[Scan]
initial_time=2016-02-17T20:43:20
final_time=2016-02-17T20:43:39
ip_count=19
run=1032
dataset=7
scan=262
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08853E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.38388E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.90761E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.84745E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=3.96788E-10
mult1=-9.57182E-9
mult2=-2.78847E-9
rf_tmon=-4.81885E-3
rf_agc=3.34057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.59692E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63613E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2032E1
lens5a_imon=2.01235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04888E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54333E1
cs_ef1b_imon=3.05898E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.21339E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4404E0
lens1_imon=2.63174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64406E1
os_ef1alow_imon=2.95159E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.57806E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=3.00407E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.7144E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.29373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.19463E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.05759E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.27686E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01074E1
cs_anode1_imon=3.24768E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.69682E-8
tplens_vset=1.4E-1
tplens_vmon=1.57831E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98629E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.04438E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=2.00173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33315E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85675E0
os_ea2_imon=-7.55471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.17887E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09337E0
os_ef2alow_imon=-2.92211E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.32186E-1
os_ef2bup_imon=-5.66061E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11251E1
os_restr2_imon=3.55142E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02082E1
cs_anode2_imon=2.26905E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.10797E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.0908E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=9.763E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07975E0
cs_ionaccel_imon=-2.19578E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56504E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=1.47602E-1
window_imon=-1.23313E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82573E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-4.44252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.39579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.28795E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.58331E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08615E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64334E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=1.00559E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61769E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.69286E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.0534E-1
res40_imon=-2.80047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17275E-1	-7.98607E-1	-9.13138E0	-9.14218E0	5.60284E-3	9.36508E-2	2.73057E1	-3.26897E1	-3.26225E1	2.67559E1	1.69436E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9934E-1
2.0E0	5.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17418E-1	-7.98488E-1	-9.1311E0	-9.14228E0	5.65052E-3	9.35078E-2	2.73033E1	-3.26878E1	-3.26119E1	2.67986E1	1.69364E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.99E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17728E-1	-7.98297E-1	-9.13122E0	-9.14202E0	6.05583E-3	9.36747E-2	2.73004E1	-3.26856E1	-3.26579E1	2.6801E1	1.69206E-7	2.52027E-3	2.52027E-3	6.33538E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17204E-1	-7.98702E-1	-9.13107E0	-9.14202E0	5.60284E-3	9.3174E-2	2.73069E1	-3.26661E1	-3.26579E1	2.67931E1	1.69075E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17204E-1	-7.9844E-1	-9.13088E0	-9.14197E0	5.60284E-3	9.34839E-2	2.73574E1	-3.26669E1	-3.26464E1	2.67806E1	1.69364E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.99E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-2.0951E0	-8.17347E-1	-7.98583E-1	-9.13112E0	-9.14195E0	5.50747E-3	9.34124E-2	2.73051E1	-3.26476E1	-3.26416E1	2.6819E1	1.69286E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17561E-1	-7.9813E-1	-9.13115E0	-9.14202E0	5.65052E-3	9.29356E-2	2.73204E1	-3.26703E1	-3.25924E1	2.67884E1	1.6936E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.17537E-1	-7.98297E-1	-9.13134E0	-9.14214E0	5.74589E-3	9.3317E-2	2.72865E1	-3.26675E1	-3.26242E1	2.67872E1	1.69253E-7	2.51484E-3	2.51484E-3	6.32099E-3	2.00171E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17156E-1	-7.98273E-1	-9.13112E0	-9.14233E0	5.34058E-3	9.31025E-2	2.72907E1	-3.26741E1	-3.262E1	2.68094E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.17156E-1	-7.98345E-1	-9.13095E0	-9.14197E0	5.53131E-3	9.30071E-2	2.73141E1	-3.26597E1	-3.25894E1	2.67914E1	1.69286E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99977E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1706E-1	-7.98559E-1	-9.13088E0	-9.14192E0	5.50747E-3	9.29356E-2	2.73016E1	-3.26596E1	-3.26213E1	2.67966E1	1.6936E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.17108E-1	-7.98488E-1	-9.1311E0	-9.1418E0	5.79357E-3	9.30309E-2	2.72853E1	-3.26573E1	-3.26422E1	2.6801E1	1.6922E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.98322E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17132E-1	-7.98392E-1	-9.13107E0	-9.14199E0	5.67436E-3	9.35078E-2	2.73201E1	-3.26476E1	-3.26116E1	2.68142E1	1.69286E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.97045E-1
1.7E1	2.8E1	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.17251E-1	-7.98273E-1	-9.13093E0	-9.1418E0	5.74589E-3	9.37223E-2	2.73249E1	-3.26837E1	-3.26176E1	2.68088E1	1.69139E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.1706E-1	-7.98416E-1	-9.13088E0	-9.14228E0	5.53131E-3	9.35316E-2	2.72886E1	-3.2603E1	-3.26266E1	2.67986E1	1.69213E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.1687E-1	-7.98225E-1	-9.13093E0	-9.14199E0	5.45979E-3	9.33886E-2	2.73267E1	-3.26663E1	-3.26194E1	2.68118E1	1.69364E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.1687E-1	-7.98702E-1	-9.1311E0	-9.14207E0	5.38826E-3	9.30071E-2	2.72955E1	-3.26789E1	-3.26248E1	2.68244E1	1.6936E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16965E-1	-7.98893E-1	-9.13091E0	-9.14221E0	5.76973E-3	9.30548E-2	2.73243E1	-3.265E1	-3.26482E1	2.67884E1	1.69139E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16798E-1	-7.98798E-1	-9.13112E0	-9.14195E0	5.55515E-3	9.3317E-2	2.73375E1	-3.26627E1	-3.25918E1	2.68082E1	1.69286E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99456E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16727E-1	-7.98678E-1	-9.13136E0	-9.14216E0	5.53131E-3	9.34124E-2	2.73189E1	-3.26951E1	-3.2617E1	2.68046E1	1.69286E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98764E-1