[Scan]
initial_time=2016-02-17T20:50:52
final_time=2016-02-17T20:51:12
ip_count=19
run=1032
dataset=7
scan=279
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.37097E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.90078E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.74083E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=4.02904E-10
mult1=-9.78308E-9
mult2=-2.79773E-9
rf_tmon=-4.9578E-3
rf_agc=3.38577E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.63009E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68871E0
bslens_imon=2.48796E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.97105E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53668E1
cs_ef1b_imon=3.03267E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04896E1
cs_ea1_imon=2.20796E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36093E0
lens1_imon=2.63488E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64384E1
os_ef1alow_imon=2.98027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.041E1
cs_ea2_imon=1.57915E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84201E1
cs_ef1a_imon=3.01246E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.70955E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11647E1
os_restr1_imon=4.27558E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1503E1
os_ea1_imon=2.22045E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6366E1
os_ef1bup_imon=3.06149E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29128E0
cs_ionrep_imon=1.25629E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01834E1
cs_anode1_imon=3.24974E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.6862E-8
tplens_vset=1.4E-1
tplens_vmon=1.63041E0
tplens_imon=-2.04325E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26413E1
iondef2_imon=1.58172E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98493E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.02884E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27781E0
ionrepsh_imon=2.0155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33872E1
lens5b_imon=2.1929E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74676E1
cs_ef2b_imon=3.11763E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85691E0
os_ea2_imon=-6.45081E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7117E1
cs_ef2a_imon=3.17377E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08637E0
os_ef2alow_imon=-2.72776E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.90573E-1
os_ef2bup_imon=-5.26897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10824E1
os_restr2_imon=3.54877E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.30259E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01984E1
cs_anode2_imon=2.27892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73163E1
iondef1_imon=1.09615E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.08428E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09216E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=9.73291E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10457E0
cs_ionaccel_imon=-2.01667E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56605E1
einzel_imon=7.69532E-6
window_vset=0.0E0
window_vmon=1.69567E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39339E-4
mask2_vset=0.0E0
mask2_vmon=-1.86307E1
mask2_imon=-6.24431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.92763E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.92124E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.15264E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42806E0
defgridb_imon=6.18297E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.56124E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07254E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63616E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=1.00506E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65511E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83206E-2
os_fil2_imon=-2.68745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.12884E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.38805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12998E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22354E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.69286E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.85157E-1
res40_imon=-2.64542E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16393E-1	-7.97844E-1	-9.13091E0	-9.14199E0	5.26905E-3	9.32932E-2	2.72915E1	-3.26644E1	-3.26018E1	2.6836E1	1.69506E-7	2.51915E-3	2.51915E-3	6.29624E-3	1.99931E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16417E-1	-7.98273E-1	-9.13122E0	-9.14211E0	5.45979E-3	9.31025E-2	2.73351E1	-3.2678E1	-3.2678E1	2.67895E1	1.6922E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.00705E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16512E-1	-7.9844E-1	-9.13146E0	-9.14245E0	5.79357E-3	9.33409E-2	2.72809E1	-3.26838E1	-3.26526E1	2.67926E1	1.69206E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09742E0	-8.1656E-1	-7.98154E-1	-9.13115E0	-9.14199E0	5.84126E-3	9.30786E-2	2.72763E1	-3.26615E1	-3.26206E1	2.68124E1	1.69292E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.16441E-1	-7.98392E-1	-9.13095E0	-9.14199E0	5.55515E-3	9.30309E-2	2.72925E1	-3.26627E1	-3.26482E1	2.68106E1	1.69507E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.99456E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16321E-1	-7.97868E-1	-9.13115E0	-9.14197E0	5.84126E-3	9.32932E-2	2.73135E1	-3.26428E1	-3.25966E1	2.68112E1	1.69292E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00705E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09673E0	-8.16607E-1	-7.98535E-1	-9.13138E0	-9.14187E0	5.79357E-3	9.31025E-2	2.73144E1	-3.26776E1	-3.2593E1	2.67995E1	1.69213E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0968E0	-8.16464E-1	-7.98249E-1	-9.13124E0	-9.14195E0	5.43594E-3	9.31025E-2	2.73105E1	-3.26777E1	-3.26068E1	2.6813E1	1.6922E-7	2.52599E-3	2.52599E-3	6.3074E-3	2.00363E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.16679E-1	-7.97939E-1	-9.13095E0	-9.14207E0	5.81741E-3	9.32693E-2	2.72829E1	-3.26771E1	-3.26224E1	2.67962E1	1.69286E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.97731E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.16774E-1	-7.9844E-1	-9.131E0	-9.14166E0	5.60284E-3	9.35078E-2	2.73311E1	-3.26779E1	-3.26413E1	2.68111E1	1.69147E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.97815E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16679E-1	-7.98273E-1	-9.13146E0	-9.14152E0	5.88894E-3	9.34839E-2	2.72786E1	-3.26767E1	-3.26154E1	2.68136E1	1.69364E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.98661E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16989E-1	-7.98464E-1	-9.13134E0	-9.14185E0	5.67436E-3	9.30786E-2	2.7325E1	-3.2655E1	-3.26158E1	2.67902E1	1.69066E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00847E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.1687E-1	-7.98607E-1	-9.13115E0	-9.1418E0	5.72205E-3	9.29356E-2	2.73159E1	-3.26561E1	-3.26573E1	2.68076E1	1.69093E-7	2.50955E-3	2.50955E-3	6.323E-3	2.0027E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16751E-1	-7.98321E-1	-9.13112E0	-9.14161E0	5.62668E-3	9.31025E-2	2.73352E1	-3.27068E1	-3.26095E1	2.67992E1	1.69364E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.01047E-1
1.8E1	9.0E1	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16512E-1	-7.98392E-1	-9.13124E0	-9.14168E0	5.72205E-3	9.32932E-2	2.72479E1	-3.26219E1	-3.26856E1	2.68214E1	1.6922E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9883E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16631E-1	-7.98535E-1	-9.13146E0	-9.1419E0	5.74589E-3	9.33886E-2	2.72815E1	-3.2652E1	-3.25971E1	2.67885E1	1.69507E-7	2.52867E-3	2.52867E-3	6.31288E-3	1.98419E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16536E-1	-7.9844E-1	-9.13129E0	-9.1419E0	5.65052E-3	9.35316E-2	2.72744E1	-3.26718E1	-3.26347E1	2.68204E1	1.6922E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9968E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16512E-1	-7.98225E-1	-9.13129E0	-9.14183E0	5.55515E-3	9.34362E-2	2.73051E1	-3.26825E1	-3.26356E1	2.67944E1	1.69084E-7	2.51814E-3	2.51814E-3	6.33919E-3	2.00399E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16965E-1	-7.9844E-1	-9.13146E0	-9.14195E0	5.53131E-3	9.32932E-2	2.72678E1	-3.26813E1	-3.25984E1	2.68232E1	1.69213E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00673E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16631E-1	-7.98535E-1	-9.13136E0	-9.14204E0	5.79357E-3	9.30786E-2	2.73163E1	-3.26413E1	-3.25894E1	2.6789E1	1.69286E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.00325E-1