[Scan]
initial_time=2016-02-17T20:54:52
final_time=2016-02-17T20:55:12
ip_count=19
run=1032
dataset=7
scan=288
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37023E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.88428E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.99303E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=4.08173E-10
mult1=-9.20382E-9
mult2=-2.79969E-9
rf_tmon=-4.90471E-3
rf_agc=3.43178E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.58141E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20237E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53388E1
cs_ef1b_imon=3.05262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=2.20029E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39852E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65023E1
os_ef1alow_imon=3.00072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.58373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.98919E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.70739E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10661E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=2.18083E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64056E1
os_ef1bup_imon=3.10884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27333E0
cs_ionrep_imon=1.24961E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02194E1
cs_anode1_imon=3.25336E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.6892E-8
tplens_vset=1.4E-1
tplens_vmon=1.56003E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26384E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.06725E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.98934E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74111E1
cs_ef2b_imon=3.09514E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81132E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.15307E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.50628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10276E1
os_restr2_imon=3.49843E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01359E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73777E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68296E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08891E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=9.73517E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.23165E0
cs_ionaccel_imon=-1.62481E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.46963E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55877E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-6.01282E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.38918E-4
mask2_vset=0.0E0
mask2_vmon=-1.85821E1
mask2_imon=-1.00853E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92569E3
multa_neg_imon=8.6098E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.81532E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.58524E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6364E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=1.00604E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65468E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.3916E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.71595E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22389E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.69292E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=7.5693E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16202E-1	-7.98583E-1	-9.13112E0	-9.14195E0	5.24521E-3	9.31978E-2	2.7308E1	-3.26891E1	-3.26166E1	2.67752E1	1.69213E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16369E-1	-7.98512E-1	-9.13098E0	-9.1419E0	5.4121E-3	9.30548E-2	2.72941E1	-3.26462E1	-3.26529E1	2.67836E1	1.69292E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1625E-1	-7.98535E-1	-9.13076E0	-9.14197E0	5.4121E-3	9.32693E-2	2.72811E1	-3.26843E1	-3.26314E1	2.68034E1	1.69881E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16321E-1	-7.98416E-1	-9.13107E0	-9.14221E0	6.03199E-3	9.34601E-2	2.73275E1	-3.26673E1	-3.25918E1	2.6792E1	1.6936E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16202E-1	-7.98488E-1	-9.13107E0	-9.14235E0	5.74589E-3	9.33886E-2	2.72892E1	-3.26787E1	-3.26193E1	2.68069E1	1.69364E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16417E-1	-7.98488E-1	-9.1311E0	-9.14228E0	5.62668E-3	9.3317E-2	2.73045E1	-3.26915E1	-3.26325E1	2.6804E1	1.6936E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16655E-1	-7.98535E-1	-9.13107E0	-9.14199E0	5.57899E-3	9.35316E-2	2.72786E1	-3.26791E1	-3.26266E1	2.68302E1	1.69507E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.97559E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16369E-1	-7.98368E-1	-9.13119E0	-9.14187E0	5.93662E-3	9.33409E-2	2.72308E1	-3.26738E1	-3.2603E1	2.68052E1	1.69364E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16512E-1	-7.98154E-1	-9.13117E0	-9.14195E0	5.84126E-3	9.32217E-2	2.73289E1	-3.2644E1	-3.26104E1	2.68117E1	1.69436E-7	2.52815E-3	2.52815E-3	6.33436E-3	1.9934E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.1656E-1	-7.9844E-1	-9.13126E0	-9.14197E0	5.6982E-3	9.30786E-2	2.7352E1	-3.26633E1	-3.26669E1	2.67818E1	1.6951E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.00735E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16321E-1	-7.98464E-1	-9.1315E0	-9.14209E0	5.79357E-3	9.34124E-2	2.73123E1	-3.26567E1	-3.26597E1	2.68232E1	1.69176E-7	2.51443E-3	2.51443E-3	6.31563E-3	2.00238E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16441E-1	-7.98488E-1	-9.13112E0	-9.14195E0	5.74589E-3	9.34124E-2	2.73063E1	-3.26579E1	-3.262E1	2.67775E1					
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16488E-1	-7.98345E-1	-9.13117E0	-9.14199E0	5.43594E-3	9.35555E-2	2.73273E1	-3.26915E1	-3.26705E1	2.67826E1	1.69292E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9968E-1
1.7E1	2.6E1	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16417E-1	-7.98535E-1	-9.13119E0	-9.14216E0	5.50747E-3	9.32455E-2	2.73147E1	-3.26723E1	-3.2626E1	2.67931E1	1.69431E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.98696E-1
1.8E1	8.7E1	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16393E-1	-7.98583E-1	-9.13119E0	-9.14199E0	5.07832E-3	9.32932E-2	2.73363E1	-3.26639E1	-3.26416E1	2.6795E1	1.69292E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00192E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16441E-1	-7.98345E-1	-9.13124E0	-9.14192E0	5.60284E-3	9.33886E-2	2.73141E1	-3.26729E1	-3.26434E1	2.67866E1	1.69356E-7	2.52139E-3	2.52139E-3	6.30182E-3	1.99754E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16607E-1	-7.98512E-1	-9.13091E0	-9.14211E0	5.57899E-3	9.34362E-2	2.73219E1	-3.26633E1	-3.26476E1	2.67782E1	1.69364E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16417E-1	-7.98535E-1	-9.13112E0	-9.14202E0	5.45979E-3	9.32455E-2	2.73242E1	-3.26585E1	-3.25912E1	2.68058E1	1.69433E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16464E-1	-7.98607E-1	-9.13124E0	-9.14204E0	5.4121E-3	9.30786E-2	2.73688E1	-3.27121E1	-3.26431E1	2.6847E1	1.69364E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00705E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16441E-1	-7.98607E-1	-9.13129E0	-9.1423E0	5.62668E-3	9.34839E-2	2.73777E1	-3.26384E1	-3.26307E1	2.68296E1	1.69292E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.99E-1