[Scan]
initial_time=2016-02-17T20:56:12
final_time=2016-02-17T20:56:31
ip_count=19
run=1032
dataset=7
scan=291
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08733E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.3738E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.98022E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=3.76558E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.01747E-10
mult1=-8.74277E-9
mult2=-2.93884E-9
rf_tmon=-2.82826E-3
rf_agc=3.5769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.10352E-3
ql5_imon=1.60366E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20241E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.04397E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=2.18927E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40981E0
lens1_imon=2.45484E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.57066E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.70779E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15504E1
os_ea1_imon=2.20514E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.25595E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93222E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.24903E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.68742E-8
tplens_vset=1.4E-1
tplens_vmon=1.57474E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.46756E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.09888E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29776E0
ionrepsh_imon=2.02813E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.19757E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.11064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8325E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09961E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71305E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.52366E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.27416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73423E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08738E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=9.7557E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47096E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.37069E-6
window_vset=0.0E0
window_vmon=1.57276E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=6.92138E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=7.05115E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.58506E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64055E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=1.00569E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65537E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99951E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.35555E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=1.98696E-1
chamber_ion_pmon=1.70031E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70705E-1
res40_imon=-2.7096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16298E-1	-7.98392E-1	-9.13122E0	-9.14209E0	5.79357E-3	9.34124E-2	2.73517E1	-3.2649E1	-3.26484E1	2.68244E1	1.69802E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00673E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16083E-1	-7.98106E-1	-9.13148E0	-9.1423E0	5.74589E-3	9.34839E-2	2.73198E1	-3.26358E1	-3.26719E1	2.68064E1	1.69798E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16369E-1	-7.97892E-1	-9.13153E0	-9.14214E0	5.65052E-3	9.34124E-2	2.73352E1	-3.26637E1	-3.26179E1	2.67845E1	1.69431E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.98344E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16464E-1	-7.98273E-1	-9.1316E0	-9.14218E0	5.50747E-3	9.32217E-2	2.72793E1	-3.26591E1	-3.26356E1	2.67698E1	1.69297E-7	2.52131E-3	2.52131E-3	6.33388E-3	1.99394E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16321E-1	-7.98297E-1	-9.13119E0	-9.14211E0	5.60284E-3	9.3317E-2	2.7332E1	-3.2708E1	-3.26095E1	2.68154E1	1.69581E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16274E-1	-7.98392E-1	-9.13172E0	-9.14223E0	5.38826E-3	9.33647E-2	2.7334E1	-3.26402E1	-3.26189E1	2.68034E1	1.69286E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16584E-1	-7.98225E-1	-9.13146E0	-9.14221E0	5.67436E-3	9.30786E-2	2.73346E1	-3.26868E1	-3.26343E1	2.68022E1	1.6922E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00705E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16321E-1	-7.98249E-1	-9.13107E0	-9.14218E0	5.60284E-3	9.34839E-2	2.72408E1	-3.26386E1	-3.26212E1	2.68041E1	1.69433E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16703E-1	-7.98035E-1	-9.13105E0	-9.14199E0	5.65052E-3	9.33409E-2	2.73021E1	-3.26693E1	-3.26074E1	2.68208E1	1.69433E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16441E-1	-7.98345E-1	-9.13112E0	-9.14202E0	5.38826E-3	9.32217E-2	2.73201E1	-3.26741E1	-3.26272E1	2.68256E1	1.69581E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16417E-1	-7.98225E-1	-9.131E0	-9.14211E0	5.6982E-3	9.34362E-2	2.73171E1	-3.26458E1	-3.26849E1	2.68088E1	1.69581E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00705E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16679E-1	-7.98154E-1	-9.13119E0	-9.14166E0	5.43594E-3	9.35793E-2	2.73532E1	-3.26488E1	-3.26609E1	2.68166E1	1.69656E-7	2.51025E-3	2.51025E-3	6.31858E-3	1.99577E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16679E-1	-7.98345E-1	-9.13129E0	-9.14192E0	5.65052E-3	9.35078E-2	2.73299E1	-3.26862E1	-3.26166E1	2.681E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.97984E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16679E-1	-7.98154E-1	-9.13134E0	-9.14211E0	5.74589E-3	9.34124E-2	2.72943E1	-3.26843E1	-3.26356E1	2.68058E1	1.69654E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.98592E-1
1.8E1	7.8E1	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.1656E-1	-7.98345E-1	-9.13134E0	-9.14221E0	5.65052E-3	9.32217E-2	2.72757E1	-3.26404E1	-3.26567E1	2.67986E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.9963E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16321E-1	-7.98249E-1	-9.13088E0	-9.14211E0	5.74589E-3	9.3317E-2	2.73183E1	-3.26717E1	-3.26116E1	2.68016E1	1.69508E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00363E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16464E-1	-7.98297E-1	-9.13124E0	-9.14209E0	5.74589E-3	9.32932E-2	2.72811E1	-3.27029E1	-3.25924E1	2.67848E1	1.69581E-7	2.52921E-3	2.52921E-3	6.29067E-3	2.00108E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.1656E-1	-7.98106E-1	-9.13115E0	-9.14204E0	5.8651E-3	9.29594E-2	2.73113E1	-3.26568E1	-3.26137E1	2.68205E1	1.69653E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.1656E-1	-7.97915E-1	-9.13138E0	-9.14176E0	5.60284E-3	9.32217E-2	2.73176E1	-3.27539E1	-3.2583E1	2.68094E1	1.6993E-7	2.51472E-3	2.51472E-3	6.34385E-3	1.98792E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16607E-1	-7.97963E-1	-9.13122E0	-9.14195E0	6.10352E-3	9.29594E-2	2.73423E1	-3.26443E1	-3.26484E1	2.67836E1	1.70031E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.98696E-1