[Scan]
initial_time=2016-02-17T20:57:59
final_time=2016-02-17T20:58:18
ip_count=19
run=1032
dataset=7
scan=295
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09317E0
qbias_imon=-1.08746E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.36942E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.90504E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=3.81136E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=3.90482E-10
mult1=-1.00896E-8
mult2=-2.76253E-9
rf_tmon=-3.88757E-3
rf_agc=3.2907E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=1.58982E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.04793E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=2.18279E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39179E0
lens1_imon=2.54136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.57247E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.71322E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.16873E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26592E0
cs_ionrep_imon=1.26821E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=3.2512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.69132E-8
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.59878E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03009E2
lens6_imon=2.9867E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.05226E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.99641E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81147E0
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71305E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.53735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.32848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.0757E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08716E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=9.7662E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-2.26631E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.65085E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82578E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.01871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.27248E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65721E0
defgridb_imon=5.92641E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.62044E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63689E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30924E1
cs_fil1_imon=1.00742E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62144E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66097E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.11165E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.6922E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59893E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E1	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16965E-1	-7.98225E-1	-9.1315E0	-9.14209E0	5.74589E-3	9.30071E-2	2.73711E1	-3.26695E1	-3.26364E1	2.67949E1	1.69507E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98247E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16417E-1	-7.98059E-1	-9.13148E0	-9.14183E0	5.79357E-3	9.30071E-2	2.73153E1	-3.26939E1	-3.26104E1	2.68094E1	1.69368E-7	2.50867E-3	2.50867E-3	6.32328E-3	1.98395E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16417E-1	-7.97844E-1	-9.13115E0	-9.14183E0	5.74589E-3	9.32217E-2	2.73291E1	-3.26248E1	-3.26512E1	2.67884E1	1.69802E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.00151E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16298E-1	-7.97844E-1	-9.13141E0	-9.14195E0	5.96046E-3	9.29594E-2	2.72898E1	-3.2675E1	-3.26431E1	2.6804E1	1.69654E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16393E-1	-7.98178E-1	-9.13129E0	-9.14195E0	5.98431E-3	9.31025E-2	2.73393E1	-3.26844E1	-3.26602E1	2.67956E1	1.69433E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16393E-1	-7.97796E-1	-9.13126E0	-9.14204E0	6.34193E-3	9.3174E-2	2.728E1	-3.26676E1	-3.26132E1	2.68292E1	1.69436E-7	2.52169E-3	2.52169E-3	6.28592E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16107E-1	-7.97939E-1	-9.13138E0	-9.14176E0	5.8651E-3	9.30309E-2	2.72787E1	-3.26723E1	-3.26567E1	2.68004E1	1.69728E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16202E-1	-7.98059E-1	-9.13157E0	-9.1419E0	5.79357E-3	9.30309E-2	2.73322E1	-3.26685E1	-3.26248E1	2.68065E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.16202E-1	-7.97939E-1	-9.13143E0	-9.1419E0	5.43594E-3	9.32932E-2	2.72895E1	-3.26554E1	-3.26296E1	2.67764E1	1.69581E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9934E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.16202E-1	-7.97963E-1	-9.13122E0	-9.14202E0	5.74589E-3	9.3317E-2	2.72895E1	-3.26657E1	-3.2638E1	2.67854E1	1.69875E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16274E-1	-7.97987E-1	-9.1311E0	-9.1418E0	5.79357E-3	9.31263E-2	2.73219E1	-3.26416E1	-3.26464E1	2.67998E1	1.69875E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.17037E-1	-7.97844E-1	-9.13105E0	-9.14183E0	5.8651E-3	9.34124E-2	2.73039E1	-3.26785E1	-3.26502E1	2.67908E1	1.69654E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.00325E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16727E-1	-7.97772E-1	-9.13124E0	-9.14192E0	5.93662E-3	9.34124E-2	2.72787E1	-3.262E1	-3.26651E1	2.67974E1	1.69507E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98764E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16488E-1	-7.97939E-1	-9.13172E0	-9.14197E0	5.76973E-3	9.35793E-2	2.73171E1	-3.26999E1	-3.25942E1	2.681E1	1.69949E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98937E-1
1.8E1	9.4E1	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16321E-1	-7.97987E-1	-9.13146E0	-9.14204E0	5.65052E-3	9.38416E-2	2.72805E1	-3.26356E1	-3.26777E1	2.6801E1	1.69728E-7	2.52538E-3	2.52538E-3	6.34037E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.16536E-1	-7.97987E-1	-9.13119E0	-9.1423E0	5.38826E-3	9.37462E-2	2.72839E1	-3.26773E1	-3.26201E1	2.68022E1	1.69653E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9917E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16488E-1	-7.97915E-1	-9.13126E0	-9.1424E0	6.00815E-3	9.37462E-2	2.73253E1	-3.26499E1	-3.2648E1	2.68424E1	1.69949E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16393E-1	-7.98249E-1	-9.13112E0	-9.14218E0	5.8651E-3	9.35078E-2	2.72709E1	-3.26826E1	-3.26313E1	2.68256E1	1.69802E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.16345E-1	-7.98011E-1	-9.1311E0	-9.14192E0	6.00815E-3	9.34362E-2	2.73576E1	-3.26667E1	-3.24856E1	2.67956E1	1.69436E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.9934E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09317E0	-8.1625E-1	-7.97772E-1	-9.13119E0	-9.14195E0	6.12736E-3	9.3627E-2	2.73327E1	-3.2647E1	-3.26284E1	2.67776E1	1.6922E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.99E-1