[Scan]
initial_time=2016-02-17T20:51:45
final_time=2016-02-17T20:52:05
ip_count=19
run=1032
dataset=7
scan=281
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08719E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.36804E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.92025E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=4.30727E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.19176E-10
mult1=-9.7949E-9
mult2=-2.69974E-9
rf_tmon=-5.34714E-3
rf_agc=3.29965E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.56929E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20279E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53294E1
cs_ef1b_imon=3.06735E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.21197E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40618E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64953E1
os_ef1alow_imon=2.98172E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.57771E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84444E1
cs_ef1a_imon=3.00932E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.70972E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10575E1
os_restr1_imon=4.24105E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.19392E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.10522E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.25032E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02204E1
cs_anode1_imon=3.23083E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.68789E-8
tplens_vset=1.4E-1
tplens_vmon=1.58598E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26378E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26992E1
iondef2_imon=1.56426E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98502E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.05716E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=2.00775E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74254E1
cs_ef2b_imon=3.113E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71175E1
cs_ef2a_imon=3.17634E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.15098E0
os_ef2alow_imon=-2.37194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27697E-1
os_ef2bup_imon=-5.58838E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10345E1
os_restr2_imon=3.50824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01308E1
cs_anode2_imon=2.26873E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09786E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.09201E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.73118E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18322E0
cs_ionaccel_imon=-1.87656E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47134E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55898E1
einzel_imon=7.33046E-6
window_vset=0.0E0
window_vmon=1.22274E-1
window_imon=-5.81493E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.38932E-4
mask2_vset=0.0E0
mask2_vmon=-1.85925E1
mask2_imon=-7.6903E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.80825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48824E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.58986E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07388E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63531E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=1.00705E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65382E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.71479E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02672E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.2596E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34927E-1
cs_fil2_imon=-2.63222E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.75708E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69292E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.1549E-1
res40_imon=-2.63379E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16679E-1	-7.98464E-1	-9.13105E0	-9.14192E0	5.50747E-3	9.31501E-2	2.72945E1	-3.26732E1	-3.26502E1	2.68292E1	1.69292E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.01907E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16751E-1	-7.9844E-1	-9.131E0	-9.14183E0	5.67436E-3	9.31501E-2	2.73069E1	-3.26627E1	-3.26664E1	2.67962E1	1.69507E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00673E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.1687E-1	-7.98512E-1	-9.13117E0	-9.14199E0	5.55515E-3	9.29832E-2	2.7308E1	-3.26526E1	-3.26443E1	2.68214E1	1.69506E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.0153E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16417E-1	-7.98559E-1	-9.13095E0	-9.1424E0	5.48363E-3	9.31978E-2	2.73291E1	-3.26693E1	-3.26573E1	2.68395E1	1.69368E-7	2.51814E-3	2.51814E-3	6.2863E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16655E-1	-7.98559E-1	-9.13115E0	-9.14214E0	5.4121E-3	9.29594E-2	2.73195E1	-3.2647E1	-3.26434E1	2.68138E1	1.69139E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16965E-1	-7.98655E-1	-9.13115E0	-9.14228E0	5.48363E-3	9.31501E-2	2.73225E1	-3.26639E1	-3.2608E1	2.6801E1	1.69356E-7	2.51804E-3	2.51804E-3	6.28511E-3	2.00285E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.17013E-1	-7.98726E-1	-9.131E0	-9.14214E0	5.45979E-3	9.30548E-2	2.73027E1	-3.26903E1	-3.25713E1	2.68118E1	1.68846E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17013E-1	-7.98559E-1	-9.1311E0	-9.14199E0	5.6982E-3	9.3317E-2	2.72841E1	-3.26759E1	-3.2638E1	2.68022E1	1.6922E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.9968E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16894E-1	-7.98345E-1	-9.13143E0	-9.14202E0	5.6982E-3	9.30071E-2	2.72815E1	-3.26614E1	-3.26396E1	2.68094E1	1.69433E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.00499E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16846E-1	-7.9844E-1	-9.13107E0	-9.14183E0	5.53131E-3	9.30309E-2	2.73141E1	-3.26897E1	-3.26476E1	2.68184E1	1.69286E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16703E-1	-7.98368E-1	-9.13141E0	-9.14199E0	5.38826E-3	9.30309E-2	2.72624E1	-3.26927E1	-3.26218E1	2.67938E1	1.69507E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.1656E-1	-7.98297E-1	-9.13112E0	-9.14204E0	5.45979E-3	9.31263E-2	2.73099E1	-3.26609E1	-3.25966E1	2.67764E1	1.68992E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99803E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16512E-1	-7.98321E-1	-9.13107E0	-9.1418E0	5.65052E-3	9.33409E-2	2.72744E1	-3.26767E1	-3.26449E1	2.67848E1	1.69292E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.97647E-1
1.7E1	1.2E1	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16727E-1	-7.98202E-1	-9.13103E0	-9.14195E0	5.67436E-3	9.31025E-2	2.73069E1	-3.26838E1	-3.26089E1	2.68151E1	1.69433E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.99456E-1
1.8E1	8.6E1	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16917E-1	-7.98082E-1	-9.13143E0	-9.14202E0	5.88894E-3	9.30309E-2	2.7227E1	-3.25623E1	-3.26549E1	2.68016E1	1.6922E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9934E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16917E-1	-7.97963E-1	-9.13136E0	-9.14204E0	5.84126E-3	9.29594E-2	2.73003E1	-3.26831E1	-3.26428E1	2.67986E1	1.69364E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00192E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16751E-1	-7.97987E-1	-9.13126E0	-9.14204E0	5.93662E-3	9.32217E-2	2.73225E1	-3.26248E1	-3.26056E1	2.68094E1	1.69356E-7	2.51248E-3	2.51248E-3	6.29067E-3	2.0064E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16941E-1	-7.98512E-1	-9.13112E0	-9.14204E0	5.88894E-3	9.30548E-2	2.7347E1	-3.26992E1	-3.26107E1	2.67824E1	1.69286E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.02073E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17108E-1	-7.98273E-1	-9.13129E0	-9.1423E0	6.00815E-3	9.30309E-2	2.72856E1	-3.26685E1	-3.26331E1	2.68012E1	1.69368E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.00231E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17013E-1	-7.98035E-1	-9.13117E0	-9.14183E0	5.67436E-3	9.33409E-2	2.73151E1	-3.26992E1	-3.26378E1	2.67944E1	1.69292E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.9985E-1