[Scan]
initial_time=2016-02-17T20:55:19
final_time=2016-02-17T20:55:38
ip_count=19
run=1032
dataset=7
scan=289
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.36978E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.89923E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.69E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=3.9053E-10
mult1=-9.49958E-9
mult2=-2.62479E-9
rf_tmon=-4.65662E-3
rf_agc=3.31533E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.6188E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68686E0
bslens_imon=2.72023E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.97059E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.05154E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05218E1
cs_ea1_imon=2.19357E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33481E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.56638E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.01117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.70855E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=2.19215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.24925E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.24975E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.69956E-8
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98714E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.09225E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.99395E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83256E0
os_ea2_imon=-5.28949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52084E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.51789E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.08849E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=9.76147E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1854E0
cs_ionaccel_imon=-2.16901E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.85996E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.98687E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.38352E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.13387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.57875E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00554E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65887E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71141E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.10774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22471E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.98075E-1
chamber_ion_pmon=1.69213E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.44586E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16274E-1	-7.98178E-1	-9.13119E0	-9.14214E0	5.29289E-3	9.34362E-2	2.73069E1	-3.26482E1	-3.26446E1	2.68046E1	1.69213E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98247E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16536E-1	-7.97915E-1	-9.13138E0	-9.14216E0	5.48363E-3	9.35078E-2	2.73293E1	-3.26921E1	-3.26248E1	2.68022E1	1.69066E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.98247E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16464E-1	-7.98106E-1	-9.13112E0	-9.14235E0	5.17368E-3	9.32217E-2	2.73562E1	-3.26693E1	-3.26549E1	2.68208E1	1.69436E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.00021E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16512E-1	-7.97892E-1	-9.13146E0	-9.14223E0	5.14984E-3	9.32455E-2	2.73069E1	-3.27011E1	-3.26254E1	2.67968E1	1.6936E-7	2.52209E-3	2.52209E-3	6.28006E-3	2.00673E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16441E-1	-7.9782E-1	-9.13146E0	-9.14221E0	5.45979E-3	9.34124E-2	2.72751E1	-3.26993E1	-3.2641E1	2.68082E1	1.69433E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00847E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16393E-1	-7.98249E-1	-9.13146E0	-9.14223E0	5.81741E-3	9.33409E-2	2.72892E1	-3.2662E1	-3.26349E1	2.67674E1	1.6922E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16512E-1	-7.97963E-1	-9.13126E0	-9.14223E0	5.48363E-3	9.32217E-2	2.73017E1	-3.26522E1	-3.26146E1	2.68054E1	1.69286E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16607E-1	-7.97892E-1	-9.13117E0	-9.14237E0	5.57899E-3	9.32932E-2	2.73013E1	-3.26534E1	-3.2577E1	2.68343E1	1.69511E-7	2.52197E-3	2.52197E-3	6.29703E-3	1.99776E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16226E-1	-7.98273E-1	-9.13117E0	-9.14209E0	5.74589E-3	9.34124E-2	2.72931E1	-3.26332E1	-3.26446E1	2.68274E1	1.69269E-7	2.51411E-3	2.51411E-3	6.34231E-3	1.98917E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16679E-1	-7.98082E-1	-9.13117E0	-9.14223E0	5.81741E-3	9.33409E-2	2.73339E1	-3.26615E1	-3.26278E1	2.68148E1	1.6936E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.00325E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16894E-1	-7.98249E-1	-9.1315E0	-9.14214E0	5.72205E-3	9.35078E-2	2.73033E1	-3.26669E1	-3.26344E1	2.68226E1	1.69292E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.97142E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16798E-1	-7.98297E-1	-9.13126E0	-9.14197E0	5.60284E-3	9.33409E-2	2.72913E1	-3.26819E1	-3.26116E1	2.67692E1	1.68907E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.96075E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16584E-1	-7.98202E-1	-9.13107E0	-9.14216E0	5.60284E-3	9.35555E-2	2.72504E1	-3.26488E1	-3.26314E1	2.67908E1	1.6936E-7	2.52867E-3	2.52867E-3	6.3074E-3	1.97045E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16774E-1	-7.98178E-1	-9.13091E0	-9.14197E0	5.79357E-3	9.32693E-2	2.73149E1	-3.26634E1	-3.26548E1	2.67956E1	1.69213E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.97045E-1
1.8E1	9.8E1	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16894E-1	-7.98345E-1	-9.13079E0	-9.14185E0	5.81741E-3	9.3174E-2	2.72817E1	-3.26561E1	-3.26452E1	2.68046E1	1.69431E-7	2.51915E-3	2.51915E-3	6.32978E-3	1.96771E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16584E-1	-7.98726E-1	-9.13103E0	-9.14173E0	5.67436E-3	9.32693E-2	2.73159E1	-3.26957E1	-3.26152E1	2.68382E1	1.69364E-7	2.51203E-3	2.51203E-3	6.33977E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16464E-1	-7.98345E-1	-9.13112E0	-9.14199E0	5.36442E-3	9.32693E-2	2.73092E1	-3.26762E1	-3.2649E1	2.67668E1	1.69139E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16441E-1	-7.98607E-1	-9.13124E0	-9.14178E0	5.26905E-3	9.31025E-2	2.73629E1	-3.26638E1	-3.26307E1	2.68154E1	1.69213E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16536E-1	-7.98607E-1	-9.13141E0	-9.14199E0	5.48363E-3	9.30071E-2	2.72504E1	-3.26741E1	-3.27588E1	2.67387E1	1.69508E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.98491E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16774E-1	-7.98535E-1	-9.13124E0	-9.14199E0	5.62668E-3	9.32932E-2	2.73285E1	-3.26452E1	-3.26128E1	2.68142E1	1.69213E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.98075E-1