[Scan]
initial_time=2016-02-17T20:48:39
final_time=2016-02-17T20:48:59
ip_count=19
run=1032
dataset=7
scan=274
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08737E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.36768E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.92543E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=4.47464E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.15146E-10
mult1=-9.921E-9
mult2=-2.7745E-9
rf_tmon=-4.36823E-3
rf_agc=3.27328E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.60694E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62315E0
bslens_imon=2.67068E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=3.02703E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.20277E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39557E0
lens1_imon=2.7627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64206E1
os_ef1alow_imon=2.9463E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04133E1
cs_ea2_imon=1.577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83842E1
cs_ef1a_imon=3.0191E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.71199E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11736E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15541E1
os_ea1_imon=2.18932E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.04181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=1.26341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01533E1
cs_anode1_imon=3.24255E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.69964E-8
tplens_vset=1.4E-1
tplens_vmon=1.59837E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27161E1
iondef2_imon=1.59612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.04642E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29988E0
ionrepsh_imon=2.00173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75042E1
cs_ef2b_imon=3.14812E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81958E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02272E0
os_ef2alow_imon=-2.94026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.16955E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.55681E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02332E1
cs_anode2_imon=2.27128E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.08679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68911E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.09235E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=9.74463E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06407E0
cs_ionaccel_imon=-2.37443E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56862E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82577E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-3.27381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.68437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23724E0
defgridb_imon=5.76058E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.58974E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63633E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.00511E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61675E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65317E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.89422E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.31022E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22362E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.6936E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.10328E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16798E-1	-7.98512E-1	-9.13122E0	-9.14192E0	5.10216E-3	9.3174E-2	2.73216E1	-3.26862E1	-3.26301E1	2.67526E1	1.69075E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.99E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16703E-1	-7.98345E-1	-9.1311E0	-9.14223E0	5.55515E-3	9.34362E-2	2.7334E1	-3.26757E1	-3.25951E1	2.68107E1	1.69364E-7	2.51525E-3	2.51525E-3	6.33977E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16846E-1	-7.98297E-1	-9.13117E0	-9.14199E0	5.50747E-3	9.31978E-2	2.72854E1	-3.26492E1	-3.26046E1	2.68036E1	1.6927E-7	2.52051E-3	2.52051E-3	6.32129E-3	1.99624E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.1687E-1	-7.98559E-1	-9.13103E0	-9.14223E0	5.57899E-3	9.30309E-2	2.73424E1	-3.26627E1	-3.2617E1	2.681E1	1.69226E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16655E-1	-7.98345E-1	-9.13093E0	-9.14235E0	5.43594E-3	9.31501E-2	2.73265E1	-3.26517E1	-3.26511E1	2.67986E1	1.6936E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16298E-1	-7.98512E-1	-9.13124E0	-9.14214E0	5.76973E-3	9.34124E-2	2.72985E1	-3.26663E1	-3.26332E1	2.68045E1	1.69286E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16536E-1	-7.97939E-1	-9.13124E0	-9.14226E0	5.62668E-3	9.32455E-2	2.73321E1	-3.26723E1	-3.2623E1	2.68106E1	1.69206E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.98696E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16607E-1	-7.98059E-1	-9.1315E0	-9.14211E0	5.67436E-3	9.35316E-2	2.73079E1	-3.26767E1	-3.26363E1	2.67976E1	1.69433E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
1.2E1	0.0E0	1.0E0	4.85E2	3.23E2	-2.0951E0	-8.16321E-1	-7.98345E-1	-9.13162E0	-9.14202E0	5.34058E-3	9.33409E-2	2.72861E1	-3.26585E1	-3.26266E1	2.68157E1	1.69371E-7	2.52301E-3	2.52301E-3	6.33341E-3	1.98792E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16751E-1	-7.98202E-1	-9.13131E0	-9.14204E0	5.72205E-3	9.31978E-2	2.72877E1	-3.26705E1	-3.26044E1	2.68106E1	1.69428E-7	2.51952E-3	2.51952E-3	6.28468E-3	1.99343E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16631E-1	-7.98559E-1	-9.13157E0	-9.14226E0	5.72205E-3	9.3174E-2	2.73273E1	-3.27191E1	-3.2644E1	2.68148E1	1.69147E-7	2.5131E-3	2.5131E-3	6.29128E-3	1.98153E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16584E-1	-7.98416E-1	-9.13162E0	-9.14228E0	5.38826E-3	9.31263E-2	2.73369E1	-3.26952E1	-3.26242E1	2.68088E1	1.69213E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16655E-1	-7.98321E-1	-9.13169E0	-9.1423E0	5.60284E-3	9.31978E-2	2.73093E1	-3.26344E1	-3.26122E1	2.67866E1	1.69281E-7	2.51915E-3	2.51915E-3	6.34099E-3	1.99577E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16369E-1	-7.98488E-1	-9.13134E0	-9.14216E0	5.17368E-3	9.2864E-2	2.73193E1	-3.26614E1	-3.26313E1	2.68004E1	1.69213E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99283E-1
1.8E1	1.04E2	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16631E-1	-7.98273E-1	-9.1316E0	-9.14214E0	5.24521E-3	9.29117E-2	2.7227E1	-3.25689E1	-3.26368E1	2.68124E1	1.69003E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.98661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16441E-1	-7.98464E-1	-9.13124E0	-9.14235E0	5.62668E-3	9.32217E-2	2.73039E1	-3.26609E1	-3.26314E1	2.6798E1	1.69139E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16488E-1	-7.98512E-1	-9.13143E0	-9.14223E0	5.31673E-3	9.32932E-2	2.73021E1	-3.26945E1	-3.26573E1	2.68111E1	1.6936E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16536E-1	-7.9844E-1	-9.13141E0	-9.14195E0	5.74589E-3	9.31025E-2	2.73316E1	-3.26732E1	-3.26284E1	2.68076E1	1.6936E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16679E-1	-7.98392E-1	-9.13136E0	-9.1419E0	5.65052E-3	9.32693E-2	2.73081E1	-3.26639E1	-3.2641E1	2.68004E1	1.6922E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.1687E-1	-7.98154E-1	-9.13141E0	-9.1419E0	5.26905E-3	9.29356E-2	2.73129E1	-3.27161E1	-3.26248E1	2.68911E1	1.6936E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98419E-1