[Scan]
initial_time=2016-02-17T20:39:47
final_time=2016-02-17T20:40:06
ip_count=19
run=1032
dataset=7
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.17513E-1
ql1_imon=1.39071E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.89036E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=8.98898E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=3.63541E-10
mult1=-9.54774E-9
mult2=-2.6727E-9
rf_tmon=-4.60255E-3
rf_agc=3.2943E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.62009E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20409E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.02451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=2.20153E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.55578E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.57427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.71009E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15582E1
os_ea1_imon=2.20586E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.26677E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93694E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.26777E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.69259E-8
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.55733E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03024E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.04997E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.99497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82468E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.95332E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=3.53807E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02182E1
cs_anode2_imon=2.2738E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.09337E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.09191E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=9.73975E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0953E0
cs_ionaccel_imon=-2.1618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.31847E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.13767E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.56247E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07089E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3094E1
cs_fil1_imon=1.00552E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65916E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72548E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19672E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22662E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.69213E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.59582E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.4E1	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17776E-1	-7.98702E-1	-9.13084E0	-9.14214E0	5.6982E-3	9.32455E-2	2.7321E1	-3.26608E1	-3.26349E1	2.68508E1	1.6936E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.99456E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17919E-1	-7.98726E-1	-9.13129E0	-9.14197E0	5.43594E-3	9.33886E-2	2.73159E1	-3.26687E1	-3.26512E1	2.6783E1	1.6918E-7	2.51809E-3	2.51809E-3	6.31827E-3	1.99999E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.18133E-1	-7.98583E-1	-9.13122E0	-9.14221E0	5.53131E-3	9.30309E-2	2.72837E1	-3.26706E1	-3.26312E1	2.67902E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.178E-1	-7.98869E-1	-9.13122E0	-9.14221E0	5.67436E-3	9.33647E-2	2.73417E1	-3.26422E1	-3.26663E1	2.67824E1	1.69013E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.17704E-1	-7.98726E-1	-9.13126E0	-9.14211E0	5.76973E-3	9.32217E-2	2.73153E1	-3.26735E1	-3.25972E1	2.68082E1	1.69213E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17609E-1	-7.98607E-1	-9.1311E0	-9.14245E0	5.34058E-3	9.29356E-2	2.73291E1	-3.26993E1	-3.26164E1	2.68028E1	1.6936E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17561E-1	-7.99012E-1	-9.13103E0	-9.14211E0	5.60284E-3	9.30071E-2	2.73027E1	-3.26386E1	-3.26308E1	2.6807E1	1.69286E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17728E-1	-7.98869E-1	-9.13129E0	-9.14226E0	5.43594E-3	9.27687E-2	2.73063E1	-3.2647E1	-3.26476E1	2.68202E1	1.69362E-7	2.5208E-3	2.5208E-3	6.32099E-3	2.00948E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17895E-1	-7.98631E-1	-9.13129E0	-9.14199E0	5.4121E-3	9.29594E-2	2.72626E1	-3.26697E1	-3.26219E1	2.6807E1					
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.17776E-1	-7.98559E-1	-9.13126E0	-9.14218E0	5.6982E-3	9.29117E-2	2.73045E1	-3.27263E1	-3.25647E1	2.67926E1	1.6936E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99456E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.178E-1	-7.98655E-1	-9.13117E0	-9.14214E0	5.79357E-3	9.3174E-2	2.73375E1	-3.26422E1	-3.26608E1	2.68001E1	1.69286E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.1749E-1	-7.98821E-1	-9.13126E0	-9.14195E0	5.93662E-3	9.36031E-2	2.73516E1	-3.26413E1	-3.26083E1	2.68207E1	1.69371E-7	2.51886E-3	2.51886E-3	6.30221E-3	2.00105E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.1768E-1	-7.98535E-1	-9.13124E0	-9.14183E0	5.45979E-3	9.33886E-2	2.72793E1	-3.26585E1	-3.26002E1	2.6807E1	1.69199E-7	2.51838E-3	2.51838E-3	6.33592E-3	1.99343E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17442E-1	-7.98416E-1	-9.13093E0	-9.14176E0	5.98431E-3	9.30548E-2	2.72823E1	-3.26819E1	-3.26741E1	2.68022E1	1.69139E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99977E-1
1.8E1	8.3E1	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17418E-1	-7.98488E-1	-9.131E0	-9.1419E0	5.84126E-3	9.30548E-2	2.74E1	-3.27233E1	-3.26386E1	2.68058E1	1.69139E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00325E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17633E-1	-7.98416E-1	-9.13105E0	-9.14183E0	5.62668E-3	9.32693E-2	2.73502E1	-3.26567E1	-3.26681E1	2.67944E1	1.69213E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.01022E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17609E-1	-7.98559E-1	-9.13117E0	-9.1424E0	6.00815E-3	9.3317E-2	2.73165E1	-3.26807E1	-3.26188E1	2.68016E1	1.69292E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9985E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17657E-1	-7.98488E-1	-9.1316E0	-9.14211E0	5.93662E-3	9.33647E-2	2.73607E1	-3.26897E1	-3.26254E1	2.68117E1	1.69213E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.17847E-1	-7.98631E-1	-9.13124E0	-9.14192E0	5.74589E-3	9.3627E-2	2.73381E1	-3.26909E1	-3.26536E1	2.68028E1	1.69508E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98491E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17513E-1	-7.98655E-1	-9.13131E0	-9.14211E0	5.60284E-3	9.36031E-2	2.72979E1	-3.26813E1	-3.26476E1	2.68052E1	1.69213E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.99456E-1