[Scan]
initial_time=2016-02-17T20:57:32
final_time=2016-02-17T20:57:51
ip_count=19
run=1032
dataset=7
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.37179E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.92132E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=4.1343E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.31108E-10
mult1=-9.57182E-9
mult2=-2.63078E-9
rf_tmon=-5.08922E-3
rf_agc=3.30632E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.60829E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63141E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.04217E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.20171E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38613E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.58904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.71153E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=2.21233E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.25527E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01503E1
cs_anode1_imon=3.24651E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.6924E-8
tplens_vset=1.4E-1
tplens_vmon=1.58362E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.52108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.59895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.08852E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24915E0
ionrepsh_imon=2.0074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33953E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7503E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8361E0
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12724E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53285E-1
os_ef2bup_imon=-5.64683E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.54059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02115E1
cs_anode2_imon=2.2774E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67811E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.08992E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.76866E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08209E0
cs_ionaccel_imon=-2.06089E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=1.21837E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82553E2
mask1_imon=2.38857E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=8.30542E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.57695E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07702E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64039E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00564E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63459E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65872E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67342E-2
os_fil2_imon=-3.0624E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.04193E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.47568E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22602E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.01022E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.31061E-1
res40_imon=-2.78529E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16298E-1	-7.98154E-1	-9.13126E0	-9.14161E0	5.67436E-3	9.36747E-2	2.73231E1	-3.26615E1	-3.265E1	2.67806E1	1.69213E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.97731E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16298E-1	-7.97915E-1	-9.13177E0	-9.1418E0	5.6982E-3	9.35793E-2	2.73443E1	-3.26707E1	-3.26548E1	2.67992E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.98322E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16393E-1	-7.97796E-1	-9.13141E0	-9.14214E0	5.62668E-3	9.3627E-2	2.73305E1	-3.26679E1	-3.26119E1	2.68094E1	1.69581E-7	2.52179E-3	2.52179E-3	6.33021E-3	2.00425E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1625E-1	-7.98011E-1	-9.13146E0	-9.14173E0	5.76973E-3	9.35555E-2	2.72979E1	-3.26609E1	-3.26476E1	2.6786E1	1.69297E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16226E-1	-7.98297E-1	-9.13126E0	-9.14176E0	5.6982E-3	9.377E-2	2.7344E1	-3.26585E1	-3.26549E1	2.68142E1	1.69654E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1625E-1	-7.98225E-1	-9.13143E0	-9.14183E0	5.60284E-3	9.38654E-2	2.72935E1	-3.26787E1	-3.2648E1	2.67583E1	1.69949E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16369E-1	-7.97892E-1	-9.13129E0	-9.14187E0	5.65052E-3	9.35078E-2	2.7326E1	-3.26515E1	-3.26434E1	2.67746E1	1.69802E-7	2.52867E-3	2.52867E-3	6.28006E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16178E-1	-7.98035E-1	-9.13126E0	-9.14204E0	5.60284E-3	9.3627E-2	2.73008E1	-3.26989E1	-3.26107E1	2.67945E1	1.69725E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.9917E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16274E-1	-7.98249E-1	-9.13143E0	-9.14152E0	5.6982E-3	9.36985E-2	2.72853E1	-3.26404E1	-3.26338E1	2.67943E1	1.69656E-7	2.52585E-3	2.52585E-3	6.31299E-3	1.99401E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16083E-1	-7.98059E-1	-9.13138E0	-9.14218E0	5.48363E-3	9.36985E-2	2.73417E1	-3.26608E1	-3.26502E1	2.67926E1	1.69725E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16154E-1	-7.98154E-1	-9.13124E0	-9.14204E0	5.34058E-3	9.36985E-2	2.73647E1	-3.27263E1	-3.25906E1	2.67529E1	1.6987E-7	2.52599E-3	2.52599E-3	6.30202E-3	1.9951E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16202E-1	-7.97844E-1	-9.13134E0	-9.14183E0	5.36442E-3	9.3174E-2	2.72922E1	-3.26432E1	-3.26554E1	2.67938E1	1.70023E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16131E-1	-7.97915E-1	-9.13143E0	-9.14192E0	5.72205E-3	9.35555E-2	2.73201E1	-3.26735E1	-3.26224E1	2.6792E1	1.69728E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98937E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.1625E-1	-7.9782E-1	-9.13136E0	-9.14223E0	5.81741E-3	9.35316E-2	2.73111E1	-3.26633E1	-3.26753E1	2.67722E1	1.69507E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.9911E-1
1.8E1	8.5E1	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16298E-1	-7.97939E-1	-9.1311E0	-9.14216E0	5.8651E-3	9.3174E-2	2.72973E1	-3.26963E1	-3.26248E1	2.67872E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16154E-1	-7.98082E-1	-9.13131E0	-9.14218E0	5.57899E-3	9.3317E-2	2.72898E1	-3.26744E1	-3.26343E1	2.67944E1	1.69728E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16011E-1	-7.98082E-1	-9.13119E0	-9.14202E0	5.72205E-3	9.3174E-2	2.73375E1	-3.26645E1	-3.26086E1	2.68244E1	1.69949E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16083E-1	-7.98392E-1	-9.13136E0	-9.14223E0	5.50747E-3	9.31025E-2	2.7347E1	-3.26531E1	-3.26183E1	2.68215E1	1.69581E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16083E-1	-7.98225E-1	-9.13117E0	-9.14235E0	5.43594E-3	9.30786E-2	2.72249E1	-3.26573E1	-3.27469E1	2.68064E1	1.69652E-7	2.52871E-3	2.52871E-3	6.31798E-3	2.00735E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16011E-1	-7.97963E-1	-9.13095E0	-9.14211E0	5.36442E-3	9.28879E-2	2.72883E1	-3.26807E1	-3.26194E1	2.67811E1	1.69728E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.01022E-1