526E1	-3.26443E1	2.67972E1	1.69139E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00847E-1