[Scan]
initial_time=2016-02-17T21:00:12
final_time=2016-02-17T21:00:31
ip_count=19
run=1032
dataset=7
scan=300
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36732E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.92441E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.46923E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=4.02856E-10
mult1=-9.22746E-9
mult2=-2.74481E-9
rf_tmon=-5.82496E-3
rf_agc=3.25068E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.59388E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.88743E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12557E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.04757E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.2091E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.56021E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.71342E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=2.19793E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.26821E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.25084E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.69156E-8
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-4.57964E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26467E1
iondef3_imon=1.51371E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2688E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98825E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.0621E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=2.0047E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34048E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86254E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58691E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.5287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.2774E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08988E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=9.76944E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.54874E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.57748E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.07999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.6453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0656E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64097E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=1.00989E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62053E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65728E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.01498E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22287E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.578E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16345E-1	-7.98702E-1	-9.13126E0	-9.14218E0	5.62668E-3	9.33886E-2	2.73303E1	-3.26711E1	-3.26134E1	2.68094E1	1.69581E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00151E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1625E-1	-7.98297E-1	-9.131E0	-9.14204E0	5.53131E-3	9.33409E-2	2.73075E1	-3.26825E1	-3.26374E1	2.67968E1	1.69802E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.99456E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16321E-1	-7.98249E-1	-9.13103E0	-9.14202E0	5.17368E-3	9.34362E-2	2.72817E1	-3.26633E1	-3.26452E1	2.68028E1	1.69802E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.97903E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16679E-1	-7.98368E-1	-9.13136E0	-9.1418E0	5.65052E-3	9.34839E-2	2.73322E1	-3.26767E1	-3.26366E1	2.68094E1	1.69728E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.99977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16512E-1	-7.98345E-1	-9.13131E0	-9.14185E0	5.22137E-3	9.34124E-2	2.72992E1	-3.26408E1	-3.26319E1	2.68088E1	1.69581E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16464E-1	-7.98345E-1	-9.13105E0	-9.14204E0	5.05447E-3	9.34124E-2	2.73177E1	-3.26633E1	-3.2605E1	2.68094E1	1.69794E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.98561E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16321E-1	-7.98416E-1	-9.13112E0	-9.14216E0	5.24521E-3	9.33886E-2	2.73075E1	-3.27003E1	-3.26644E1	2.6789E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16512E-1	-7.9813E-1	-9.13115E0	-9.14228E0	5.38826E-3	9.34124E-2	2.73099E1	-3.26422E1	-3.26296E1	2.67931E1	1.69802E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00151E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16298E-1	-7.97963E-1	-9.13093E0	-9.14183E0	5.50747E-3	9.35078E-2	2.72913E1	-3.26506E1	-3.26362E1	2.68106E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9883E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16178E-1	-7.98202E-1	-9.13115E0	-9.14218E0	5.36442E-3	9.33886E-2	2.72979E1	-3.26669E1	-3.26488E1	2.68016E1	1.69581E-7	2.52139E-3	2.52139E-3	6.29624E-3	1.9852E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16226E-1	-7.98416E-1	-9.13136E0	-9.14195E0	5.67436E-3	9.33886E-2	2.73712E1	-3.27009E1	-3.26413E1	2.68196E1	1.6987E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.97815E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16369E-1	-7.98106E-1	-9.13126E0	-9.14226E0	5.67436E-3	9.32455E-2	2.72997E1	-3.26645E1	-3.2635E1	2.68154E1	1.69875E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99977E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16202E-1	-7.98249E-1	-9.13131E0	-9.14214E0	5.57899E-3	9.33409E-2	2.73261E1	-3.26669E1	-3.26218E1	2.6804E1	1.69802E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98592E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16154E-1	-7.98488E-1	-9.13122E0	-9.14237E0	5.67436E-3	9.3317E-2	2.73267E1	-3.26891E1	-3.26176E1	2.6807E1	1.69581E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98937E-1
1.8E1	8.2E1	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16154E-1	-7.98726E-1	-9.13117E0	-9.1424E0	5.36442E-3	9.34839E-2	2.73147E1	-3.26939E1	-3.26038E1	2.68046E1	1.69213E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.97559E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16178E-1	-7.98249E-1	-9.13143E0	-9.14226E0	5.76973E-3	9.32932E-2	2.72991E1	-3.26831E1	-3.26434E1	2.67992E1	1.69507E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98592E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16321E-1	-7.98464E-1	-9.13141E0	-9.1418E0	5.43594E-3	9.32455E-2	2.73069E1	-3.26714E1	-3.26561E1	2.68034E1	1.69581E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16512E-1	-7.98154E-1	-9.13136E0	-9.14183E0	5.84126E-3	9.34839E-2	2.72955E1	-3.2629E1	-3.262E1	2.67958E1	1.69581E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16607E-1	-7.98035E-1	-9.13169E0	-9.14183E0	5.55515E-3	9.32455E-2	2.71753E1	-3.25677E1	-3.27558E1	2.68005E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00847E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16417E-1	-7.98368E-1	-9.1315E0	-9.14226E0	5.45979E-3	9.32217E-2	2.73269E1	-3.2688E1	-3.26467E1	2.67944E1	1.69653E-7	2.52276E-3	2.52276E-3	6.35059E-3	1.9985E-1