[Scan]
initial_time=2016-02-17T20:45:59
final_time=2016-02-17T20:46:19
ip_count=19
run=1032
dataset=7
scan=268
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08738E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.37693E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.89871E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.19657E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.20856E-10
mult1=-8.97229E-9
mult2=-2.74633E-9
rf_tmon=-4.90115E-3
rf_agc=3.41731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.59897E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61747E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54253E1
cs_ef1b_imon=3.0346E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=2.1954E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42002E0
lens1_imon=2.63509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63942E1
os_ef1alow_imon=2.95387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04105E1
cs_ea2_imon=1.57679E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.71239E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.17449E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.04973E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28935E0
cs_ionrep_imon=1.25415E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01046E1
cs_anode1_imon=3.25011E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.69675E-8
tplens_vset=1.4E-1
tplens_vmon=1.56693E0
tplens_imon=-7.22339E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.60023E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98667E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=4.07419E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=2.01407E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.78323E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7175E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.93305E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.22962E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.5424E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.32416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.10454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.06755E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.09163E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=9.76517E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-2.44651E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5688E1
einzel_imon=7.9221E-6
window_vset=0.0E0
window_vmon=1.61481E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.38843E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-3.92252E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.57387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.24364E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.58284E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07642E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64119E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=1.0052E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62402E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65683E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72548E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88995E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-1.72293E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69433E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.80005E-1
res40_imon=-2.87899E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17013E-1	-7.98416E-1	-9.13103E0	-9.14199E0	5.4121E-3	9.31025E-2	2.73252E1	-3.26844E1	-3.26136E1	2.67734E1	1.6936E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98075E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16989E-1	-7.98321E-1	-9.13124E0	-9.14187E0	5.50747E-3	9.31263E-2	2.73075E1	-3.26524E1	-3.26128E1	2.68004E1	1.69216E-7	2.52243E-3	2.52243E-3	6.31012E-3	1.99827E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16822E-1	-7.98106E-1	-9.13124E0	-9.14187E0	5.50747E-3	9.31501E-2	2.73159E1	-3.26639E1	-3.26585E1	2.68178E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16917E-1	-7.98202E-1	-9.13105E0	-9.14176E0	5.96046E-3	9.31263E-2	2.72787E1	-3.26669E1	-3.26242E1	2.67956E1	1.69003E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16989E-1	-7.98345E-1	-9.13115E0	-9.14199E0	5.74589E-3	9.33647E-2	2.73281E1	-3.26714E1	-3.2606E1	2.67792E1	1.69286E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16917E-1	-7.98202E-1	-9.13134E0	-9.14192E0	5.96046E-3	9.31978E-2	2.73081E1	-3.26597E1	-3.26392E1	2.68052E1	1.69433E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17108E-1	-7.98059E-1	-9.13134E0	-9.14214E0	5.96046E-3	9.29356E-2	2.72618E1	-3.26837E1	-3.25936E1	2.6801E1	1.69364E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.97647E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17108E-1	-7.98202E-1	-9.13122E0	-9.14197E0	5.8651E-3	9.32693E-2	2.72997E1	-3.26711E1	-3.26368E1	2.68184E1	1.69433E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98247E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.1706E-1	-7.9813E-1	-9.13134E0	-9.14168E0	5.55515E-3	9.3317E-2	2.73117E1	-3.26224E1	-3.26314E1	2.67878E1	1.69286E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.1706E-1	-7.97939E-1	-9.13136E0	-9.14178E0	5.38826E-3	9.32932E-2	2.73033E1	-3.26633E1	-3.26194E1	2.68058E1	1.69213E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16846E-1	-7.98082E-1	-9.13122E0	-9.1419E0	5.88894E-3	9.3317E-2	2.73303E1	-3.26699E1	-3.2611E1	2.67884E1	1.69066E-7	2.51116E-3	2.51116E-3	6.34037E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16727E-1	-7.98321E-1	-9.131E0	-9.14218E0	6.00815E-3	9.31978E-2	2.72931E1	-3.26458E1	-3.26518E1	2.68058E1	1.69286E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98592E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16774E-1	-7.98297E-1	-9.13107E0	-9.14228E0	6.00815E-3	9.33409E-2	2.73153E1	-3.26621E1	-3.26242E1	2.68016E1	1.6936E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00499E-1
1.7E1	9.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16584E-1	-7.98178E-1	-9.13131E0	-9.14197E0	5.6982E-3	9.3627E-2	2.73225E1	-3.26494E1	-3.26446E1	2.68064E1	1.69139E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00673E-1
1.8E1	9.7E1	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16751E-1	-7.98249E-1	-9.13119E0	-9.14192E0	5.62668E-3	9.34362E-2	2.73086E1	-3.27152E1	-3.26741E1	2.67804E1	1.69286E-7	2.52318E-3	2.52318E-3	6.3514E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16703E-1	-7.98345E-1	-9.13122E0	-9.1419E0	5.65052E-3	9.3627E-2	2.73207E1	-3.26699E1	-3.26212E1	2.6807E1	1.69297E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.00231E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16774E-1	-7.98297E-1	-9.13115E0	-9.14202E0	5.74589E-3	9.33886E-2	2.72769E1	-3.26993E1	-3.2653E1	2.67896E1	1.69139E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.1687E-1	-7.9813E-1	-9.13119E0	-9.14199E0	5.67436E-3	9.377E-2	2.73291E1	-3.26645E1	-3.2641E1	2.67824E1	1.69131E-7	2.51136E-3	2.51136E-3	6.30182E-3	2.00818E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16989E-1	-7.98368E-1	-9.13143E0	-9.14192E0	5.65052E-3	9.35555E-2	2.73069E1	-3.27051E1	-3.26107E1	2.68022E1	1.6922E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.98491E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16607E-1	-7.98059E-1	-9.13146E0	-9.14183E0	5.48363E-3	9.37223E-2	2.73228E1	-3.26585E1	-3.26474E1	2.68076E1	1.69433E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.99283E-1