[Scan]
initial_time=2016-02-17T20:58:25
final_time=2016-02-17T20:58:45
ip_count=19
run=1032
dataset=7
scan=296
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.36733E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.88137E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.50034E-10
ql4_vset=
ql4_vmon=-9.14228E0
ql4_imon=4.00293E-10
mult1=-9.84219E-9
mult2=-2.85456E-9
rf_tmon=-4.74544E-3
rf_agc=3.38459E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.57827E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69866E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05298E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=3.04253E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=2.19746E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35958E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.59364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.71108E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=2.2141E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26154E0
cs_ionrep_imon=1.26377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.25408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.68725E-8
tplens_vset=1.4E-1
tplens_vmon=1.61843E0
tplens_imon=-4.86476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.58514E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98618E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.07341E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=2.00032E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.20879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84141E0
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0616E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.83318E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.53591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.27957E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73263E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09002E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=9.77578E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-2.09693E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.64543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.52675E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.41183E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.5349E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63971E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=1.00184E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62041E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65376E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71141E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.85818E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2247E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19358E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E1	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16536E-1	-7.98297E-1	-9.13155E0	-9.14226E0	5.67436E-3	9.35078E-2	2.73063E1	-3.26488E1	-3.2632E1	2.67711E1	1.69875E-7	2.52538E-3	2.52538E-3	6.29645E-3	2.00151E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16607E-1	-7.98488E-1	-9.13146E0	-9.14226E0	5.88894E-3	9.33409E-2	2.73135E1	-3.26681E1	-3.26488E1	2.68144E1	1.69653E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16536E-1	-7.98368E-1	-9.13138E0	-9.14214E0	5.67436E-3	9.30309E-2	2.7319E1	-3.26689E1	-3.26492E1	2.67955E1	1.69802E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00151E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16512E-1	-7.98202E-1	-9.13179E0	-9.14199E0	5.65052E-3	9.32455E-2	2.73099E1	-3.26524E1	-3.26561E1	2.68169E1	1.69436E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16631E-1	-7.98178E-1	-9.13174E0	-9.14214E0	5.6982E-3	9.32455E-2	2.73075E1	-3.26956E1	-3.26219E1	2.6786E1	1.69725E-7	2.52923E-3	2.52923E-3	6.32356E-3	1.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16798E-1	-7.98154E-1	-9.13177E0	-9.14197E0	5.55515E-3	9.32693E-2	2.73069E1	-3.26801E1	-3.26212E1	2.6789E1	1.69436E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.98153E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16607E-1	-7.9813E-1	-9.13191E0	-9.14204E0	5.6982E-3	9.3317E-2	2.72933E1	-3.26649E1	-3.26107E1	2.68076E1	1.69654E-7	2.51007E-3	2.51007E-3	6.32936E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16631E-1	-7.98225E-1	-9.13179E0	-9.14178E0	5.65052E-3	9.30309E-2	2.73265E1	-3.26799E1	-3.26529E1	2.68178E1	1.69654E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16584E-1	-7.98464E-1	-9.13169E0	-9.14187E0	5.53131E-3	9.33409E-2	2.73291E1	-3.26807E1	-3.2605E1	2.68142E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.16846E-1	-7.98416E-1	-9.13174E0	-9.14187E0	5.48363E-3	9.36508E-2	2.72769E1	-3.26879E1	-3.26518E1	2.68635E1	1.69654E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16369E-1	-7.98297E-1	-9.13169E0	-9.14221E0	5.38826E-3	9.34601E-2	2.72632E1	-3.26437E1	-3.26514E1	2.67649E1	1.69728E-7	2.52757E-3	2.52757E-3	6.34037E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16488E-1	-7.98059E-1	-9.13191E0	-9.14187E0	5.57899E-3	9.34362E-2	2.73237E1	-3.26675E1	-3.26176E1	2.67798E1	1.69581E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16321E-1	-7.98035E-1	-9.13172E0	-9.14237E0	5.48363E-3	9.31501E-2	2.72877E1	-3.26585E1	-3.26074E1	2.68112E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
1.7E1	1.3E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16488E-1	-7.9782E-1	-9.13186E0	-9.14202E0	5.07832E-3	9.32693E-2	2.73411E1	-3.2675E1	-3.25995E1	2.68082E1	1.69581E-7	2.51443E-3	2.51443E-3	6.3514E-3	1.99803E-1
1.8E1	1.03E2	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16464E-1	-7.98154E-1	-9.13172E0	-9.14197E0	5.45979E-3	9.34362E-2	2.72781E1	-3.26675E1	-3.26326E1	2.68064E1	1.69725E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16536E-1	-7.98225E-1	-9.13162E0	-9.1418E0	5.62668E-3	9.34839E-2	2.72967E1	-3.26909E1	-3.2647E1	2.67818E1	1.69728E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.97903E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16488E-1	-7.98011E-1	-9.13167E0	-9.14202E0	5.74589E-3	9.32693E-2	2.73003E1	-3.26759E1	-3.2629E1	2.67986E1	1.69728E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16178E-1	-7.97653E-1	-9.13193E0	-9.14176E0	5.45979E-3	9.34362E-2	2.7312E1	-3.26944E1	-3.2633E1	2.68036E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16011E-1	-7.97987E-1	-9.13129E0	-9.14195E0	5.43594E-3	9.33886E-2	2.74511E1	-3.27774E1	-3.25551E1	2.68376E1	1.69798E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00534E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16154E-1	-7.97939E-1	-9.13143E0	-9.14228E0	5.26905E-3	9.32217E-2	2.73263E1	-3.26803E1	-3.26119E1	2.68022E1	1.6987E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00534E-1