[Scan]
initial_time=2016-02-17T20:46:26
final_time=2016-02-17T20:46:45
ip_count=19
run=1032
dataset=7
scan=269
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08699E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.38206E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.8712E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.27179E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=4.06325E-10
mult1=-9.67668E-9
mult2=-2.72718E-9
rf_tmon=-4.71004E-3
rf_agc=3.3197E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.56716E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53991E1
cs_ef1b_imon=3.04334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.19711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34719E0
lens1_imon=2.80163E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64469E1
os_ef1alow_imon=2.95785E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04174E1
cs_ea2_imon=1.57205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84122E1
cs_ef1a_imon=3.01554E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.71115E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=4.28609E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.1964E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.06071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29634E0
cs_ionrep_imon=1.26624E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0152E1
cs_anode1_imon=3.25846E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.68979E-8
tplens_vset=1.4E-1
tplens_vmon=1.60368E0
tplens_imon=-8.65226E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25936E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.08151E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=2.00633E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83138E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7153E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.75182E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.90483E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.54377E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.27044E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72862E1
iondef1_imon=1.07016E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.09198E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09196E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=9.76348E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09307E0
cs_ionaccel_imon=-2.19578E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56706E1
einzel_imon=7.87898E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-1.33392E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82575E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-4.65104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.69664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36422E0
defgridb_imon=5.93401E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.59182E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63953E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30827E1
cs_fil1_imon=1.00564E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62256E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65979E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73859E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91031E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.68992E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.82171E-1
res40_imon=-2.86998E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16512E-1	-7.98392E-1	-9.13119E0	-9.14226E0	5.57899E-3	9.37939E-2	2.72927E1	-3.26585E1	-3.26154E1	2.67902E1	1.69297E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.00735E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16655E-1	-7.9844E-1	-9.13129E0	-9.14207E0	6.10352E-3	9.34124E-2	2.72959E1	-3.26903E1	-3.26205E1	2.67956E1	1.6936E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16679E-1	-7.98249E-1	-9.13138E0	-9.14221E0	5.72205E-3	9.33886E-2	2.73145E1	-3.26791E1	-3.26425E1	2.68028E1	1.69213E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00151E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16584E-1	-7.98512E-1	-9.13093E0	-9.14199E0	5.65052E-3	9.31978E-2	2.7308E1	-3.26472E1	-3.26744E1	2.67931E1	1.69364E-7	2.52599E-3	2.52599E-3	6.32356E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16631E-1	-7.98392E-1	-9.13091E0	-9.14223E0	5.38826E-3	9.30071E-2	2.73216E1	-3.26462E1	-3.26236E1	2.68225E1	1.6936E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16464E-1	-7.98035E-1	-9.13081E0	-9.14233E0	5.72205E-3	9.31025E-2	2.73128E1	-3.26549E1	-3.26496E1	2.68018E1	1.69507E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16464E-1	-7.98154E-1	-9.13086E0	-9.1423E0	5.4121E-3	9.36031E-2	2.73033E1	-3.26272E1	-3.26176E1	2.67866E1	1.69213E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16822E-1	-7.98035E-1	-9.13084E0	-9.14204E0	5.60284E-3	9.3174E-2	2.73204E1	-3.26779E1	-3.26443E1	2.67674E1	1.6922E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9883E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16774E-1	-7.98202E-1	-9.13093E0	-9.14187E0	5.60284E-3	9.33647E-2	2.72799E1	-3.26278E1	-3.26627E1	2.68256E1	1.69286E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16703E-1	-7.98512E-1	-9.13091E0	-9.14202E0	5.43594E-3	9.32217E-2	2.73253E1	-3.26591E1	-3.26646E1	2.68058E1	1.6936E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00151E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16846E-1	-7.98273E-1	-9.13122E0	-9.14223E0	5.84126E-3	9.31263E-2	2.72949E1	-3.26807E1	-3.26687E1	2.67842E1	1.6936E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16464E-1	-7.98392E-1	-9.13112E0	-9.14192E0	5.6982E-3	9.31263E-2	2.73429E1	-3.26639E1	-3.26404E1	2.67547E1	1.69286E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16488E-1	-7.9844E-1	-9.13136E0	-9.14183E0	5.6982E-3	9.32455E-2	2.73075E1	-3.26201E1	-3.26166E1	2.67692E1	1.6936E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99803E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16488E-1	-7.98607E-1	-9.13103E0	-9.14209E0	5.74589E-3	9.31978E-2	2.73033E1	-3.265E1	-3.26735E1	2.67998E1	1.69364E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00534E-1
1.8E1	7.0E1	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.16488E-1	-7.9844E-1	-9.13115E0	-9.14209E0	5.65052E-3	9.34362E-2	2.73309E1	-3.27005E1	-3.27083E1	2.68111E1	1.69206E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.0064E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.16584E-1	-7.98416E-1	-9.13129E0	-9.14207E0	5.79357E-3	9.32932E-2	2.73063E1	-3.26879E1	-3.2644E1	2.67972E1	1.69436E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00021E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.1656E-1	-7.98249E-1	-9.13174E0	-9.14204E0	5.53131E-3	9.32932E-2	2.73231E1	-3.26368E1	-3.265E1	2.67978E1	1.69286E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16584E-1	-7.98821E-1	-9.13148E0	-9.14187E0	5.60284E-3	9.34124E-2	2.72998E1	-3.26555E1	-3.26189E1	2.68128E1	1.69286E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00151E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16679E-1	-7.9844E-1	-9.13095E0	-9.14178E0	5.43594E-3	9.33647E-2	2.73333E1	-3.26873E1	-3.2608E1	2.68094E1	1.69364E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16822E-1	-7.98583E-1	-9.13141E0	-9.14173E0	5.79357E-3	9.32932E-2	2.72862E1	-3.26655E1	-3.25936E1	2.68064E1	1.68992E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1