[Scan]
initial_time=2016-02-17T20:58:52
final_time=2016-02-17T20:59:11
ip_count=19
run=1032
dataset=7
scan=297
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.36388E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.88972E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=4.07147E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=3.94654E-10
mult1=-9.46389E-9
mult2=-2.80949E-9
rf_tmon=-4.92831E-3
rf_agc=3.34802E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=1.57475E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19642E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.03171E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.19215E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40677E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0431E1
cs_ea2_imon=1.57913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.02054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.71439E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.19074E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26685E0
cs_ionrep_imon=1.26058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01593E1
cs_anode1_imon=3.27174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.69503E-8
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26502E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.06011E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23735E0
ionrepsh_imon=2.01766E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82784E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09901E0
os_ef2alow_imon=-2.7961E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.56289E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.53122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.27813E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08493E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=9.76247E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55979E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.62082E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.78701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.36393E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.5343E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64225E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30961E1
cs_fil1_imon=1.00328E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65702E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80527E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.69286E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40057E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36777E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16154E-1	-7.98059E-1	-9.13131E0	-9.14171E0	5.48363E-3	9.33409E-2	2.72901E1	-3.26741E1	-3.26386E1	2.67734E1	1.69798E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.00021E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16131E-1	-7.97772E-1	-9.13143E0	-9.14185E0	5.67436E-3	9.3317E-2	2.72781E1	-3.26729E1	-3.26182E1	2.682E1	1.69507E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98075E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16274E-1	-7.98082E-1	-9.1315E0	-9.14192E0	6.03199E-3	9.30309E-2	2.73104E1	-3.26809E1	-3.2626E1	2.68076E1	1.69806E-7	2.52139E-3	2.52139E-3	6.28511E-3	1.96771E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16059E-1	-7.98345E-1	-9.13134E0	-9.14199E0	5.48363E-3	9.32217E-2	2.72949E1	-3.26693E1	-3.26482E1	2.678E1	1.6951E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.98063E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16178E-1	-7.98297E-1	-9.13143E0	-9.14207E0	5.65052E-3	9.31501E-2	2.73309E1	-3.26681E1	-3.2623E1	2.68034E1	1.69066E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16154E-1	-7.98368E-1	-9.13148E0	-9.14197E0	5.74589E-3	9.33647E-2	2.73225E1	-3.26585E1	-3.26669E1	2.68064E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.01547E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.15988E-1	-7.98154E-1	-9.13136E0	-9.14207E0	5.6982E-3	9.32455E-2	2.72793E1	-3.26681E1	-3.26128E1	2.68268E1	1.69731E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.01174E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16107E-1	-7.97987E-1	-9.13165E0	-9.14204E0	5.6982E-3	9.31978E-2	2.72913E1	-3.26807E1	-3.26332E1	2.68238E1	1.69653E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.00021E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16107E-1	-7.98154E-1	-9.13174E0	-9.14211E0	5.05447E-3	9.30786E-2	2.73334E1	-3.26549E1	-3.26119E1	2.68283E1	1.69728E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16202E-1	-7.97749E-1	-9.13167E0	-9.14199E0	5.45979E-3	9.32217E-2	2.72933E1	-3.26809E1	-3.26083E1	2.67958E1	1.69798E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.9951E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16274E-1	-7.98082E-1	-9.13172E0	-9.14223E0	5.50747E-3	9.34839E-2	2.73014E1	-3.26193E1	-3.25905E1	2.67902E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.1625E-1	-7.98273E-1	-9.13191E0	-9.14195E0	5.65052E-3	9.31978E-2	2.73305E1	-3.26685E1	-3.26089E1	2.68034E1	1.69507E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99977E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16369E-1	-7.98202E-1	-9.13153E0	-9.14178E0	5.57899E-3	9.32693E-2	2.73183E1	-3.26705E1	-3.26597E1	2.68022E1	1.69725E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.00192E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16154E-1	-7.98059E-1	-9.13155E0	-9.14166E0	5.67436E-3	9.30548E-2	2.72901E1	-3.26969E1	-3.26302E1	2.68184E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.8E1	9.1E1	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16393E-1	-7.97987E-1	-9.1316E0	-9.14187E0	5.88894E-3	9.3174E-2	2.73039E1	-3.26759E1	-3.26518E1	2.67692E1	1.69654E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16441E-1	-7.97868E-1	-9.13138E0	-9.14166E0	5.8651E-3	9.30786E-2	2.73187E1	-3.26708E1	-3.26231E1	2.68064E1	1.69581E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16488E-1	-7.97963E-1	-9.13179E0	-9.14178E0	5.76973E-3	9.31978E-2	2.73003E1	-3.26855E1	-3.26266E1	2.6789E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16417E-1	-7.97915E-1	-9.13138E0	-9.1419E0	5.8651E-3	9.32217E-2	2.73317E1	-3.2695E1	-3.2633E1	2.68528E1	1.70023E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16345E-1	-7.98273E-1	-9.13131E0	-9.14209E0	5.72205E-3	9.2864E-2	2.74517E1	-3.27828E1	-3.25707E1	2.67873E1	1.6972E-7	2.5199E-3	2.5199E-3	6.3282E-3	2.00435E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.1625E-1	-7.98106E-1	-9.13126E0	-9.14185E0	5.76973E-3	9.31978E-2	2.73187E1	-3.26726E1	-3.26502E1	2.67758E1	1.69286E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00325E-1