[Scan]
initial_time=2016-02-17T20:53:32
final_time=2016-02-17T20:53:52
ip_count=19
run=1032
dataset=7
scan=285
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36587E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.86377E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=3.63338E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=3.79598E-10
mult1=-9.72835E-9
mult2=-2.71262E-9
rf_tmon=-4.90296E-3
rf_agc=3.24864E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.55188E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20326E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=3.03928E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.19605E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45161E0
lens1_imon=2.73793E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64134E1
os_ef1alow_imon=2.93621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03549E1
cs_ea2_imon=1.54586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8386E1
cs_ef1a_imon=3.02451E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.70396E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11988E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.21091E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.0364E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.25492E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01431E1
cs_anode1_imon=3.253E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.69536E-8
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26669E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03001E2
lens6_imon=2.98572E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.06429E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.99855E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.14848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82961E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00853E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71546E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.9975E0
os_ef2alow_imon=-2.94746E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.98936E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11538E1
os_restr2_imon=3.5478E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02296E1
cs_anode2_imon=2.28353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08933E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.74228E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.05746E0
cs_ionaccel_imon=-2.42129E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56934E1
einzel_imon=7.95453E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-1.54913E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82542E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86909E1
mask2_imon=-3.27381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=6.97814E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.57701E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63314E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00474E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.50863E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.36591E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-1.83706E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.72486E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16774E-1	-7.97892E-1	-9.13098E0	-9.14176E0	5.31673E-3	9.35316E-2	2.73464E1	-3.26396E1	-3.26419E1	2.68308E1	1.6922E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00876E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16464E-1	-7.98202E-1	-9.13112E0	-9.1419E0	5.4121E-3	9.35555E-2	2.73301E1	-3.26472E1	-3.26547E1	2.68032E1	1.69364E-7	2.52815E-3	2.52815E-3	6.31817E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16894E-1	-7.98368E-1	-9.13105E0	-9.14202E0	5.48363E-3	9.33886E-2	2.73039E1	-3.26614E1	-3.25814E1	2.68123E1	1.69275E-7	2.52293E-3	2.52293E-3	6.3131E-3	2.00425E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17084E-1	-7.98225E-1	-9.13103E0	-9.14199E0	5.50747E-3	9.3317E-2	2.73129E1	-3.26795E1	-3.26789E1	2.68034E1	1.69075E-7	2.52599E-3	2.52599E-3	6.29665E-3	2.00534E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16917E-1	-7.9844E-1	-9.13081E0	-9.1418E0	5.17368E-3	9.3627E-2	2.73003E1	-3.26543E1	-3.26188E1	2.68166E1	1.69147E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.98491E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16727E-1	-7.98321E-1	-9.13084E0	-9.14197E0	4.95911E-3	9.36508E-2	2.72624E1	-3.26807E1	-3.26284E1	2.67848E1	1.69433E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16751E-1	-7.98512E-1	-9.13093E0	-9.14176E0	5.36442E-3	9.3317E-2	2.72889E1	-3.26536E1	-3.26561E1	2.67944E1	1.6936E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16822E-1	-7.98488E-1	-9.13084E0	-9.14204E0	5.88894E-3	9.31501E-2	2.72827E1	-3.26638E1	-3.26248E1	2.67968E1	1.6936E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16846E-1	-7.98464E-1	-9.13107E0	-9.1419E0	5.55515E-3	9.28879E-2	2.72678E1	-3.262E1	-3.26705E1	2.68436E1	1.68992E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16655E-1	-7.98178E-1	-9.13098E0	-9.14166E0	5.50747E-3	9.31263E-2	2.72997E1	-3.26392E1	-3.26482E1	2.67734E1	1.69286E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16774E-1	-7.97963E-1	-9.13107E0	-9.14228E0	5.76973E-3	9.35316E-2	2.73175E1	-3.26797E1	-3.26254E1	2.68001E1	1.69508E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.01219E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16607E-1	-7.97963E-1	-9.13103E0	-9.14216E0	5.81741E-3	9.34601E-2	2.73333E1	-3.26725E1	-3.2634E1	2.68082E1	1.69213E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16584E-1	-7.98416E-1	-9.13131E0	-9.14187E0	5.84126E-3	9.30786E-2	2.73021E1	-3.26992E1	-3.26608E1	2.68004E1	1.69581E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00847E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16727E-1	-7.98297E-1	-9.13141E0	-9.1418E0	5.88894E-3	9.32932E-2	2.73195E1	-3.26861E1	-3.26308E1	2.67836E1	1.69147E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.00705E-1
1.8E1	7.4E1	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16488E-1	-7.98297E-1	-9.13146E0	-9.14168E0	5.79357E-3	9.34839E-2	2.73478E1	-3.26663E1	-3.2611E1	2.68166E1	1.69581E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16774E-1	-7.98154E-1	-9.13115E0	-9.14187E0	5.93662E-3	9.35078E-2	2.73165E1	-3.26741E1	-3.26128E1	2.68028E1	1.69433E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.99803E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16751E-1	-7.98273E-1	-9.13098E0	-9.14216E0	5.93662E-3	9.34362E-2	2.73375E1	-3.26579E1	-3.26384E1	2.6783E1	1.69433E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.1687E-1	-7.9813E-1	-9.13119E0	-9.14204E0	5.72205E-3	9.31025E-2	2.73482E1	-3.26762E1	-3.26313E1	2.68151E1	1.69364E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16512E-1	-7.97868E-1	-9.13095E0	-9.14214E0	5.50747E-3	9.26495E-2	2.72859E1	-3.26128E1	-3.2623E1	2.68208E1	1.6918E-7	2.5208E-3	2.5208E-3	6.32099E-3	2.00516E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16631E-1	-7.98106E-1	-9.13103E0	-9.14214E0	5.67436E-3	9.3174E-2	2.73135E1	-3.26837E1	-3.26669E1	2.68052E1