[Scan]
initial_time=2016-02-17T20:40:13
final_time=2016-02-17T20:40:33
ip_count=19
run=1032
dataset=7
scan=255
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.38299E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.85838E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=9.33361E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=3.54218E-10
mult1=-9.88488E-9
mult2=-2.76053E-9
rf_tmon=-4.25407E-3
rf_agc=3.34177E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.55697E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.00937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02474E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.1918E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.84417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64194E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.55588E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.02198E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.70914E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.26283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.19865E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.04649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.25624E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.69377E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.06576E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=2.01479E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75054E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8325E0
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.15101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.07946E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.55645E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02374E1
cs_anode2_imon=2.29182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.07476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.08429E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=9.74872E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07909E0
cs_ionaccel_imon=-2.14378E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56934E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.35812E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39322E-4
mask2_vset=0.0E0
mask2_vmon=-1.86951E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.62795E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.39145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.46572E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=5.89396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.58115E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64044E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=1.00578E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61729E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65737E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82679E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22496E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.69213E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.35245E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.1E1	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.17776E-1	-7.98845E-1	-9.13119E0	-9.14221E0	5.8651E-3	9.36508E-2	2.7326E1	-3.26689E1	-3.26312E1	2.67677E1	1.69292E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00021E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.17871E-1	-7.98631E-1	-9.13122E0	-9.14221E0	5.65052E-3	9.36508E-2	2.73432E1	-3.26472E1	-3.26422E1	2.6797E1	1.69436E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.178E-1	-7.99203E-1	-9.13131E0	-9.14223E0	5.57899E-3	9.31978E-2	2.72912E1	-3.26671E1	-3.26353E1	2.67955E1	1.69281E-7	2.51915E-3	2.51915E-3	6.34661E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.178E-1	-7.98869E-1	-9.13103E0	-9.14202E0	5.60284E-3	9.32455E-2	2.72859E1	-3.26615E1	-3.26224E1	2.68016E1	1.69084E-7	2.51709E-3	2.51709E-3	6.33919E-3	1.98229E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09696E0	-8.17728E-1	-7.98702E-1	-9.13079E0	-9.14226E0	5.50747E-3	9.3174E-2	2.7301E1	-3.2659E1	-3.26107E1	2.67943E1	1.69433E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98419E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.17823E-1	-7.98416E-1	-9.1311E0	-9.14214E0	5.45979E-3	9.34362E-2	2.72751E1	-3.2653E1	-3.2617E1	2.67962E1	1.69213E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17609E-1	-7.98535E-1	-9.13093E0	-9.14209E0	5.31673E-3	9.31025E-2	2.73339E1	-3.26621E1	-3.26362E1	2.68298E1	1.69292E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17704E-1	-7.98607E-1	-9.13134E0	-9.1423E0	5.17368E-3	9.31501E-2	2.73069E1	-3.26676E1	-3.26548E1	2.682E1	1.69431E-7	2.52585E-3	2.52585E-3	6.32978E-3	2.00996E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1749E-1	-7.98512E-1	-9.13105E0	-9.14228E0	5.4121E-3	9.31025E-2	2.72985E1	-3.26212E1	-3.26464E1	2.6801E1	1.6936E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17537E-1	-7.98416E-1	-9.1311E0	-9.1418E0	5.38826E-3	9.34124E-2	2.73086E1	-3.26437E1	-3.26567E1	2.68011E1	1.69433E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17442E-1	-7.98321E-1	-9.13091E0	-9.14173E0	5.34058E-3	9.34362E-2	2.73141E1	-3.26512E1	-3.26645E1	2.67799E1	1.6936E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17561E-1	-7.98297E-1	-9.13112E0	-9.14221E0	5.43594E-3	9.33409E-2	2.73159E1	-3.26813E1	-3.26446E1	2.68088E1	1.69213E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.98419E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.1768E-1	-7.98488E-1	-9.131E0	-9.14178E0	5.4121E-3	9.33886E-2	2.72546E1	-3.26909E1	-3.25803E1	2.68124E1	1.68931E-7	2.51203E-3	2.51203E-3	6.28592E-3	2.00192E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.1768E-1	-7.9875E-1	-9.131E0	-9.14195E0	5.24521E-3	9.35316E-2	2.72937E1	-3.26476E1	-3.26392E1	2.68178E1	1.69433E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
1.8E1	9.4E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17776E-1	-7.98774E-1	-9.13134E0	-9.14192E0	5.19753E-3	9.32932E-2	2.72733E1	-3.26837E1	-3.26849E1	2.67722E1	1.6936E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1768E-1	-7.9844E-1	-9.13131E0	-9.14197E0	5.45979E-3	9.35793E-2	2.73069E1	-3.26675E1	-3.25996E1	2.6852E1	1.69286E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98592E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.17299E-1	-7.98178E-1	-9.13136E0	-9.14216E0	5.34058E-3	9.29594E-2	2.73446E1	-3.26573E1	-3.2629E1	2.68118E1	1.6936E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98247E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17275E-1	-7.98655E-1	-9.13124E0	-9.14226E0	5.53131E-3	9.32217E-2	2.72927E1	-3.26655E1	-3.26101E1	2.67897E1	1.69364E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.97478E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.1768E-1	-7.98893E-1	-9.13119E0	-9.14223E0	5.98431E-3	9.3174E-2	2.73086E1	-3.27033E1	-3.26083E1	2.67998E1	1.69364E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17561E-1	-7.98869E-1	-9.1311E0	-9.14199E0	5.6982E-3	9.32455E-2	2.73153E1	-3.26705E1	-3.26272E1	2.67902E1	1.69213E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.98592E-1