[Scan]
initial_time=2016-02-17T20:50:26
final_time=2016-02-17T20:50:45
ip_count=19
run=1032
dataset=7
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37302E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.97284E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=3.97313E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.7574E-10
mult1=-1.01377E-8
mult2=-2.78049E-9
rf_tmon=-4.67465E-3
rf_agc=3.33756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=1.57069E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68687E0
bslens_imon=2.66059E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1989E1
lens5a_imon=1.98721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=3.07424E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02007E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04511E1
cs_ea1_imon=2.21347E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40317E0
lens1_imon=2.71569E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.94486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.56445E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=2.99351E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.71029E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15679E1
os_ea1_imon=2.18959E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64116E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24108E0
cs_ionrep_imon=1.25813E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.9335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01629E1
cs_anode1_imon=3.21588E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.68761E-8
tplens_vset=1.4E-1
tplens_vmon=1.59797E0
tplens_imon=-2.26363E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.49504E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.57988E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98302E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=4.10317E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28944E0
ionrepsh_imon=2.02872E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33358E1
lens5b_imon=2.16756E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83243E0
os_ea2_imon=-5.71622E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06177E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.093E0
os_ef2alow_imon=-2.92224E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.10348E-1
os_ef2bup_imon=-5.5207E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.52618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.31985E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.2565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.0888E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09371E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.72671E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0929E0
cs_ionaccel_imon=-2.32037E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02025E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56681E1
einzel_imon=7.99418E-6
window_vset=0.0E0
window_vmon=1.50069E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8256E2
mask1_imon=2.38753E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.47586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.5466E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.19304E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.333E1
os_fil1_imon=9.57977E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06975E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=1.00543E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65579E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.74008E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.24573E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-1.9692E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22354E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.6936E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.98645E-1
res40_imon=-2.84655E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16751E-1	-7.9813E-1	-9.13107E0	-9.14192E0	5.62668E-3	9.33409E-2	2.73086E1	-3.26726E1	-3.26384E1	2.67932E1	1.69131E-7	2.53033E-3	2.53033E-3	6.32418E-3	2.00108E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.1656E-1	-7.98368E-1	-9.13088E0	-9.14223E0	5.96046E-3	9.32217E-2	2.72949E1	-3.26755E1	-3.26619E1	2.68054E1	1.69292E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16917E-1	-7.98488E-1	-9.13081E0	-9.14214E0	5.76973E-3	9.31978E-2	2.72939E1	-3.26856E1	-3.26431E1	2.68118E1	1.69238E-7	2.52262E-3	2.52262E-3	6.34835E-3	2.00307E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16512E-1	-7.98082E-1	-9.13098E0	-9.14173E0	5.6982E-3	9.30786E-2	2.72684E1	-3.26422E1	-3.26224E1	2.68128E1	1.69139E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.16727E-1	-7.98178E-1	-9.13117E0	-9.14209E0	5.74589E-3	9.31263E-2	2.72679E1	-3.26667E1	-3.26756E1	2.67986E1	1.69292E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98322E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.16679E-1	-7.98178E-1	-9.13129E0	-9.14192E0	5.48363E-3	9.32217E-2	2.73281E1	-3.26933E1	-3.26449E1	2.68064E1	1.69213E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16751E-1	-7.98059E-1	-9.13093E0	-9.14166E0	5.6982E-3	9.31978E-2	2.73033E1	-3.2632E1	-3.26518E1	2.67854E1	1.69292E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.1656E-1	-7.98225E-1	-9.13134E0	-9.14211E0	5.88894E-3	9.31501E-2	2.72955E1	-3.26789E1	-3.26074E1	2.68112E1	1.6936E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16536E-1	-7.98178E-1	-9.13098E0	-9.14221E0	5.8651E-3	9.31263E-2	2.73015E1	-3.26536E1	-3.26194E1	2.68178E1	1.6936E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16512E-1	-7.98392E-1	-9.13115E0	-9.14195E0	5.88894E-3	9.31501E-2	2.73393E1	-3.26464E1	-3.2626E1	2.67734E1	1.69286E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98419E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1656E-1	-7.98035E-1	-9.13105E0	-9.14195E0	5.65052E-3	9.30548E-2	2.73532E1	-3.26753E1	-3.26404E1	2.67938E1	1.69323E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98851E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16679E-1	-7.98035E-1	-9.13112E0	-9.14207E0	5.17368E-3	9.34362E-2	2.73393E1	-3.26482E1	-3.26296E1	2.68123E1					
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16679E-1	-7.97987E-1	-9.13119E0	-9.14209E0	5.55515E-3	9.30548E-2	2.73057E1	-3.26903E1	-3.26148E1	2.68088E1	1.69147E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00534E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16822E-1	-7.98059E-1	-9.13098E0	-9.14249E0	5.6982E-3	9.28164E-2	2.73496E1	-3.26741E1	-3.26681E1	2.68268E1	1.69507E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.00499E-1
1.8E1	1.06E2	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16488E-1	-7.98392E-1	-9.13105E0	-9.14209E0	5.91278E-3	9.32932E-2	2.72276E1	-3.2587E1	-3.26867E1	2.67878E1	1.69508E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00876E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16441E-1	-7.98297E-1	-9.13136E0	-9.14211E0	5.55515E-3	9.32932E-2	2.72943E1	-3.26633E1	-3.26332E1	2.678E1	1.69433E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98764E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.16512E-1	-7.98416E-1	-9.13129E0	-9.14223E0	5.8651E-3	9.32455E-2	2.73123E1	-3.26597E1	-3.26633E1	2.67878E1	1.69433E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16369E-1	-7.9813E-1	-9.13141E0	-9.14207E0	5.74589E-3	9.33886E-2	2.73033E1	-3.26773E1	-3.26508E1	2.68196E1	1.69507E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.16703E-1	-7.98011E-1	-9.13141E0	-9.14214E0	5.48363E-3	9.30309E-2	2.73075E1	-3.26579E1	-3.26296E1	2.68128E1	1.6922E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16679E-1	-7.98392E-1	-9.13122E0	-9.14199E0	5.84126E-3	9.28164E-2	2.72787E1	-3.26735E1	-3.26434E1	2.6801E1	1.6936E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00325E-1