[Scan]
initial_time=2016-02-17T20:54:25
final_time=2016-02-17T20:54:45
ip_count=19
run=1032
dataset=7
scan=287
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.36785E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.893E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=4.0555E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=3.9643E-10
mult1=-9.29489E-9
mult2=-2.66272E-9
rf_tmon=-4.52444E-3
rf_agc=3.34297E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.57954E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.72731E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53007E1
cs_ef1b_imon=3.027E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05283E1
cs_ea1_imon=2.22047E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39498E0
lens1_imon=2.57511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64886E1
os_ef1alow_imon=3.01136E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.56249E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.0065E-5
olens2_vset=9.7E-1
olens2_vmon=9.70721E-1
olens2_imon=1.70538E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11025E1
os_restr1_imon=4.24612E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.15216E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63346E1
os_ef1bup_imon=3.10867E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.25209E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02273E1
cs_anode1_imon=3.25359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.6906E-8
tplens_vset=1.4E-1
tplens_vmon=1.61253E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26645E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26368E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98643E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.04809E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=1.9897E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.10485E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82135E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70806E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.16171E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23874E-1
os_ef2bup_imon=-5.31656E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10544E1
os_restr2_imon=3.51389E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0156E1
cs_anode2_imon=2.29025E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.068E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.7396E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14752E0
cs_ionaccel_imon=-1.68839E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55612E1
einzel_imon=7.39244E-6
window_vset=0.0E0
window_vmon=1.59765E-1
window_imon=-8.23055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.85962E1
mask2_imon=-1.06285E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.66832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.503E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.57833E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30881E1
cs_fil1_imon=1.0059E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64995E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.35255E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.18493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38142E-1
cs_fil2_imon=-2.53018E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.60076E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.68643E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.23701E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16727E-1	-7.97939E-1	-9.13138E0	-9.14221E0	5.50747E-3	9.33886E-2	2.73314E1	-3.26799E1	-3.26395E1	2.68526E1	1.69798E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00192E-1
2.0E0	5.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16774E-1	-7.98154E-1	-9.13103E0	-9.14226E0	5.76973E-3	9.33409E-2	2.73249E1	-3.26723E1	-3.26206E1	2.68288E1	1.69881E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.99224E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16631E-1	-7.9813E-1	-9.13086E0	-9.14204E0	5.96046E-3	9.32455E-2	2.73128E1	-3.26803E1	-3.26213E1	2.6796E1	1.69581E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16846E-1	-7.98106E-1	-9.13086E0	-9.14187E0	5.45979E-3	9.33409E-2	2.72955E1	-3.26687E1	-3.26621E1	2.68184E1	1.69439E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17037E-1	-7.98392E-1	-9.13105E0	-9.14185E0	5.53131E-3	9.34839E-2	2.73169E1	-3.26054E1	-3.26478E1	2.68004E1	1.69654E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17084E-1	-7.98321E-1	-9.13124E0	-9.14185E0	5.50747E-3	9.32932E-2	2.73411E1	-3.26506E1	-3.26717E1	2.68292E1	1.69581E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.9951E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17132E-1	-7.98297E-1	-9.13107E0	-9.1419E0	5.65052E-3	9.35555E-2	2.7254E1	-3.26783E1	-3.2632E1	2.67781E1	1.69507E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16894E-1	-7.98106E-1	-9.13088E0	-9.14218E0	5.60284E-3	9.32932E-2	2.73003E1	-3.26615E1	-3.26236E1	2.68004E1	1.69581E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.98075E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16584E-1	-7.9813E-1	-9.131E0	-9.14173E0	5.60284E-3	9.33647E-2	2.73358E1	-3.26691E1	-3.26172E1	2.68046E1	1.69292E-7	2.52923E-3	2.52923E-3	6.32356E-3	1.98491E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16751E-1	-7.98249E-1	-9.13076E0	-9.1419E0	5.4121E-3	9.34601E-2	2.7346E1	-3.26561E1	-3.26368E1	2.67968E1	1.69433E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16798E-1	-7.97963E-1	-9.13095E0	-9.14204E0	5.76973E-3	9.3627E-2	2.73177E1	-3.27059E1	-3.26128E1	2.6786E1	1.69286E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00499E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16536E-1	-7.98249E-1	-9.13091E0	-9.14207E0	5.60284E-3	9.33647E-2	2.73345E1	-3.26432E1	-3.26474E1	2.6801E1	1.69728E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.01022E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16655E-1	-7.98512E-1	-9.13076E0	-9.14195E0	5.62668E-3	9.3174E-2	2.72797E1	-3.26803E1	-3.26213E1	2.68046E1	1.69507E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.00325E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.16464E-1	-7.98202E-1	-9.13124E0	-9.14173E0	5.45979E-3	9.3317E-2	2.73363E1	-3.26675E1	-3.26344E1	2.67752E1	1.69139E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98937E-1
1.8E1	8.6E1	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16703E-1	-7.97868E-1	-9.13131E0	-9.14211E0	5.60284E-3	9.34601E-2	2.72666E1	-3.26554E1	-3.26963E1	2.68124E1	1.69286E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.16369E-1	-7.97772E-1	-9.13153E0	-9.14161E0	5.29289E-3	9.34839E-2	2.73087E1	-3.26549E1	-3.2614E1	2.6792E1	1.69286E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98247E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09696E0	-8.16488E-1	-7.97653E-1	-9.13124E0	-9.1418E0	5.72205E-3	9.30071E-2	2.73309E1	-3.26549E1	-3.26506E1	2.6807E1	1.6936E-7	2.52045E-3	2.52045E-3	6.32112E-3	1.98678E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16488E-1	-7.98011E-1	-9.13119E0	-9.14202E0	5.55515E-3	9.30786E-2	2.7347E1	-3.26868E1	-3.26113E1	2.67805E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16369E-1	-7.98249E-1	-9.13095E0	-9.14221E0	5.24521E-3	9.28879E-2	2.73322E1	-3.27145E1	-3.26313E1	2.68047E1	1.69364E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16393E-1	-7.98035E-1	-9.13103E0	-9.14202E0	5.62668E-3	9.29117E-2	2.72931E1	-3.26368E1	-3.26645E1	2.67758E1	1.68643E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00021E-1