[Scan]
initial_time=2016-02-17T20:53:05
final_time=2016-02-17T20:53:25
ip_count=19
run=1032
dataset=7
scan=284
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.37055E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.92549E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=4.5073E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=4.06265E-10
mult1=-9.81263E-9
mult2=-2.75654E-9
rf_tmon=-6.58527E-3
rf_agc=3.18796E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.59302E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.06199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=2.19144E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.46926E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65203E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.56742E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83535E1
cs_ef1a_imon=2.96864E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.70144E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.20622E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64104E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.26929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01485E1
cs_anode1_imon=3.22705E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.69033E-8
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-6.86289E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.0827E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=2.01516E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73937E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82288E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7163E1
cs_ef2a_imon=3.20615E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-3.04838E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73708E-1
os_ef2bup_imon=-5.62161E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=3.50059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.32524E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09302E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=9.72736E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1824E0
cs_ionaccel_imon=-1.99962E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02003E2
cs_ionfocb_imon=1.46895E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.91849E-6
window_vset=0.0E0
window_vmon=1.36253E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82574E2
mask1_imon=2.38853E-4
mask2_vset=0.0E0
mask2_vmon=-1.85719E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.67481E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5339E0
defgridb_imon=5.94804E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.61815E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62958E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=1.00873E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63033E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65429E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85445E-2
os_fil2_imon=-2.93026E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72486E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.702E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.04362E-1
res40_imon=-2.85016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16512E-1	-7.98273E-1	-9.13167E0	-9.14173E0	5.96046E-3	9.30309E-2	2.72903E1	-3.2652E1	-3.26331E1	2.68163E1	1.69433E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.9963E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16202E-1	-7.98178E-1	-9.13136E0	-9.14199E0	5.6982E-3	9.3174E-2	2.73165E1	-3.26464E1	-3.26446E1	2.68132E1	1.6922E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16298E-1	-7.98559E-1	-9.13138E0	-9.14209E0	5.98431E-3	9.32455E-2	2.73021E1	-3.26861E1	-3.26579E1	2.67966E1	1.69206E-7	2.51581E-3	2.51581E-3	6.29067E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16393E-1	-7.98798E-1	-9.13117E0	-9.14252E0	5.6982E-3	9.32217E-2	2.73086E1	-3.26667E1	-3.25936E1	2.68034E1	1.6922E-7	2.52923E-3	2.52923E-3	6.31278E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.1656E-1	-7.98583E-1	-9.13126E0	-9.14233E0	5.67436E-3	9.31978E-2	2.73387E1	-3.26428E1	-3.26392E1	2.68154E1	1.69216E-7	2.51484E-3	2.51484E-3	6.28572E-3	1.99999E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16655E-1	-7.98559E-1	-9.13107E0	-9.14233E0	5.53131E-3	9.33409E-2	2.73093E1	-3.26446E1	-3.26176E1	2.67595E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.16631E-1	-7.98416E-1	-9.13141E0	-9.14202E0	5.43594E-3	9.32693E-2	2.73016E1	-3.26685E1	-3.26242E1	2.67989E1	1.69431E-7	2.52473E-3	2.52473E-3	6.26844E-3	1.99754E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09317E0	-8.16631E-1	-7.97915E-1	-9.131E0	-9.14199E0	5.57899E-3	9.33409E-2	2.72916E1	-3.2678E1	-3.26064E1	2.68151E1	1.69297E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.00903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16488E-1	-7.98154E-1	-9.13153E0	-9.14192E0	5.38826E-3	9.36508E-2	2.73088E1	-3.26701E1	-3.26144E1	2.68358E1	1.69428E-7	2.51725E-3	2.51725E-3	6.33021E-3	2.00244E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16298E-1	-7.98535E-1	-9.13153E0	-9.14195E0	5.26905E-3	9.33409E-2	2.72921E1	-3.26815E1	-3.26136E1	2.68412E1	1.69066E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16274E-1	-7.9875E-1	-9.13126E0	-9.14195E0	5.55515E-3	9.32217E-2	2.72811E1	-3.26891E1	-3.25888E1	2.68004E1	1.69292E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9934E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16417E-1	-7.98583E-1	-9.13122E0	-9.14204E0	5.55515E-3	9.3174E-2	2.72859E1	-3.26717E1	-3.25924E1	2.68124E1	1.69286E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.99283E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16274E-1	-7.98321E-1	-9.13122E0	-9.14214E0	5.48363E-3	9.3174E-2	2.73181E1	-3.2649E1	-3.26596E1	2.67938E1	1.69139E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00499E-1
1.7E1	5.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16202E-1	-7.98225E-1	-9.13103E0	-9.14221E0	5.26905E-3	9.35316E-2	2.73339E1	-3.2647E1	-3.26218E1	2.68082E1	1.69433E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
1.8E1	8.4E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16107E-1	-7.98464E-1	-9.131E0	-9.14204E0	5.43594E-3	9.31263E-2	2.73399E1	-3.26332E1	-3.25461E1	2.67995E1	1.69436E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98322E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16345E-1	-7.98535E-1	-9.13103E0	-9.14228E0	5.62668E-3	9.31501E-2	2.73207E1	-3.26621E1	-3.26458E1	2.68166E1	1.69433E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.97388E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16393E-1	-7.98416E-1	-9.131E0	-9.14173E0	5.55515E-3	9.3317E-2	2.73175E1	-3.26567E1	-3.26785E1	2.681E1	1.69507E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.97903E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16321E-1	-7.98512E-1	-9.13107E0	-9.14207E0	5.60284E-3	9.32693E-2	2.72951E1	-3.26296E1	-3.26472E1	2.68082E1	1.69364E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9951E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16345E-1	-7.9844E-1	-9.13095E0	-9.14197E0	5.57899E-3	9.35078E-2	2.73117E1	-3.265E1	-3.26236E1	2.6801E1	1.69216E-7	2.51972E-3	2.51972E-3	6.32644E-3	2.00258E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16369E-1	-7.98416E-1	-9.13091E0	-9.14214E0	5.48363E-3	9.36747E-2	2.73273E1	-3.26807E1	-3.25984E1	2.68034E1