[Scan]
initial_time=2016-02-17T20:51:19
final_time=2016-02-17T20:51:38
ip_count=19
run=1032
dataset=7
scan=280
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.36967E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.90384E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=4.14097E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=4.08196E-10
mult1=-9.99324E-9
mult2=-2.72859E-9
rf_tmon=-7.17408E-3
rf_agc=3.16873E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.55499E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53916E1
cs_ef1b_imon=3.05272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05543E1
cs_ea1_imon=2.21622E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37197E0
lens1_imon=2.46893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64967E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.55541E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.01171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.70868E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=4.27114E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15724E1
os_ea1_imon=2.1918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63931E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.26377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=3.23795E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.68317E-8
tplens_vset=1.4E-1
tplens_vmon=1.59719E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.56957E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98618E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.05785E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=2.00173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.16384E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.77475E0
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71513E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09974E0
os_ef2alow_imon=-2.7692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.07281E-1
os_ef2bup_imon=-5.51812E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.52257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.25793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.07795E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08649E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.73154E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10813E0
cs_ionaccel_imon=-2.21316E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.47115E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=1.4123E-1
window_imon=-1.01767E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82578E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.86141E1
mask2_imon=-5.06807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.56568E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.57619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08204E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63653E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=1.00447E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62436E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65378E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88869E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91411E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.00889E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.16117E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22457E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00876E-1
chamber_ion_pmon=1.69003E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.71707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.8E1	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16512E-1	-7.98202E-1	-9.13141E0	-9.14209E0	5.76973E-3	9.33409E-2	2.73333E1	-3.26813E1	-3.2638E1	2.67818E1	1.69292E-7	2.52815E-3	2.52815E-3	6.3074E-3	2.00534E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16751E-1	-7.98178E-1	-9.13103E0	-9.14211E0	5.79357E-3	9.33409E-2	2.73075E1	-3.26744E1	-3.26456E1	2.68038E1	1.69433E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.98419E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.16774E-1	-7.98345E-1	-9.1311E0	-9.14195E0	5.79357E-3	9.32217E-2	2.73322E1	-3.2659E1	-3.26649E1	2.68117E1	1.69281E-7	2.52139E-3	2.52139E-3	6.32418E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.1687E-1	-7.98273E-1	-9.13124E0	-9.14214E0	5.43594E-3	9.29832E-2	2.72957E1	-3.26644E1	-3.26514E1	2.67998E1	1.69155E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.00735E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16584E-1	-7.98345E-1	-9.13105E0	-9.14209E0	6.00815E-3	9.31501E-2	2.73345E1	-3.26843E1	-3.26344E1	2.67607E1	1.69213E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16631E-1	-7.97844E-1	-9.13119E0	-9.14214E0	5.98431E-3	9.31978E-2	2.72859E1	-3.26933E1	-3.26621E1	2.6819E1	1.69436E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.01219E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16441E-1	-7.98321E-1	-9.13126E0	-9.14254E0	5.98431E-3	9.32217E-2	2.73345E1	-3.26669E1	-3.26086E1	2.67613E1	1.69433E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16488E-1	-7.98488E-1	-9.13177E0	-9.14211E0	5.50747E-3	9.32932E-2	2.73122E1	-3.27021E1	-3.26154E1	2.67649E1	1.69286E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00499E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16321E-1	-7.98368E-1	-9.13138E0	-9.14218E0	5.81741E-3	9.33647E-2	2.72943E1	-3.26512E1	-3.2614E1	2.67992E1	1.69139E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16464E-1	-7.98297E-1	-9.13143E0	-9.14195E0	5.81741E-3	9.33409E-2	2.73057E1	-3.26903E1	-3.2638E1	2.68172E1	1.69507E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16727E-1	-7.97987E-1	-9.13122E0	-9.14183E0	5.6982E-3	9.3174E-2	2.72895E1	-3.26693E1	-3.26543E1	2.68112E1	1.6936E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.16751E-1	-7.98082E-1	-9.1311E0	-9.14209E0	5.98431E-3	9.30071E-2	2.72977E1	-3.26556E1	-3.26522E1	2.68024E1	1.69292E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9951E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.16655E-1	-7.98345E-1	-9.13124E0	-9.14221E0	5.60284E-3	9.3174E-2	2.73117E1	-3.2638E1	-3.25918E1	2.68053E1	1.69302E-7	2.51783E-3	2.51783E-3	6.29185E-3	1.98955E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16798E-1	-7.98297E-1	-9.13138E0	-9.14187E0	5.96046E-3	9.29832E-2	2.73027E1	-3.2659E1	-3.26378E1	2.68148E1	1.69507E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.98764E-1
1.8E1	8.8E1	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16584E-1	-7.98345E-1	-9.13115E0	-9.14183E0	5.98431E-3	9.29832E-2	2.73039E1	-3.27185E1	-3.26951E1	2.68148E1	1.6922E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9951E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.16345E-1	-7.98297E-1	-9.13117E0	-9.14187E0	5.93662E-3	9.2864E-2	2.73352E1	-3.26514E1	-3.26219E1	2.68232E1	1.6936E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.9911E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.1625E-1	-7.98297E-1	-9.13119E0	-9.14199E0	5.6982E-3	9.33409E-2	2.7324E1	-3.26868E1	-3.26107E1	2.67804E1	1.69292E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.01562E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16393E-1	-7.98273E-1	-9.13122E0	-9.1419E0	5.74589E-3	9.30071E-2	2.72987E1	-3.2659E1	-3.26231E1	2.68209E1	1.6922E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.00021E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16393E-1	-7.98488E-1	-9.13129E0	-9.14192E0	5.91278E-3	9.32693E-2	2.73183E1	-3.26524E1	-3.26645E1	2.67824E1	1.69508E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16274E-1	-7.98392E-1	-9.13148E0	-9.14168E0	5.6982E-3	9.32217E-2	2.73435E1	-3.26266E1	-3.26554E1	2.67944E1	1.69003E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00876E-1