[Scan]
initial_time=2016-02-17T20:52:39
final_time=2016-02-17T20:52:58
ip_count=19
run=1032
dataset=7
scan=283
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37128E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.95422E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=4.02689E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=3.94166E-10
mult1=-1.00053E-8
mult2=-2.65673E-9
rf_tmon=-3.4009E-3
rf_agc=3.4367E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.59389E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20139E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54445E1
cs_ef1b_imon=3.05298E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.20369E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37977E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.95351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.57715E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.70218E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14861E1
os_ea1_imon=2.1799E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63954E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27673E0
cs_ionrep_imon=1.26208E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01118E1
cs_anode1_imon=3.21696E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.68041E-8
tplens_vset=1.4E-1
tplens_vmon=1.63603E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.47297E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.59842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.08443E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=2.00362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.16038E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82168E0
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.15317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73708E-1
os_ef2bup_imon=-5.58557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10631E1
os_restr2_imon=3.5424E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.26695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67984E1
iondef4_imon=1.12089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09479E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.73539E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-2.47174E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56687E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.39857E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.38698E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-3.05757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.93076E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.29772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56397E0
defgridb_imon=5.90117E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.57142E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00499E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62582E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65209E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.88821E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.61675E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.15419E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-1.92715E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.61694E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22288E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.69364E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.80605E-1
res40_imon=-3.02315E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17132E-1	-7.98488E-1	-9.13129E0	-9.14173E0	5.93662E-3	9.30786E-2	2.73005E1	-3.2666E1	-3.26417E1	2.67474E1	1.69507E-7	2.53306E-3	2.53306E-3	6.32936E-3	2.00673E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.1706E-1	-7.9844E-1	-9.13134E0	-9.14161E0	5.76973E-3	9.31501E-2	2.73201E1	-3.26663E1	-3.26681E1	2.6795E1	1.6922E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16798E-1	-7.98178E-1	-9.1315E0	-9.14218E0	5.93662E-3	9.34601E-2	2.73015E1	-3.27011E1	-3.26416E1	2.68088E1	1.69213E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01022E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16846E-1	-7.98297E-1	-9.13134E0	-9.14207E0	5.50747E-3	9.30309E-2	2.73588E1	-3.26933E1	-3.26396E1	2.68024E1	1.69508E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16798E-1	-7.98321E-1	-9.13124E0	-9.14195E0	5.53131E-3	9.31978E-2	2.73069E1	-3.26362E1	-3.26278E1	2.6804E1	1.69292E-7	2.51739E-3	2.51739E-3	6.28056E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16941E-1	-7.98273E-1	-9.13119E0	-9.14245E0	5.34058E-3	9.35555E-2	2.7296E1	-3.26482E1	-3.26163E1	2.68088E1	1.69507E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17037E-1	-7.9844E-1	-9.13122E0	-9.14233E0	5.55515E-3	9.3174E-2	2.73308E1	-3.26364E1	-3.26572E1	2.67986E1	1.69368E-7	2.52025E-3	2.52025E-3	6.29684E-3	1.99896E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16774E-1	-7.98178E-1	-9.13126E0	-9.14209E0	5.60284E-3	9.3317E-2	2.72781E1	-3.26813E1	-3.26254E1	2.67956E1	1.69286E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16774E-1	-7.98011E-1	-9.13129E0	-9.14209E0	5.65052E-3	9.35316E-2	2.73193E1	-3.2662E1	-3.26779E1	2.6813E1	1.69433E-7	2.52538E-3	2.52538E-3	6.30192E-3	1.98247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16822E-1	-7.98249E-1	-9.13105E0	-9.14204E0	5.72205E-3	9.34362E-2	2.73315E1	-3.26891E1	-3.26134E1	2.67543E1	1.6936E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16894E-1	-7.98392E-1	-9.131E0	-9.14221E0	5.29289E-3	9.33409E-2	2.73299E1	-3.26732E1	-3.26868E1	2.678E1	1.69292E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.97984E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16751E-1	-7.98607E-1	-9.13107E0	-9.1423E0	5.24521E-3	9.31025E-2	2.73147E1	-3.26603E1	-3.26416E1	2.67944E1	1.69292E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.98491E-1
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.1687E-1	-7.98631E-1	-9.13093E0	-9.14199E0	5.19753E-3	9.33886E-2	2.73183E1	-3.26873E1	-3.26735E1	2.6807E1	1.6947E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9989E-1
1.7E1	1.3E1	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16846E-1	-7.98368E-1	-9.13124E0	-9.14216E0	5.74589E-3	9.31978E-2	2.73081E1	-3.26807E1	-3.26128E1	2.68046E1					
1.8E1	1.05E2	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16751E-1	-7.98225E-1	-9.1311E0	-9.14195E0	5.6982E-3	9.32932E-2	2.72222E1	-3.26326E1	-3.27468E1	2.67938E1	1.69433E-7	2.51552E-3	2.51552E-3	6.26916E-3	2.01372E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16584E-1	-7.98035E-1	-9.13136E0	-9.14221E0	5.65052E-3	9.32455E-2	2.73163E1	-3.26797E1	-3.26319E1	2.68273E1	1.6936E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.16393E-1	-7.98249E-1	-9.13141E0	-9.14199E0	5.53131E-3	9.32455E-2	2.73092E1	-3.26708E1	-3.26254E1	2.68016E1	1.69292E-7	2.52276E-3	2.52276E-3	6.29128E-3	1.97984E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16488E-1	-7.98273E-1	-9.131E0	-9.14199E0	5.81741E-3	9.30309E-2	2.72853E1	-3.26723E1	-3.26524E1	2.68304E1	1.69213E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16512E-1	-7.98249E-1	-9.131E0	-9.14185E0	5.72205E-3	9.30071E-2	2.73352E1	-3.2675E1	-3.26207E1	2.68076E1	1.69364E-7	2.52061E-3	2.52061E-3	6.29665E-3	1.97647E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16441E-1	-7.98225E-1	-9.13122E0	-9.14204E0	5.60284E-3	9.31501E-2	2.72979E1	-3.26819E1	-3.2638E1	2.67984E1	1.69364E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9917E-1