[Scan]
initial_time=2016-02-17T20:43:46
final_time=2016-02-17T20:44:06
ip_count=19
run=1032
dataset=7
scan=263
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.36968E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.91115E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=5.6417E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.01044E-10
mult1=-9.49958E-9
mult2=-2.70264E-9
rf_tmon=-5.63597E-3
rf_agc=3.12727E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.58081E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20373E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53106E1
cs_ef1b_imon=3.04541E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.20135E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40677E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=3.00901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.58868E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.71666E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10745E1
os_restr1_imon=4.23508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=2.18507E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.27721E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02488E1
cs_anode1_imon=3.27714E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.69802E-8
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.59895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.06849E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=2.00386E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33953E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.0901E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85439E0
os_ea2_imon=-6.52828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70807E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13445E0
os_ef2alow_imon=-2.2519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10481E1
os_restr2_imon=3.5233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01419E1
cs_anode2_imon=2.28533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.06755E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08899E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.78876E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55678E1
einzel_imon=7.25536E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-1.1599E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.74218E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.58824E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64174E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=1.00697E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62726E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66431E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71141E-2
os_fil2_imon=-2.3356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.3916E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90398E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.81613E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.15753E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22628E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.68919E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.88744E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17108E-1	-7.98821E-1	-9.13107E0	-9.14237E0	5.55515E-3	9.34124E-2	2.72945E1	-3.2652E1	-3.26443E1	2.67692E1	1.69508E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9951E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16774E-1	-7.98488E-1	-9.13136E0	-9.14247E0	5.91278E-3	9.3174E-2	2.72708E1	-3.26603E1	-3.26254E1	2.68022E1	1.6936E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17013E-1	-7.98607E-1	-9.13112E0	-9.1424E0	5.53131E-3	9.31025E-2	2.74072E1	-3.26714E1	-3.26337E1	2.6817E1	1.69131E-7	2.52585E-3	2.52585E-3	6.31858E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.1706E-1	-7.98869E-1	-9.13131E0	-9.14221E0	5.8651E-3	9.33886E-2	2.73305E1	-3.26826E1	-3.25995E1	2.68023E1	1.69368E-7	2.52025E-3	2.52025E-3	6.29157E-3	2.00567E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17275E-1	-7.98512E-1	-9.13119E0	-9.14237E0	5.60284E-3	9.33886E-2	2.73086E1	-3.26555E1	-3.26349E1	2.68124E1	1.69292E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00705E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16989E-1	-7.98726E-1	-9.13134E0	-9.14226E0	5.65052E-3	9.33886E-2	2.72949E1	-3.26627E1	-3.26158E1	2.67914E1	1.69286E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.17084E-1	-7.98774E-1	-9.13117E0	-9.14209E0	5.65052E-3	9.29594E-2	2.73003E1	-3.26651E1	-3.26338E1	2.6801E1	1.69292E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16989E-1	-7.98607E-1	-9.13084E0	-9.14209E0	5.31673E-3	9.31025E-2	2.72973E1	-3.26795E1	-3.26176E1	2.67848E1	1.69056E-7	2.51804E-3	2.51804E-3	6.34661E-3	1.98872E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09696E0	-8.17156E-1	-7.98512E-1	-9.13098E0	-9.14197E0	5.50747E-3	9.30309E-2	2.73605E1	-3.26343E1	-3.26413E1	2.68215E1	1.69066E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09696E0	-8.1718E-1	-7.98845E-1	-9.1316E0	-9.14197E0	5.76973E-3	9.32217E-2	2.73195E1	-3.2635E1	-3.26807E1	2.68052E1	1.69508E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.98322E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17204E-1	-7.98774E-1	-9.13115E0	-9.14199E0	5.98431E-3	9.32693E-2	2.7269E1	-3.26987E1	-3.26146E1	2.68136E1	1.69286E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.17347E-1	-7.98512E-1	-9.13129E0	-9.14199E0	5.98431E-3	9.3317E-2	2.73159E1	-3.26086E1	-3.26825E1	2.68142E1	1.69213E-7	2.52757E-3	2.52757E-3	6.34588E-3	1.97388E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.17513E-1	-7.98893E-1	-9.13115E0	-9.14195E0	6.05583E-3	9.35793E-2	2.72903E1	-3.27222E1	-3.25965E1	2.67758E1	1.6922E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.97815E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.17227E-1	-7.98965E-1	-9.13134E0	-9.14223E0	5.81741E-3	9.33647E-2	2.73333E1	-3.26326E1	-3.26615E1	2.68004E1	1.69139E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.98764E-1
1.8E1	8.8E1	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17251E-1	-7.98583E-1	-9.1316E0	-9.14204E0	5.74589E-3	9.31978E-2	2.73009E1	-3.26549E1	-3.26681E1	2.67998E1	1.69213E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99977E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.1706E-1	-7.98607E-1	-9.13138E0	-9.14185E0	5.43594E-3	9.3174E-2	2.73111E1	-3.26777E1	-3.26633E1	2.67842E1	1.69286E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.17132E-1	-7.98082E-1	-9.1311E0	-9.14183E0	5.62668E-3	9.33886E-2	2.73141E1	-3.26296E1	-3.265E1	2.68058E1	1.6936E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17299E-1	-7.98368E-1	-9.13126E0	-9.14202E0	5.36442E-3	9.32217E-2	2.72945E1	-3.27051E1	-3.26301E1	2.68001E1	1.69286E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.9911E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17084E-1	-7.98583E-1	-9.13098E0	-9.14192E0	5.74589E-3	9.32455E-2	2.72763E1	-3.26536E1	-3.26008E1	2.68106E1	1.69292E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.1706E-1	-7.98416E-1	-9.13084E0	-9.14211E0	5.26905E-3	9.32693E-2	2.72811E1	-3.26777E1	-3.26368E1	2.681E1	1.68919E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.98592E-1