[Scan]
initial_time=2016-02-17T20:38:27
final_time=2016-02-17T20:38:46
ip_count=19
run=1032
dataset=7
scan=251
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.39585E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.87085E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=1.19138E-9
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=3.42953E-10
mult1=-9.41529E-9
mult2=-2.73458E-9
rf_tmon=-4.16395E-3
rf_agc=3.38743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.56548E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20155E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.03882E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.20454E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41267E0
lens1_imon=2.60343E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64359E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.57771E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.00441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.70989E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.27531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.22011E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.26483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=3.25185E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.69412E-8
tplens_vset=1.4E-1
tplens_vmon=1.55826E0
tplens_imon=-6.17468E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.59541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98608E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.04146E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82725E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11769E0
os_ef2alow_imon=-2.67189E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.84112E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.53057E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23105E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02024E1
cs_anode2_imon=2.27948E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.08644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.07009E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08715E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=9.74858E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09886E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=1.37755E-1
window_imon=-1.16363E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-7.22272E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.47554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.57063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07231E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6408E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=1.005E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62018E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65812E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73673E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89133E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.16117E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22551E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.00847E-1
chamber_ion_pmon=1.69139E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.18082E-1
res40_imon=-2.69969E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17847E-1	-7.99131E-1	-9.13103E0	-9.14199E0	5.79357E-3	9.31263E-2	2.72927E1	-3.26756E1	-3.26284E1	2.68028E1	1.69364E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.9934E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17943E-1	-7.99084E-1	-9.13086E0	-9.14226E0	5.65052E-3	9.3174E-2	2.72871E1	-3.26753E1	-3.26092E1	2.6807E1	1.69368E-7	2.52131E-3	2.52131E-3	6.3074E-3	1.98395E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.17704E-1	-7.98464E-1	-9.13076E0	-9.14214E0	5.55515E-3	9.32932E-2	2.73074E1	-3.26434E1	-3.26388E1	2.68041E1	1.69431E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.17752E-1	-7.98726E-1	-9.13098E0	-9.1419E0	5.98431E-3	9.30309E-2	2.73225E1	-3.26561E1	-3.26356E1	2.68004E1	1.69439E-7	2.52342E-3	2.52342E-3	6.3074E-3	1.99562E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.17513E-1	-7.98678E-1	-9.13091E0	-9.14204E0	6.00815E-3	9.32217E-2	2.73063E1	-3.26805E1	-3.26517E1	2.68232E1	1.6936E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.17585E-1	-7.98988E-1	-9.13095E0	-9.1419E0	5.91278E-3	9.30548E-2	2.73261E1	-3.26969E1	-3.2632E1	2.67984E1	1.69281E-7	2.52473E-3	2.52473E-3	6.29624E-3	1.98872E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.17609E-1	-7.98965E-1	-9.13079E0	-9.14204E0	5.76973E-3	9.30071E-2	2.73213E1	-3.26464E1	-3.26428E1	2.67787E1	1.69286E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17823E-1	-7.98774E-1	-9.13043E0	-9.14176E0	5.6982E-3	9.3317E-2	2.73105E1	-3.2653E1	-3.2638E1	2.68118E1	1.6936E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.1768E-1	-7.98392E-1	-9.13091E0	-9.14183E0	5.84126E-3	9.32217E-2	2.72945E1	-3.26337E1	-3.26366E1	2.6804E1	1.69362E-7	2.51863E-3	2.51863E-3	6.32644E-3	2.00085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.17609E-1	-7.99036E-1	-9.13079E0	-9.14199E0	5.67436E-3	9.35078E-2	2.73009E1	-3.26434E1	-3.26777E1	2.6777E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.18038E-1	-7.98941E-1	-9.13091E0	-9.14192E0	5.57899E-3	9.33409E-2	2.73123E1	-3.26891E1	-3.25906E1	2.67992E1	1.69213E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.18157E-1	-7.98988E-1	-9.13119E0	-9.14171E0	5.55515E-3	9.32217E-2	2.72955E1	-3.26915E1	-3.26482E1	2.67824E1	1.69508E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.97815E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18062E-1	-7.98869E-1	-9.1311E0	-9.14235E0	5.45979E-3	9.33409E-2	2.73399E1	-3.26831E1	-3.26326E1	2.67914E1	1.69206E-7	2.52139E-3	2.52139E-3	6.29624E-3	1.98169E-1
1.7E1	1.5E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.17966E-1	-7.98678E-1	-9.13107E0	-9.14228E0	5.6982E-3	9.3317E-2	2.73544E1	-3.27047E1	-3.26416E1	2.68148E1	1.69139E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.98075E-1
1.8E1	9.0E1	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17919E-1	-7.98702E-1	-9.13093E0	-9.14207E0	5.24521E-3	9.31263E-2	2.74181E1	-3.27738E1	-3.25539E1	2.68106E1	1.69654E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.99803E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17919E-1	-7.98583E-1	-9.13048E0	-9.14192E0	5.45979E-3	9.33886E-2	2.73237E1	-3.2653E1	-3.26074E1	2.6801E1	1.69139E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18062E-1	-7.98678E-1	-9.13095E0	-9.14207E0	5.45979E-3	9.33409E-2	2.73123E1	-3.26741E1	-3.2647E1	2.67601E1	1.6936E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.178E-1	-7.98941E-1	-9.13088E0	-9.14214E0	5.53131E-3	9.29832E-2	2.73016E1	-3.26933E1	-3.26461E1	2.67665E1	1.69292E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00363E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.17776E-1	-7.98678E-1	-9.13112E0	-9.14202E0	5.60284E-3	9.3174E-2	2.72874E1	-3.26272E1	-3.26632E1	2.68034E1	1.69364E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.17823E-1	-7.98583E-1	-9.13084E0	-9.14214E0	5.57899E-3	9.31025E-2	2.73165E1	-3.2653E1	-3.26104E1	2.6813E1	1.69139E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.00847E-1